SECS

Table of Contents

1. Overview
2. Configure
3. Sample Scenario
4. Quick Link
5. Script Definitions

Overview

Port Application provides simulation capabilities using scripts(*.sna). Users can utilize this to proceed with development based on testing before service deployment.

Configure

Decorate a class with [GEM] and inject IGemHandler via [GemHandler]. Apply settings inside a [Preset] method using the handler.Set* API.

[GEM]
public class MyGemHelper
{
    [GemHandler]
    public IGemHandler handler { get; set; } = null!;

    [Preset]
    private void Preset()
    {
        // ── Connection ──────────────────────────────────────────
        handler.SetMode(Mode.Active);           // Active or Passive
        handler.SetAddress("127.0.0.1:6000");  // HSMS listen address:port
        handler.SetDevice(0);                   // Equipment device ID
        handler.SetConnectTimeout(10);          // TCP connect timeout (s)
        handler.SetMaxRetriesCount(10);         // Reconnect retry count
        handler.SetRetryDelaySec(3);            // Delay between retries (s)

        // ── HSMS Timers ─────────────────────────────────────────
        handler.SetT1(1);   // Inter-character timeout (s)
        handler.SetT2(10);  // Protocol timeout (s)
        handler.SetT3(45);  // Reply timeout (s)
        handler.SetT4(30);  // Inter-transaction timeout (s)
        handler.SetT5(10);  // Connect separation timeout (s)
        handler.SetT6(5);   // Control transaction timeout (s)
        handler.SetT7(10);  // Not selected timeout (s)
        handler.SetT8(5);   // Network inter-character timeout (s)

        // ── Logging ─────────────────────────────────────────────
        handler.SetLogger("./hsms");            // Log directory (simple)
        // — or — all log options at once:
        handler.SetLogger("./hsms", new PortLogConfiguration
        {
            RotationHours = 1,
            RetentionDay  = 30,
            LogFileExt    = ".log",
            LogNameFormat = "hsms",
        });
        handler.SetLogFileExt(".log");          // Log file extension
        handler.SetLogRetentionDay(30);         // Days to keep log files
        handler.SetLogRotationHour(1);          // New file every N hours
        handler.SetLogNameFormat("hsms");       // Filename prefix

        // ── Identity / Data Dictionary ───────────────────────────
        handler.SetValue("MDLN",    new A("MyEquipment")); // S1F13/S1F14
        handler.SetValue("SOFTREV", new A("1.0.0"));
        handler.SetDataDictionary(DataDictionaryKey.DATAID, SecsDataType.U2);
        handler.SetDataDictionary(DataDictionaryKey.ECID,   SecsDataType.U2);
        handler.SetDataDictionary(DataDictionaryKey.PTN,    SecsDataType.B);

        // ── Events ───────────────────────────────────────────────
        handler.OnEvent         += Handler_OnEvent;
        handler.OnStatusChanged += Handler_OnStatusChanged;
    }

    private void Handler_OnEvent(DateTime time, string eventtext) { }
    private void Handler_OnStatusChanged(DateTime time, string status) { }
}

Connection

Method	Default	Description
SetMode(Mode)	—	Active (client) or Passive (server)
SetAddress(string)	—	TCP endpoint "ip:port"
SetDevice(int)	—	HSMS Device ID
SetConnectTimeout(int)	10	TCP connect timeout (s)
SetMaxRetriesCount(int)	10	Number of reconnect attempts
SetRetryDelaySec(int)	3	Delay between retries (s)

HSMS Timers

Method	Default	Description
SetT1(int)	1	Inter-character timeout (s)
SetT2(int)	10	Protocol timeout (s)
SetT3(int)	45	Reply timeout (s)
SetT4(int)	30	Inter-transaction timeout (s)
SetT5(int)	10	Connect separation timeout (s)
SetT6(int)	5	Control transaction timeout (s)
SetT7(int)	10	Not selected timeout (s)
SetT8(int)	5	Network inter-character timeout (s)

Logging

Method	Default	Description
SetLogger(string)	"./hsms"	Log output directory
SetLogger(string, PortLogConfiguration)	—	Directory + all log options at once
SetLogFileExt(string)	".log"	Log file extension
SetLogRetentionDay(int)	30	Days to retain log files (0 = keep forever)
SetLogRotationHour(int)	1	Create a new file every N hours (1–24)
SetLogNameFormat(string)	"hsms"	Filename prefix; produces hsms_2025-01-01-14.log

Identity / Data Dictionary

Method	Description
SetValue(string, ISecsData)	Set a named identity value sent in S1F13/S1F14 (e.g. MDLN, SOFTREV)
SetDataDictionary(DataDictionaryKey, SecsDataType, int)	Declare the SECS data type for a specific dictionary key

Download Sample: Download Sample Project

Sample Scenario Table

The following table outlines the SECS/GEM communication scenario for material handling, event reporting, and process execution in a semiconductor manufacturing environment.

Message	Direction	Description	Details
S1F13	H → E	Establish Communication Request	Initiates communication between host and equipment.
S1F14	E → H	Acknowledge	Confirms successful communication establishment.
S6F11	E → H	Event Report Send	Reports OnlineRemote event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges receipt of S6F11 event report.
S2F37	H → E	Disable Event	Requests disabling of specific event reporting.
S2F38	E → H	Acknowledge	Confirms event disabling.
S2F33	H → E	Delete Reports All	Requests deletion of all defined reports.
S2F34	E → H	Acknowledge	Confirms deletion of reports.
S2F33	H → E	Define Report	Defines new report structure for event reporting.
S2F34	E → H	Acknowledge	Confirms report definition.
S2F35	H → E	Link Event Report	Links events to defined reports.
S2F36	E → H	Acknowledge	Confirms event-report linkage.
S2F37	H → E	Enable Event	Requests enabling of specific event reporting.
S2F38	E → H	Acknowledge	Confirms event enabling.
S6F11	E → H	Event Report Send	Reports LP_In_Service event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_In_Service event.
S3F27	E → H	Port Access Mode - Auto	Sets load port to automatic access mode.
S3F28	H → E	Acknowledge	Confirms port access mode change.
S6F11	E → H	Event Report Send	Reports LP_AccessModeChanged event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_AccessModeChanged event.
S6F11	E → H	Event Report Send	Reports LP_ReadyToLoad event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_ReadyToLoad event.
S6F11	E → H	Event Report Send	Reports LP_TRReady event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_TRReady event.
-	-	Load Port Transfer State	Load port is in Ready To Load state.
-	-	Operator Action	Operator delivers carrier and loads it onto the load port.
S6F11	E → H	Event Report Send	Reports Load Complete event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges Load Complete event.
S6F11	E → H	Event Report Send	Reports LP_TransferBlocked event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_TransferBlocked event.
S6F11	E → H	Event Report Send	Reports LP_CarrierClamped event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_CarrierClamped event.
S6F11	E → H	Event Report Send	Reports LP_CarrierID Waiting for Host event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_CarrierID Waiting event.
S3F17	H → E	PROCEEDWITHCARRIER Event	Host verifies the carrier ID.
S3F18	E → H	Acknowledge	Confirms carrier ID verification.
S6F11	E → H	Event Report Send	Reports LP_CarrierID_VERIFICATION_OK event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_CarrierID_VERIFICATION_OK event.
S6F11	E → H	Event Report Send	Reports LP_CarrierDocked event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_CarrierDocked event.
S6F11	E → H	Event Report Send	Reports LP_DoorOpened event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_DoorOpened event.
S6F11	E → H	Event Report Send	Reports LP_SlotMap Waiting for Host event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_SlotMap Waiting event.
S3F17	H → E	PROCEEDWITHCARRIER Event	Host verifies the slot map.
S3F18	E → H	Acknowledge	Confirms slot map verification.
S6F11	E → H	Event Report Send	Reports LP_SlotMap_VERIFICATION_OK event (CEID = n).
S16F15	H → E	ProcessJob Create	Creates process job with recipe, lot ID, and wafer details.
S16F16	E → H	Acknowledge	Confirms process job creation.
S6F11	E → H	Event Report Send	Reports PrJobStateChanged event (CEID = n, PrJobStatus = Pooled).
S6F12	H → E	Acknowledge	Acknowledges PrJobStateChanged event.
S14F9	H → E	ControlJob Start	Initiates control job start.
S14F10	E → H	Acknowledge	Confirms control job start.
S6F11	E → H	Event Report Send	Reports ControlJobStateChanged event (CEID = n, CrJobStatus = Queued).
S6F12	H → E	Acknowledge	Acknowledges ControlJobStateChanged event.
S6F11	E → H	Event Report Send	Reports ControlJobStateChanged event (CEID = n, CrJobStatus = Selected).
S6F12	H → E	Acknowledge	Acknowledges ControlJobStateChanged event.
S6F11	E → H	Event Report Send	Reports ControlJobStateChanged event (CEID = n, CrJobStatus = Waiting).
S6F12	H → E	Acknowledge	Acknowledges ControlJobStateChanged event.
S6F11	E → H	Event Report Send	Reports ControlJobStateChanged event (CEID = n, CrJobStatus = Executing).
S6F12	H → E	Acknowledge	Acknowledges ControlJobStateChanged event.
S6F11	E → H	Event Report Send	Reports PrJobStateChanged event (CEID = n, PrJobStatus = Setting Up).
S6F12	H → E	Acknowledge	Acknowledges PrJobStateChanged event.
S6F11	E → H	Event Report Send	Reports PrJobStateChanged event (CEID = n, PrJobStatus = Waiting).
S6F12	H → E	Acknowledge	Acknowledges PrJobStateChanged event.
S6F11	E → H	Event Report Send	Reports PrJobStateChanged event (CEID = n, PrJobStatus = Processing).
S6F12	H → E	Acknowledge	Acknowledges PrJobStateChanged event.
S6F11	E → H	Event Report Send	Reports WaferProcessStart event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WaferProcessStart event.
S6F11	E → H	Event Report Send	Reports WAFER CASSETTE TO ROBOT UPPER ARM event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER CASSETTE TO ROBOT UPPER ARM event.
S6F11	E → H	Event Report Send	Reports WAFER ROBOT UPPER ARM TO ALIGN event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER ROBOT UPPER ARM TO ALIGN event.
S6F11	E → H	Event Report Send	Reports Pre Align Start event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges Pre Align Start event.
S6F11	E → H	Event Report Send	Reports Pre Align End event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges Pre Align End event.
S6F11	E → H	Event Report Send	Reports WAFER ALIGN TO ROBOT UPPER ARM event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER ALIGN TO ROBOT UPPER ARM event.
S6F11	E → H	Event Report Send	Reports WAFER ROBOT UPPER ARM TO stage(A) event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER ROBOT UPPER ARM TO stage(A) event.
S6F11	E → H	Event Report Send	Reports Statge(A) Processing Start event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges Statge(A) Processing Start event.
S6F11	E → H	Event Report Send	Reports Statge(A) Processing End event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges Statge(A) Processing End event.
S6F11	E → H	Event Report Send	Reports WAFER stage(A) TO ROBOT UPPER ARM event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER stage(A) TO ROBOT UPPER ARM event.
S6F11	E → H	Event Report Send	Reports WAFER ROBOT UPPER ARM TO MOIRE event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER ROBOT UPPER ARM TO MOIRE event.
S6F11	E → H	Event Report Send	Reports stage(B) Processing Start event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges stage(B) Processing Start event.
S6F11	E → H	Event Report Send	Reports stage(B) Processing End event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges stage(B) Processing End event.
S6F11	E → H	Event Report Send	Reports WAFER MOIRE TO ROBOT UPPER ARM event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER MOIRE TO ROBOT UPPER ARM event.
S6F11	E → H	Event Report Send	Reports WAFER ROBOT UPPER ARM TO CASSETTE event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WAFER ROBOT UPPER ARM TO CASSETTE event.
S6F11	E → H	Event Report Send	Reports WaferProcessEnd event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges WaferProcessEnd event.
-	-	Data Upload	Wafer Dcolldata is uploaded to the host.
S6F11	E → H	Event Report Send	Reports PrJobStateChanged event (CEID = n, PrJobStatus = Completed).
S6F12	H → E	Acknowledge	Acknowledges PrJobStateChanged event.
S6F11	E → H	Event Report Send	Reports ControlJobStateChanged event (CEID = n, CrJobStatus = Completed).
S6F12	H → E	Acknowledge	Acknowledges ControlJobStateChanged event.
S6F11	E → H	Event Report Send	Reports LP_DoorClosed event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_DoorClosed event.
S6F11	E → H	Event Report Send	Reports LP_CarrierUndocked event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_CarrierUndocked event.
S6F11	E → H	Event Report Send	Reports LP_CarrierUnclamped event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_CarrierUnclamped event.
S6F11	E → H	Event Report Send	Reports LP_ReadyToUnload event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_ReadyToUnload event.
S6F11	E → H	Event Report Send	Reports LP_TRReady event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_TRReady event.
S6F11	E → H	Event Report Send	Reports LP_TransferBlocked event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_TransferBlocked event.
S6F11	E → H	Event Report Send	Reports LP_UnloadComplete event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_UnloadComplete event.
S6F11	E → H	Event Report Send	Reports ControlJobStateChanged event (CEID = n, CrJobStatus = Deleted).
S6F12	H → E	Acknowledge	Acknowledges ControlJobStateChanged event.
S6F11	E → H	Event Report Send	Reports LP_ReadyToLoad event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_ReadyToLoad event.
S6F11	E → H	Event Report Send	Reports LP_TRReady event (CEID = n).
S6F12	H → E	Acknowledge	Acknowledges LP_TRReady event.

Quick link

Stream	Function
S1	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24
S2	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28 F29 F30 F31 F32 F33 F34 F35 F36 F37 F38 F39 F40 F41 F42 F43 F44 F45 F46 F47 F48 F49 F50 F51 F52 F53 F54 F55 F56 F57 F58 F59 F60 F61 F62 F63 F64
S3	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28 F29 F30 F31 F32 F33 F34 F35 F36
S4	F1 F2 F3 F5 F7 F9 F11 F13 F15 F17 F18 F19 F20 F21
S5	F1 F2 F3 F4 F5 F6 F7 F8
S6	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28 F29 F30
S7	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28 F29 F30 F31 F32 F33 F34 F35 F36 F37 F38 F39 F40 F41 F42 F43 F44
S8	F1 F2 F3 F4
S9	F1 F3 F5 F7 F9 F11 F13
S10	F1 F2 F3 F5 F7 F9 F10
S12	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19
S13	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16
S14	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28
S15	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28 F29 F30 F31 F32 F33 F34 F35 F36 F37 F38 F39 F40 F41 F42 F43 F44 F45 F46 F47 F48 F49 F50 F51 F52 F53 F54
S16	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28 F29 F30
S17	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14
S18	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16
S19	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20
S20	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20 F21 F22 F23 F24 F25 F26 F27 F28 F29 F30 F31 F32 F33 F34
S21	F1 F2 F3 F4 F5 F6 F7 F8 F9 F10 F11 F12 F13 F14 F15 F16 F17 F18 F19 F20

Message Structure

Basic Format

{L[n]
  item_1
  item_2
  ...
  item_n
}

• L[n]: List containing n items

Stream Definitions

Stream	Description
Stream 1	Equipment Status
Stream 2	Equipment Control and Diagnostics
Stream 3	Material Status
Stream 4	Material Control
Stream 5	Exception Reporting
Stream 6	Data Collection
Stream 7	Process Program Management
Stream 8	Control Program Management
Stream 9	System Errors
Stream 10	Terminal Services
Stream 12	Wafer Mapping
Stream 13	Data Set Management
Stream 14	Object Services
Stream 15	Recipe Management
Stream 16	Process Job Management
Stream 17	Data Report Management
Stream 18	Subsystem Management
Stream 19	Inventory Management
Stream 20	Substrate Transfer (SEMI-E157)
Stream 21	Material Transfer Management

Stream 1: Equipment Status

Purpose: Equipment state information and basic communication

Message	Direction	Description
S1F1	→ Equipment	Are You There (Request)
S1F2	← Equipment	Are You There (Response)
S1F3	→ Equipment	Selected Equipment Status Request
S1F4	← Equipment	Selected Equipment Status Data
S1F5	→ Equipment	Formatted Status Request
S1F6	← Equipment	Formatted Status Data
S1F7	→ Equipment	Fixed Form Request
S1F8	← Equipment	Fixed Form Data
S1F9	→ Equipment	Material Transfer Status Request
S1F10	← Equipment	Material Transfer Status Data
S1F11	→ Equipment	Status Variable Namelist Request
S1F12	← Equipment	Status Variable Namelist Reply
S1F13	→ Equipment	Establish Communications Request
S1F14	← Equipment	Establish Communications Request Acknowledge
S1F15	→ Equipment	Request OFF-LINE
S1F16	← Equipment	OFF-LINE Acknowledge
S1F17	→ Equipment	Request ON-LINE
S1F18	← Equipment	ON-LINE Acknowledge
S1F19	→ Equipment	Get Attribute
S1F20	← Equipment	Attribute Data
S1F21	→ Equipment	Data Variable Namelist Request
S1F22	← Equipment	Data Variable Namelist Reply
S1F23	→ Equipment	Collection Event Namelist Request
S1F24	← Equipment	Collection Event Namelist Reply

S1F1 - Are You There (Request)

<-S1F1 or S1F1->
{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

---

S1F2 - Are You There (Response)

S1F2-> or <-S1F2
{L[2]
  MDLN    // Equipment model name
  SOFTREV // Software revision
}

Parameters:

Parameter	Type	Description
MDLN	ASCII	Equipment model name
SOFTREV	ASCII	Software revision

---

S1F3 - Selected Equipment Status Request

<-S1F3
{L[n]
  SVID    // Status Variable ID list
}

Parameters:

Parameter	Type	Description
SVID	List	List of Status Variable IDs to request

---

S1F4 - Selected Equipment Status Data

S1F4->
{L[n]
  SV      // Status Variable values
}

Parameters:

Parameter	Type	Description
SV	List	Status variable values corresponding to requested SVIDs

Note: Zero length values are returned for unknown SVIDs.

---

S1F5R - Formatted Status Request

<-S1F5
SFCD     // Status Format Code

Parameters:

Parameter	Type	Description
SFCD	U1/U2/U4/A	Status Format Code defining the requested format

---

S1F6 - Formatted Status Data

S1F6->
{L[n]
  SV      // Status Variable values
}

Parameters:

Parameter	Type	Description
SV	List	Formatted status variable values

Note: Message structure varies by implementation and is superseded by dynamic reports.

---

S1F7 - Fixed Form Request

<-S1F7
SFCD     // Status Format Code

Parameters:

Parameter	Type	Description
SFCD	U1/U2/U4/A	Status Format Code for fixed format

---

S1F8 - Fixed Form Data

S1F8->
{L[n]
  {L[2]
    SVNAME // Status Variable Name
    SV0    // Status Variable Value
  }
}

Parameters:

Parameter	Type	Description
SVNAME	ASCII	Status Variable Name
SV0	Various	Status Variable Value

---

S1F9R - Material Transfer Status Request

<-S1F9
Header only

Parameters:

Parameter	Type	Description
Empty	-	Header only message

---

S1F10 - Material Transfer Status Data

S1F10->
{L[2]
  TSIP    // Transfer Status Input Ports
  TSOP    // Transfer Status Output Ports
}

Parameters:

Parameter	Type	Description
TSIP	List	Transfer Status Input Ports
TSOP	List	Transfer Status Output Ports

Note: An L:0 reply can be sent if there are no material ports.

---

S1F11R - Status Variable Namelist Request

<-S1F11
{L[n]
  SVID    // Status Variable ID list
}

Parameters:

Parameter	Type	Description
SVID	List	List of Status Variable IDs (L:0 requests all SVIDs)

Usage: Host requests information about available status variables.

---

S1F12 - Status Variable Namelist Reply

S1F12->
{L[n]
  {L[3]
    SVID    // Status Variable ID
    SVNAME  // Status Variable Name
    UNITS   // Units of measurement
  }
}

Parameters:

Parameter	Type	Description
SVID	U1/U2/U4	Status Variable ID
SVNAME	ASCII	Status Variable Name
UNITS	ASCII	Units of measurement

Note: A:0 for SVNAME and UNITS indicates unknown SVID.

---

S1F13R - Establish Communications Request

Equipment Send Format:

S1F13-> or <-S1F13
{L[2]
  MDLN    // Equipment model name
  SOFTREV // Software revision
}

Host Send Format:

<-S1F13
L:0

Parameters:

Parameter	Type	Description
MDLN	ASCII	Equipment model name
SOFTREV	ASCII	Software revision

Usage: Initial communication establishment between host and equipment.

---

S1F14 - Establish Communications Request Acknowledge

Equipment Send Format:

S1F14-> or <-S1F14
{L[2]
  COMMACK // Communication Acknowledge
  {L[2]
    MDLN    // Equipment model name
    SOFTREV // Software revision
  }
}

Host Send Format:

S1F14-> or <-S1F14
{L[2]
  COMMACK // Communication Acknowledge
  L:0
}

Parameters:

Parameter	Type	Description
COMMACK	U1/U2/U4	Communication Acknowledge code
MDLN	ASCII	Equipment model name
SOFTREV	ASCII	Software revision

Note: MDLN and SOFTREV may not be valid unless COMMACK value is 0.

---

S1F15R - Request OFF-LINE

<-S1F15
Header only

Parameters:

Parameter	Type	Description
Empty	-	Header only message

Usage: Host requests equipment to enter offline state.

---

S1F16 - OFF-LINE Acknowledge

Direction: E → H
Description: Acknowledge offline request

S1F16->
OFLACK   // Offline Acknowledge

Parameters:

Parameter	Type	Description
OFLACK	U1/U2/U4	Offline Acknowledge code

---

S1F17R - Request ON-LINE

<-S1F17
Header only

Parameters:

Parameter	Type	Description
Empty	-	Header only message

Usage: Host requests equipment to enter online state.

---

S1F18 - ON-LINE Acknowledge

S1F18->
ONLACK   // Online Acknowledge

Parameters:

Parameter	Type	Description
ONLACK	U1/U2/U4	Online Acknowledge code

---

S1F19R - Get Attribute

<-S1F19
{L[3]
  OBJTYPE // Object Type
  {L[m]
    OBJID  // Object ID list
  }
  {L[n]
    ATTRID // Attribute ID list
  }
}

Parameters:

Parameter	Type	Description
OBJTYPE	U1/U2/U4/A	Object Type
OBJID	List	Object ID list
ATTRID	List	Attribute ID list

Note: L:m = L:0 for all objects, L[n] = L:0 for all attributes.

---

S1F20 - Attribute Data

S1F20->
{L[2]
  {L[m]
    {L[n]
      ATTRDATA // Attribute Data
    }
  }
  {L[p]
    {L[2]
      ERRCODE  // Error Code
      ERRTEXT  // Error Text
    }
  }
}

Parameters:

Parameter	Type	Description
ATTRDATA	Various	Attribute Data
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

Note: Ordered per request. m=0 means OBJTYPE unknown, n=0 means instance not found.

---

S1F21R - Data Variable Namelist Request

<-S1F21
{L[n]
  VID     // Variable ID list
}

Parameters:

Parameter	Type	Description
VID	List	Variable ID list (L:0 requests all DVVALs)

Note: VIDs are limited to DVVAL variables only.

---

S1F22 - Data Variable Namelist Reply

S1F22->
{L[n]
  {L[3]
    VID        // Variable ID
    DVVALNAME  // Data Variable Name
    UNITS      // Units of measurement
  }
}

Parameters:

Parameter	Type	Description
VID	U1/U2/U4	Variable ID
DVVALNAME	ASCII	Data Variable Name
UNITS	ASCII	Units of measurement

Note: A:0 for DVVALNAME and UNITS indicates unknown VID or that VID is not a DVVAL.

---

S1F23R - Collection Event Namelist Request

<-S1F23
{L[n]
  CEID    // Collection Event ID list
}

Parameters:

Parameter	Type	Description
CEID	List	Collection Event ID list (L:0 implies all CEIDs)

Usage: Host requests information about available collection events.

---

S1F24 - Collection Event Namelist Reply

S1F24->
{L[n]
  {L[3]
    CEID   // Collection Event ID
    CENAME // Collection Event Name
    {L[a]
      VID   // Variable ID list
    }
  }
}

Parameters:

Parameter	Type	Description
CEID	U1/U2/U4	Collection Event ID
CENAME	ASCII	Collection Event Name
VID	List	Associated Variable ID list

Note: Only associated DVVAL VIDs are listed. A:0 for CENAME and L:0 for L:a indicates non-existent CEID.

Stream 2: Equipment Control and Diagnostics

Purpose: Equipment configuration and diagnostic operations

Message	Direction	Description
S2F1	↔ Equipment	Service Program Load Inquire
S2F2	↔ Equipment	Service Program Load Grant
S2F3	↔ Equipment	Service Program Send
S2F4	↔ Equipment	Service Program Send Acknowledge
S2F5	↔ Equipment	Service Program Load Request
S2F6	↔ Equipment	Service Program Load Data
S2F7	↔ Equipment	Service Program Run Send
S2F8	↔ Equipment	Service Program Run Acknowledge
S2F9	↔ Equipment	Service Program Results Request
S2F10	↔ Equipment	Service Program Results Data
S2F11	↔ Equipment	Service Program Directory Request
S2F12	↔ Equipment	Service Program Directory Data
S2F13	→ Equipment	Equipment Constant Request
S2F14	← Equipment	Equipment Constant Data
S2F15	→ Equipment	New Equipment Constant Send
S2F16	← Equipment	New Equipment Constant Ack
S2F17	↔ Equipment	Date and Time Request
S2F18	↔ Equipment	Date and Time Data
S2F19	→ Equipment	Reset/Initialize Send
S2F20	← Equipment	Reset Acknowledge
S2F21	→ Equipment	Remote Command Send
S2F22	← Equipment	Remote Command Acknowledge
S2F23	→ Equipment	Trace Initialize Send
S2F24	← Equipment	Trace Initialize Acknowledge
S2F25	↔ Equipment	Loopback Diagnostic Request
S2F26	↔ Equipment	Loopback Diagnostic Data
S2F27	→ Equipment	Initiate Processing Request
S2F28	← Equipment	Initiate Processing Acknowledge
S2F29	→ Equipment	Equipment Constant Namelist Request
S2F30	← Equipment	Equipment Constant Namelist
S2F31	→ Equipment	Date and Time Set Request
S2F32	← Equipment	Date and Time Set Acknowledge
S2F33	→ Equipment	Define Report
S2F34	← Equipment	Define Report Acknowledge
S2F35	→ Equipment	Link Event Report
S2F36	← Equipment	Link Event Report Acknowledge
S2F37	→ Equipment	Enable/Disable Event Report
S2F38	← Equipment	Enable/Disable Event Report Acknowledge
S2F39	→ Equipment	Multi-block Inquire
S2F40	← Equipment	Multi-block Grant
S2F41	→ Equipment	Host Command Send
S2F42	← Equipment	Host Command Acknowledge
S2F43	→ Equipment	Configure Spooling
S2F44	← Equipment	Configure Spooling Acknowledge
S2F45	→ Equipment	Define Variable Limit Attributes
S2F46	← Equipment	Define Variable Limit Attributes Acknowledge
S2F47	→ Equipment	Variable Limit Attribute Request
S2F48	← Equipment	Variable Limit Attribute Send
S2F49	→ Equipment	Enhanced Remote Command
S2F50	← Equipment	Enhanced Remote Command Acknowledge
S2F51	→ Equipment	Request Report Identifiers
S2F52	← Equipment	Return Report Identifiers
S2F53	→ Equipment	Request Report Definitions
S2F54	← Equipment	Return Report Definitions
S2F55	→ Equipment	Request Event Report Links
S2F56	← Equipment	Return Event Report Links
S2F57	→ Equipment	Request Enabled Events
S2F58	← Equipment	Return Enabled Events
S2F59	→ Equipment	Request Spool Streams and Functions
S2F60	← Equipment	Return Spool Streams and Functions
S2F61	→ Equipment	Request Trace Identifiers
S2F62	← Equipment	Return Trace Identifiers
S2F63	→ Equipment	Request Trace Definitions
S2F64	← Equipment	Return Trace Definitions

S2F1 - Service Program Load Inquire

↔S2F1
{L[2]
  SPID
  LENGTH
}

Parameters:

Parameter	Type	Description
SPID	ASCII	Service Program ID
LENGTH	U4	Length of service program

S2F2 - Service Program Load Grant

↔S2F2
GRANT

Parameters:

Parameter	Type	Description
GRANT	U1	Grant code

Parameter	Type	Description
SV	Various	Status Variable Value (corresponding to SVID in S2F1)

S2F3 - Service Program Send

↔S2F3
SPD

Parameters:

Parameter	Type	Description
SPD	Binary	Service Program Data

S2F4 - Service Program Send Acknowledge

↔S2F4
SPAACK

Parameters:

Parameter	Type	Description
SPAACK	U1	Service Program Acknowledge

S2F5 - Service Program Load Request

↔S2F5
SPID

Parameters:

Parameter	Type	Description
SPID	ASCII	Service Program ID

S2F6 - Service Program Load Data

↔S2F6
SPD

Parameters:

Parameter	Type	Description
SPD	Binary	Service Program Data

S2F7 - Service Program Run Send

↔S2F7
SPID

Parameters:

Parameter	Type	Description
SPID	ASCII	Service Program ID

S2F8 - Service Program Run Acknowledge

↔S2F8
CSAACK

Parameters:

Parameter	Type	Description
CSAACK	U1	Command Service Acknowledge
PORTSTATUS	U1/U2/U4/A	Port Status

S2F9 - Equipment Status Multi-Block Inquire

<-S2F9
{L[n]
  SVID_1
  SVID_2
  ...
  SVID_n
}

Parameters:

Parameter	Type	Description
SVID	U1/U2/U4/A	Status Variable ID

S2F10 - Equipment Status Multi-Block Grant

S2F10->
GRANT

Parameters:

Parameter	Type	Description
GRANT	U1/U2/U4/A	Grant permission for multi-block transfer

S2F11 - Equipment Status Multi-Block

S2F11->
{L[n]
  SV_1
  SV_2
          ...
  SV_n
}

Parameters:

Parameter	Type	Description
SV	Various	Status Variable Value (corresponding to SVID in S2F9)

S2F12 - Equipment Status Multi-Block Acknowledge

{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (acknowledgment)

S2F13 - Equipment Constant Request

{L[n]
  ECID_1
  ECID_2
          ...
  ECID_n
}

Parameters:

Parameter	Type	Description
ECID	U1/U2/U4/A	Equipment Constant ID

S2F14 - Equipment Constant Response

{L[n]
  ECV_1
  ECV_2
  ...
  ECV_n
}

Parameters:

Parameter	Type	Description
ECV	Various	Equipment Constant Value (corresponding to ECID in S2F13)

S2F15 - New Equipment Constant Send

  {L[n]
  {L[2]
    ECID_1
    ECV_1
  }
  {L[2]
    ECID_2
    ECV_2
  }
  ...
  {L[2]
    ECID_n
    ECV_n
  }
}

Parameters:

Parameter	Type	Description
ECID	U1/U2/U4/A	Equipment Constant ID
ECV	U1/U2/U4/A	Equipment Constant Value

S2F16 - New Equipment Constant Acknowledge

EAC

Parameters:

Parameter	Type	Description
EAC	U1/U2/U4/A	Equipment Acknowledge Code

S2F17 - Date and Time Request

{}

Parameters:

Parameter	Type	Description
-	-	Empty list (request for current date and time)

S2F18 - Date and Time Response

TIME

Parameters:

Parameter	Type	Description
TIME	A	Date and Time value

S2F19 - Recipe Body Request

  {L[2]
    RCMD
    RPARM
  }

Parameters:

Parameter	Type	Description
RCMD	A	Recipe Command
RPARM	A	Recipe Parameter

S2F20 - Recipe Body Response

{L[2]
  RCMD
  RPARM
}

Parameters:

Parameter	Type	Description
RCMD	A	Recipe Command
RPARM	A	Recipe Parameter

S2F21 - Recipe Body Send

{L[2]
  RCMD
  RPARM
}

Parameters:

Parameter	Type	Description
RCMD	A	Recipe Command
RPARM	A	Recipe Parameter

S2F22 - Recipe Body Acknowledge

CMDA

Parameters:

Parameter	Type	Description
CMDA	A	Command Acknowledge

S2F23 (FDC) Overview

Fault Detection and Classification (FDC) is a process in semiconductor manufacturing that collects and analyzes data in real-time to detect and classify equipment anomalies. The S2F23 message defines a scenario where the host requests periodic data collection from the equipment, and the equipment collects and reports the data accordingly.

1. Scenario Initiation: Host Request (S2F23 Transmission)

• The host sends an S2F23 message to the equipment to request monitoring of specific Status Variables (SVs). The message includes the following information:
  • TRID (Trace ID): A unique identifier for the trace request.
  • SVID (Status Variable ID): Identifier for the status variable to monitor (e.g., temperature, pressure, wafer status).
  • DSPER (Data Sampling Period): Data sampling interval (e.g., every 1 second).
  • TOTSMP (Total Samples): Total number of samples to collect.
  • REPGSZ (Report Group Size): Number of data points included in each report.
• Example: The host requests the equipment to collect temperature data every 1 second for 100 samples, reporting every 10 samples.

2. Equipment Response

• The equipment receives the S2F23 message, validates the requested conditions, and responds with an S2F24 message indicating acceptance or rejection.
  • Acceptance: The equipment starts data collection based on the requested conditions.
  • Rejection: The equipment responds with the reason it cannot process the request (e.g., invalid SVID, insufficient resources).

3. Data Collection and Reporting (S6F1 Transmission)

• The equipment collects data according to the specified DSPER.
• Upon reaching REPGSZ (e.g., 10 samples collected), the equipment sends the collected data to the host via an S6F1 message.
• The S6F1 message includes the TRID and the collected data values.
• To reduce network traffic, data is aggregated and sent in batches, with each report consisting of SVIDs and their corresponding values.
• Example: Temperature data is sent via S6F1 every time 10 samples are collected.

4. Integration with FDC Process

• The host receives the S6F1 data and analyzes it using FDC software.
• The FDC system detects anomalies (e.g., temperature spikes, pressure fluctuations) based on the collected data and, if necessary, triggers alarms or instructs the equipment to halt the process.
• Example: If temperature data exceeds a predefined threshold, the host may send a warning message (e.g., S10F3) to the equipment or request an operator notification.

5. Scenario Termination

• Once the equipment reaches TOTSMP (total samples), it terminates data collection and sends the final data via S6F1.
• The host may send a new S2F23 request to continue monitoring or cancel the existing TRID using S2F25 to stop monitoring.

S2F23 - Trace Initialize Send

S2F23->
{L[5]
  TRID
  DSPER
  TOTSMP
  REPGSZ
  {L[n]
    SVID
  }
}

Parameters:

Parameter	Type	Description
TRID	A	Trace ID
DSPER	U1/U2/U4	Display Period
TOTSMP	U1/U2/U4	Total Samples
REPGSZ	U1/U2/U4	Report Page Size
SVID	U1/U2/U4/A	Status Variable ID

S2F24 - Trace Initialize Acknowledge

<-S2F24
TIAACK

Parameters:

Parameter	Type	Description
TIAACK	B[1]	Trace Initialize Acknowledge
		0: Acknowledged
		1: Error

S2F25 - Loopback Diagnostic Request

<-S2F25
ABS

Parameters:

Parameter	Type	Description
ABS	B	Arbitrary Binary String

S2F26 - Loopback Diagnostic Response

S2F26->
ABS

Parameters:

Parameter	Type	Description
ABS	B	Arbitrary Binary String

S2F27 - Initiate Processing Request

<-S2F27
{L[3]
  LOC
  PPID
  {L[n]
    MID
  }
}

Parameters:

Parameter	Type	Description
LOC	A	Location
PPID	A	Process Program ID
MID	A	Material ID

S2F28 - Initiate Processing Acknowledge

S2F28->
CMDA

Parameters:

Parameter	Type	Description
CMDA	A	Command Acknowledge

S2F29 - Equipment Constant Namelist Request

<-S2F29
{L[n]
  ECID_1
  ECID_2
  ...
  ECID_n
}

Parameters:

Parameter	Type	Description
ECID	U1/U2/U4/A	Equipment Constant ID

S2F30 - Equipment Constant Namelist Response

S2F30->
{L[n]
  {L[6]
    ECID
    ECNAME
    ECMIN
    ECMAX
    ECDEF
    UNITS
  }
}

Parameters:

Parameter	Type	Description
ECID	U1/U2/U4/A	Equipment Constant ID
ECNAME	A	Equipment Constant Name
ECMIN	U1/U2/U4/A	Equipment Constant Minimum Value
ECMAX	U1/U2/U4/A	Equipment Constant Maximum Value
ECDEF	U1/U2/U4/A	Equipment Constant Default Value
UNITS	A	Units

S2F31 - Date and Time Set Request

<-S2F31
TIME

Parameters:

Parameter	Type	Description
TIME	A	Date and Time value

S2F32 - Date and Time Set Response

S2F32->
TIACK

Parameters:

Parameter	Type	Description
TIACK	B[1]	Time Acknowledge
		0: Acknowledged
		1: Error

S2F33 - Define Report

<-S2F33
{L[2]
  DATAID
  {L[n]
    {L[2]
      RPTID
      {L[n]
        VID
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
RPTID	U1/U2/U4/A	Report ID
VID	U1/U2/U4/A	Variable ID

S2F34 - Define Report Acknowledge

S2F34->
DRACK

Parameters:

Parameter	Type	Description
DRACK	B[1]	Define Report Acknowledge
		0: Acknowledged
		1: Error

S2F35 - Link Event Report

S2F35->
{L[2]
  DATAID
{L[n]
    {L[2]
      CEID
      {L[n]
        RPTID
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
CEID	U1/U2/U4/A	Collection Event ID
RPTID	U1/U2/U4/A	Report ID

S2F36 - Link Event Report Acknowledge

<-S2F36
LRACK

Parameters:

Parameter	Type	Description
LRACK	B[1]	Link Event Report Acknowledge
		0: Acknowledged
		1: Error

S2F37 - Enable/Disable Event Report

<-S2F37
{L[2]
  CEED
  {L[n]
    CEID
  }
}

Parameters:

Parameter	Type	Description
CEED	U1/U2/U4/A	Collection Event Enable/Disable
CEID	U1/U2/U4/A	Collection Event ID

S2F38 - Enable/Disable Event Report Acknowledge

S2F38->
ERACK

Parameters:

Parameter	Type	Description
ERACK	B[1]	Event Report Acknowledge
		0: Acknowledged
		1: Error

S2F39 - Status Variable Namelist Request

<-S2F39
{L[2]
  DATAID
  DATALENGTH
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
DATALENGTH	U1/U2/U4	Data Length

S2F40 - Status Variable Namelist Response

S2F40->
GRANT

Parameters:

Parameter	Type	Description
GRANT	-	Grant permission for multi-block transfer

S2F41 - Host Command Send

<-S2F41
{L[2]
  RCMD
  {L[n]
    {L[2]
      CPNAME
      CPVAL
  }
}
}

Parameters:

Parameter	Type	Description
RCMD	A	Remote Command
CPNAME	A	Command Parameter Name
CPVAL	A	Command Parameter Value

S2F42 - Host Command Acknowledge

S2F42->
{L[2]
  HCACK
    {L[n]
      {L[2]
        CPNAME
        CPACK
      }
    }
}

Parameters:

Parameter	Type	Description
HCACK	B[1]	Host Command Acknowledge
		0: Acknowledged
		1: Error
CPNAME	A	Command Parameter Name
CPACK	B[1]	Command Parameter Acknowledge
		0: Acknowledged
		1: Error

S2F43 - Reset Spooling Streams and Functions

<-S2F43
{L[n]
{L[2]
  STRID
    {L[n]
  FCNID
}
  }
}

Parameters:

Parameter	Type	Description
STRID	U1/U2/U4/A	Stream ID
FCNID	U1/U2/U4/A	Function ID

S2F44 - Reset Spooling Acknowledge

S2F44->
{L[2]
RSPACK
  {L[n]
    {L[3]
      STRID
      STRACK
      {L[n]
        FCNID
      }
    }
  }
}

Parameters:

Parameter	Type	Description
RSPACK	B[1]	Reset Spooling Acknowledge
		0: Acknowledged
		1: Error
STRID	U1/U2/U4/A	Stream ID
STRACK	B[1]	Stream Acknowledge
		0: Acknowledged
		1: Error
FCNID	U1/U2/U4/A	Function ID

S2F45 - Define Variable Limit Attributes

<-S2F45
{L[2]
  DATAID
{L[n]
    {L[2]
    VID
      {L[n]
        {L[2]
    LIMITID
          {L[2]
    UPPERDB
    LOWERDB
          }
        }
      }
  }
}
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
VID	U1/U2/U4/A	Variable ID
LIMITID	U1/U2/U4/A	Limit ID
UPPERDB	U1/U2/U4/A	Upper Database
LOWERDB	U1/U2/U4/A	Lower Database

S2F46 - Define Variable Limit Attributes Acknowledge

S2F46->
{L[2]
  VLAACK
  {L[n]
    {L[3]
      VID
      LVACK
      {L[2]
        LIMITID
        LIMITACK
      }
    }
  }
}

Parameters:

Parameter	Type	Description
VLAACK	B[1]	Variable Limit Attributes Acknowledge
		0: Acknowledged
		1: Error
VID	U1/U2/U4/A	Variable ID
LVACK	B[1]	Limit Value Acknowledge
		0: Acknowledged
		1: Error
LIMITID	U1/U2/U4/A	Limit ID
LIMITACK	B[1]	Limit Acknowledge
		0: Acknowledged
		1: Error

S2F47 - Variable Limit Attribute Request

<-S2F47
{L[n]
  VID_1
  VID_2
  ...
  VID_n
}

Parameters:

Parameter	Type	Description
VID	U1/U2/U4/A	Variable ID

S2F48 - Variable Limit Attribute Response

S2F48->
{L[n]
  {L[2]
    VID
    {L[4]
      UNITS
      LIMITMIN
      LIMITMAX
      {L[n]
        {L[3]
    LIMITID
    UPPERDB
    LOWERDB
  }
}
    }
  }
}

Parameters:

Parameter	Type	Description
VID	U1/U2/U4/A	Variable ID
UNITS	A	Units
LIMITMIN	U1/U2/U4/A	Limit Minimum
LIMITMAX	U1/U2/U4/A	Limit Maximum
LIMITID	U1/U2/U4/A	Limit ID
UPPERDB	U1/U2/U4/A	Upper Database
LOWERDB	U1/U2/U4/A	Lower Database

S2F49 - Enhanced Remote Command

<-S2F49
{L[4]
  RCMD
      CPNAME
  CEPVAL
      CPACK
    }

Parameters:

Parameter	Type	Description
RCMD	A	Remote Command
CPNAME	A	Command Parameter Name
CEPVAL	A	Command Parameter Value
CPACK	B[1]	Command Parameter Acknowledge
		0: Acknowledged
		1: Error

S2F50 - Enhanced Remote Command Acknowledge

S2F50->
{L[2]
  HCACK
  {L[n]
    {L[2]
      CPNAME
      CEPACK
    }
  }
}

Parameters:

Parameter	Type	Description
HCACK	B[1]	Host Command Acknowledge
		0: Acknowledged
		1: Error
CPNAME	A	Command Parameter Name
CEPACK	B[1]	Command Parameter Acknowledge
		0: Acknowledged
		1: Error

S2F51 - Request Report Identifiers

header only

Parameters:

Parameter	Type	Description
Empty	-	Header only message

S2F52 - Return Report Identifiers

S2F52->
{L[n]
  RPTID
}

Parameters:

Parameter	Type	Description
RPTID	U1, U2, U4, or A	Report ID

S2F53 - Request Report Definitions

<-S2F53
{L[n]
  RPTID
}

Parameters:

Parameter	Type	Description
RPTID	U1, U2, U4, or A	Report ID

S2F54 - Return Report Definitions

S2F54->
{L[n]
  {L[2]
      RPTID
    {L[n]
      VID
    }
  }
}

Parameters:

Parameter	Type	Description
RPTID	U1, U2, U4, or A	Report ID
VID	U1, U2, U4, or A	Variable ID

S2F55 - Request Event Report Links

<-S2F55
{L[n]
  CEID
}

Parameters:

Parameter	Type	Description
CEID	U1, U2, U4, or A	Collection Event ID

S2F56 - Return Event Report Links

S2F56->
{L[n]
  {L[3]
    CEID
    CENAME
    {L[n]
      RPTID
    }
  }
}

Parameters:

Parameter	Type	Description
CEID	U1, U2, U4, or A	Collection Event ID
CENAME	A	Collection Event Name
RPTID	U1, U2, U4, or A	Report ID

S2F57 - Request Enabled Events

{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

S2F58 - Return Enabled Events

S2F58->
{L[n]
  CEID
}

Parameters:

Parameter	Type	Description
CEID	U1, U2, U4, or A	Collection Event ID

S2F59 - Request Spool Streams and Functions

{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

S2F60 - Return Spool Streams and Functions

S2F60->
{L[n]
  {L[2]
    STRID
    {L[n]
      FCNID
    }
  }
}

Parameters:

Parameter	Type	Description
STRID	U1, U2, U4, or A	Stream ID
FCNID	U1, U2, U4, or A	Function ID

S2F61 - Request Trace Identifiers

{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

S2F62 - Return Trace Identifiers

S2F62->
{L[n]
  TRID
}

Parameters:

Parameter	Type	Description
TRID	A	Trace ID

S2F63 - Request Trace Definitions

<-S2F63
{L[n]
  TRID
}

Parameters:

Parameter	Type	Description
TRID	A	Trace ID

S2F64 - Return Trace Definitions

S2F64->
{L[n]
  {L[5]
    TRID
    DSPER
    TOTSMP
    REPGSZ
    {L[n]
      SVID
    }
  }
}

Parameters:

Parameter	Type	Description
TRID	A	Trace ID
DSPER	U1, U2, U4	Display Period
TOTSMP	U1, U2, U4	Total Samples
REPGSZ	U1, U2, U4	Report Page Size
SVID	U1, U2, U4, or A	Status Variable ID

Stream 3: Material Status

Purpose: Material and carrier tracking

Message	Direction	Description
S3F1	→ Equipment	Material Status Request
S3F2	← Equipment	Material Status Data
S3F3	→ Equipment	Time to Completion Data
S3F4	← Equipment	Time to Completion Data
S3F5	← Equipment	Material Found Send
S3F6	→ Equipment	Material Found Acknowledge
S3F7	→ Equipment	Material Lost Send
S3F8	← Equipment	Material Lost Ack
S3F9	← Equipment	Matl ID Equate Send
S3F10	→ Equipment	Port Status Acknowledge
S3F11	→ Equipment	Matl ID Request
S3F12	← Equipment	Matl ID Request Ack
S3F13	← Equipment	Matl ID Send
S3F14	→ Equipment	Matl ID Ack
S3F15	→ Equipment	SECS-I Matls Multi-block Inquire
S3F16	← Equipment	Matls Multi-block Grant
S3F17	→ Equipment	Carrier Action Request
S3F18	← Equipment	Carrier Action Ack
S3F19	→ Equipment	Cancel All Carrier Out Req
S3F20	← Equipment	Cancel All Carrier Out Ack
S3F21	→ Equipment	Port Group Defn
S3F22	← Equipment	Port Group Defn Ack
S3F23	→ Equipment	Port Group Action Req
S3F24	← Equipment	Port Group Action Req
S3F25	→ Equipment	Carrier ID Request
S3F26	← Equipment	Carrier ID Response
S3F27	→ Equipment	Carrier ID Send
S3F28	← Equipment	Carrier ID Acknowledge
S3F29	→ Equipment	Substrate Location Request
S3F30	← Equipment	Substrate Location Response
S3F31	← Equipment	Substrate Location Send
S3F32	→ Equipment	Substrate Location Acknowledge
S3F33	→ Equipment	Load Lock Status Request
S3F34	← Equipment	Load Lock Status Response
S3F35	← Equipment	Load Lock Status Send
S3F36	→ Equipment	Load Lock Status Acknowledge

S3F1 - Material Status Request

<-S3F1
{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

S3F2 - Material Status Data

S3F2->
{L[2]
  MF
  {L[n]
    {L[3]
      LOC
      QUA
      MID
    }
  }
}

S3F3 - Time to Completion Data

<-S3F3
{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

S3F4 - Time to Completion Data

S3F4->
{L[2]
  MF
  {L[n]
    {L[3]
      TTC
      QUA
      MID
    }
  }
}

S3F5 - Material Found Send

S3F5->
{L[2]
  MF
  QUA
}

S3F6 - Material Found Acknowledge

<-S3F6
ACKC3

Parameters:

Parameter	Type	Description
ACKC3	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S3F7 - Material Lost Send

S3F7->
{L[3]
  MF
  QUA
  MID
}

S3F8 - Material Lost Ack

S3F8->
ACKC3

Parameters:

Parameter	Type	Description
ACKC3	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S3F9 - Matl ID Equate Send

S3F9->
{L[2]
  MID
  EMID
}

S3F10 - Port Status Acknowledge

<-S3F10
ACKC3

Parameters:

Parameter	Type	Description
ACKC3	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S3F11 - Matl ID Request

<-S3F11
{
  PTN
}

S3F12 - Matl ID Request Ack

S3F12->
{L[3]
  PTN
  MIDRA
  MID
} 

S3F13 - Matl ID Send

S3F13->
{L[2]
  PTN
  MID
}

S3F14 - Matl ID Ack

<-S3F14
{
  MIDAC
}

S3F15 - Matls Multi-block Inquire(SECS-I)

<-S3F15
{L[2]
  DATAID
  DATALENGTH
}

S3F16 - Matls Multi-block Grant

S3F16->
{
  GRANT
}

S3F17 (Carrier Action Request) Overview

The S3F17 message is an unsolicited message sent by the equipment to inform the host about the receipt of new material (e.g., wafers, carriers, pods). This message shares material identification and status information, enabling the host to manage process flow and track materials.

1. Scenario Initiation: Material Receipt

• The equipment receives new material, such as:
  • A FOUP (Front Opening Unified Pod) or carrier placed at a load port.
  • Wafers or other materials loaded into the equipment.
• The equipment reads the material’s unique identification information (e.g., carrier ID, lot ID) and verifies its status.
• This process may involve automated load ports, RFID, or barcode readers.

2. S3F17 Message Transmission

• Upon detecting material receipt, the equipment sends an S3F17 message to the host to report material information.
• The S3F17 message includes:
  • CARRIERID: Unique identifier for the material carrier (e.g., FOUP ID).
  • LOTID: Unique identifier for the lot contained in the material (optional, used for lot-based management).
  • SLOTMAP: Material placement information within the carrier (e.g., slot numbers mapped to wafer IDs).
  • PORTID: Identifier for the port where the material was loaded (e.g., load port number).
  • TIMESTAMP: Time of material receipt (optional).
• Example: If the equipment receives a FOUP (carrier ID: F123) at load port 1 with 25 wafers, the S3F17 message reports CARRIERID="F123", PORTID="1", SLOTMAP={1:Wafer1, 2:Wafer2, ...}.

3. Host Response

• The host receives the S3F17 message and verifies the material information.
• Based on the received data, the host performs the following actions:
  • Material Tracking: Updates the Manufacturing Execution System (MES) with material information to manage process flow.
  • Validation: Ensures CARRIERID, LOTID, and SLOTMAP align with process requirements (e.g., correct lot, expected wafer count).
  • Task Instruction: If the material is correctly received, the host sends a process start command (e.g., S2F41) or schedules subsequent tasks.
• The host may respond with an S3F18 message to acknowledge S3F17 receipt or provide further instructions.
• Example: The host confirms FOUP details via S3F17 and specifies the process recipe for the lot.

4. Error Handling

• If the S3F17 message contains incorrect information (e.g., unknown CARRIERID), the host detects the error and may request additional information or issue a warning.
• If the equipment fails to receive material (e.g., FOUP load error), it may report this via other SECS messages (e.g., S10F3, Terminal Display).
• Example: If the host receives an unexpected LOTID in S3F17, it may check equipment status via S2F13 or notify an operator.

5. Scenario Termination

• Once the host successfully processes the material information and prepares for the process, the material receipt scenario concludes.
• The equipment processes the material per host instructions (e.g., starts wafer processing) or awaits further material receipts.
• The host may continue tracking material status or request a material sent report (S3F19) after process completion.

S3F17 Scenario Characteristics

• Unsolicited Message: The equipment proactively reports material receipt without prior host request.
• Material Management: Tracks the location and status of materials (wafers, carriers) in real-time during semiconductor processing.
• Standardization: Complies with SEMI E5 and E30 (GEM) standards, ensuring compatibility across equipment and hosts.
• Automation Support: Enhances process automation through integration with load ports and MES.

Example Flow

1. A FOUP (carrier ID: F123) with 25 wafers is placed at load port 1 of the equipment.
2. The equipment reads FOUP information and sends an S3F17 message (CARRIERID="F123", PORTID="1", SLOTMAP={1:Wafer1, ...}).
3. The host receives S3F17 and updates material information in the MES.
4. The host verifies the process recipe and sends an S2F41 command to start processing.
5. The equipment begins processing, concluding the scenario.

S3F17 - Carrier Action Request (Extended)

<-S3F17
{L[5]
  DATAID
  CARRIERACTION
  CARRIERID
  PTN
  {L[n]
    {L[2]
      CATTRID
      CATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
CARRIERACTION	U1	Carrier Action
CARRIERID	A	Carrier ID
PTN	U1	Port Number
CATTRID	U1/U2/U4/A	Carrier Attribute ID
CATTRDATA	any format	Carrier Attribute Data

S3F18 - Carrier Action Response (Extended)

S3F18->
{L[2]
  DATAID
  CAACK
}

Parameters:

Parameter	Type	Description
DATAID	-	Data ID (matching request)
CAACK	U1	Carrier Action Acknowledge
		0: Acknowledged
		1: Denied, Invalid Command
		2: Denied, Cannot Perform Now

S3F19 - Port Action Request

<-S3F19
{L[4]
  DATAID
  PORTACTION
  PTN
  {L[n]
    {L[2]
      PATTRID
      PATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
PORTACTION	U1	Port Action
		1: Open
		2: Close
		3: Lock
		4: Unlock
PTN	U1	Port Number
PATTRID	U1/U2/U4/A	Port Attribute ID
PATTRDATA	any format	Port Attribute Data

S3F20 - Cancel All Carrier Out Ack

S3F20->
{L[2]
  CAACK
  {L[n]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S3F21 - Port Group Defn

<-S3F21
{L[3]
  PORTGRPNAME
  ACCESSMODE
  {L[n]
    PTN
  }
}

S3F22 - Port Group Defn Ack

S3F22->
{L[2]
  CAACK
  {L[n]
    {L[2]
    ERRCODE
    ERRTEXT
    }
  }
}

S3F23 - Port Group Action Req

<-S3F23
{L[3]
  PGRPACTION
  PORTGRPNAME
  {L[m]
    {L[2]
      PARAMNAME
      PARAMVAL
    }
  }
}

S3F24 - Port Group Action Ack

S3F24->
{L[2]
  CAACK
  {L[n]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S3F25 - Port Action Req

<-S3F25
{L[3]
  PORTACTION
  PTN
  {L[m]
    {L[2]
      PARAMNAME
      PARAMVAL
    }
  }
}

S3F26 - Port Action Ack

S3F26->
{L[2]
  CAACK
  {L[n]
    {L[2]
    ERRCODE
    ERRTEXT
    }
  }
}

S3F27 - Change Access

<-S3F27
{L[2]
  ACCESSMODE
  {L[n]
  PTN
  }
}

S3F28 - Change Access Ack

S3F28->
{L[2]
  CAACK
  {L[n]
    {L[3]
      PTN
      ERRCODE
      ERRTEXT
    }
  }
}

S3F29 - Carrier Tag Read Req

<-S3F29
{L[4]
  LOCID
  CARRIERSPEC
  DATASEG
  DATALENGTH
}

S3F30 - Carrier Tag Read Data

S3F30->
{L[2]
  DATA
  {L[2]
    CAACK
    {L[n]
      {L[2]
      ERRCODE
      ERRTEXT
      }
    }
  }
}

S3F31 - Carrier Tag Write Data

<-S3F31
{L[5]
  LOCID
  CARRIERSPEC
  DATASEG
  DATALENGTH
  DATA
}

S3F32 - Carrier Tag Write Ack

S3F32->
{L[2]
  CAACK
  {L[n]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S3F33 - Cancel All Pod Out Req

<-S3F33
{}

S3F34 - Cancel All Pod Out Ack

S3F34->
{L[2]
  CAACK
  {L[n]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S3F35 - Reticle Transfer Job Req

<-S3F35
{L[7]
  JOBACTION
  PODID
  INPTN
  OUTPTN
  {L[n]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[m]
    {L[3]
      RETICLEID
      RETREMOVEINSTR
      {L[i]
        {L[2]
          ATTRID
          ATTRDATA
        }
      }
    }
  }
  {L[k]
    {L[2]
      RETICLEID2
      RETPLACEINSTR
    }
  }
}

S3F36 - Reticle Transfer Job Ack

S3F36->
{L[2]
  RPMACK
  {L[n]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Stream 4: Material Control

Purpose: Material transfer and handling

Message	Direction	Description
S4F1	→ Equipment	Ready to Send Materials
S4F2	← Equipment	Ready to Send Acknowledge
S4F3	→ Equipment	Send Material
S4F4	← Equipment	Transfer Job Cancel Acknowledge
S4F5	→ Equipment	Transfer Job Start
S4F6	← Equipment	Transfer Job Start Acknowledge
S4F7	→ Equipment	Transfer Job Pause
S4F8	← Equipment	Transfer Job Pause Acknowledge
S4F9	→ Equipment	Transfer Job Stop
S4F10	← Equipment	Transfer Job Stop Acknowledge
S4F11	→ Equipment	Transfer Job Abort
S4F12	← Equipment	Transfer Job Abort Acknowledge
S4F13	→ Equipment	Transfer Job Resume
S4F14	← Equipment	Transfer Job Resume Acknowledge
S4F15	→ Equipment	Transfer Job Status Request
S4F16	← Equipment	Transfer Job Status Response
S4F17	→ Equipment	Transfer Job Priority Update
S4F18	← Equipment	Transfer Job Priority Acknowledge
S4F19	→ Equipment	Transfer Command
S4F20	← Equipment	Transfer Command Acknowledge
S4F21	→ Equipment	Enhanced Transfer Command
S4F22	← Equipment	Enhanced Transfer Acknowledge
S4F23	← Equipment	Transfer Status Send
S4F24	→ Equipment	Transfer Status Acknowledge
S4F25	→ Equipment	Material Status Request
S4F26	← Equipment	Material Status Response

S4F1 - Ready to Send Materials

<-S4F1
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F2 - Ready to Send Acknowledge

S4F2->
RSACK

Parameters:

Parameter	Type	Description
RSACK	B[1]	Ready to Send Acknowledge
		0: Acknowledged
		1: Not ready

S4F3 - Send Material

<-S4F3
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F5 - Handshake Complete

S4F5->
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F7 - Not Ready to Send

S4F7->
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F9 - Stuck in Sender

S4F9->
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F11 - Stuck in Receiver

S4F11->
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F13 - Send Incomplete Timeout

S4F13->
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F15 - Material Received

S4F15->
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F17 - Request to Receive

<-S4F17
{L[2]
  PTN
  MID
}

Parameters:

Parameter	Type	Description
PTN	U1	Port Number
MID	A	Material ID

S4F18 - Request to Receive Acknowledge

S4F18->
RRACK

Parameters:

Parameter	Type	Description
RRACK	B[1]	Request to Receive Acknowledge
		0: Acknowledged
		1: Not ready

S4F19 - Transfer Job Create

<-S4F19
{L[3]
  DATAID
  TRJOBNAME
  {L[n]
    {L[12]
      TRLINK
      TRPORT
      TROBJNAME
      TROBJTYPE
      TRROLE
      TRRCP
      TRPTNR
      TRPTPORT
      TRDIR
      TRTYPE
      TRLOCATION
      TRAUTOSTART
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
TRJOBNAME	A	Transfer Job Name
TRLINK	U1	Transfer Link
TRPORT	U1	Transfer Port
TROBJNAME	A	Transfer Object Name
TROBJTYPE	A	Transfer Object Type
TRROLE	A	Transfer Role
TRRCP	A	Transfer RCP
TRPTNR	A	Transfer Partner
TRPTPORT	U1	Transfer Partner Port
TRDIR	A	Transfer Direction
TRTYPE	A	Transfer Type
TRLOCATION	A	Transfer Location
TRAUTOSTART	B[1]	Transfer Auto Start

S4F20 - Transfer Job Acknowledge

S4F20->
{L[3]
  TRJOBID
  {L[m]
    TRATOMCID
  }
  {L[2]
    TRACK
    {L[n]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
TRJOBID	A	Transfer Job ID
TRATOMCID	A	Transfer Atomic ID
TRACK	B[1]	Transfer Acknowledge
ERRCODE	U1	Error Code
ERRTEXT	A	Error Text

S4F21 - Transfer Job Command

<-S4F21
{L[3]
  TRJOBID
  TRCMDNAME
  {L[n]
    {L[2]
      CPNAME
      CPVAL
    }
  }
}

Parameters:

Parameter	Type	Description
TRJOBID	A	Transfer Job ID
TRCMDNAME	A	Transfer Command Name
CPNAME	A	Command Parameter Name
CPVAL	any format	Command Parameter Value

S4F22 - Transfer Job Command Acknowledge

S4F22->
{L[2]
  TRACK
  {L[n]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
TRACK	B[1]	Transfer Acknowledge
ERRCODE	U1	Error Code
ERRTEXT	A	Error Text

S4F23 - Transfer Command Alert

S4F23->
{L[4]
  TRJOBID
  TRJOBNAME
  TRJOBMS
  {L[2]
    TRACK
    {L[n]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
TRJOBID	A	Transfer Job ID
TRJOBNAME	A	Transfer Job Name
TRJOBMS	A	Transfer Job Message
TRACK	B[1]	Transfer Acknowledge
ERRCODE	U1	Error Code
ERRTEXT	A	Error Text

S4F24 - Transfer Alert Acknowledge

<-S4F24
header only

Parameters:

Parameter	Type	Description
Header only	-	Header only message

S4F25 - Multi-block Inquire

<-S4F25
{L[2]
  DATAID
  DATALENGTH
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
DATALENGTH	U4	Data Length

S4F26 - Multi-block Grant

S4F26->
GRANT

Parameters:

Parameter	Type	Description
GRANT	B[1]	Grant signal
		0: Not granted
		1: Granted

S4F27 - Handoff Ready

S4F27->
{L[2]
  EQNAME
  {L[11]
    TRLINK
    TRPORT
    TROBJNAME
    TROBJTYPE
    TRROLE
    TRPTNR
    TRPTPORT
    TRDIR
    TRTYPE
    TRLOCATION
  }
}

Parameters:

Parameter	Type	Description
EQNAME	A	Equipment Name
TRLINK	U1	Transfer Link
TRPORT	U1	Transfer Port
TROBJNAME	A	Transfer Object Name
TROBJTYPE	A	Transfer Object Type
TRROLE	A	Transfer Role
TRPTNR	A	Transfer Partner
TRPTPORT	U1	Transfer Partner Port
TRDIR	A	Transfer Direction
TRTYPE	A	Transfer Type
TRLOCATION	A	Transfer Location

S4F29 - Handoff Command

<-S4F29
{L[4]
  TRLINK
  MCINDEX
  HOCMDNAME
  {L[n]
    {L[2]
      CPNAME
      CPVAL
    }
  }
}

Parameters:

Parameter	Type	Description
TRLINK	U1	Transfer Link
MCINDEX	U1	Machine Control Index
HOCMDNAME	A	Handoff Command Name
CPNAME	A	Command Parameter Name
CPVAL	any format	Command Parameter Value

S4F31 - Handoff Command Complete

S4F31->
{L[3]
  TRLINK
  MCINDEX
  {L[2]
    HOACK
    {L[n]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
TRLINK	U1	Transfer Link
MCINDEX	U1	Machine Control Index
HOACK	B[1]	Handoff Acknowledge
ERRCODE	U1	Error Code
ERRTEXT	A	Error Text

S4F33 - Handoff Verified

S4F33->
{L[2]
  TRLINK
  {L[2]
    HOACK
    {L[n]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
TRLINK	U1	Transfer Link
HOACK	B[1]	Handoff Acknowledge
ERRCODE	U1	Error Code
ERRTEXT	A	Error Text

S4F35 - Handoff Cancel Ready

S4F35->
TRLINK

Parameters:

Parameter	Type	Description
TRLINK	U1	Transfer Link

S4F37 - Handoff Cancel Ready Acknowledge

<-S4F37
{L[2]
  TRLINK
  HOCANCELACK
}

Parameters:

Parameter	Type	Description
TRLINK	U1	Transfer Link
HOCANCELACK	B[1]	Handoff Cancel Acknowledge

S4F39 - Handoff Halt

S4F39->
TRLINK

Parameters:

Parameter	Type	Description
TRLINK	U1	Transfer Link

S4F41 - Handoff Halt Acknowledge

<-S4F41
{L[2]
  TRLINK
  HOHALTACK
}

Parameters:

Parameter	Type	Description
TRLINK	U1	Transfer Link
HOHALTACK	B[1]	Handoff Halt Acknowledge

Stream 5: Exception Reporting

Purpose: Alarm and exception handling

Message	Direction	Description
S5F1	← Equipment	Alarm Report Send
S5F2	→ Equipment	Alarm Report Acknowledge
S5F3	→ Equipment	En/Disable Alarm Send
S5F4	← Equipment	En/Disable Alarm Acknowledge
S5F5	→ Equipment	List Alarms Request
S5F6	← Equipment	List Alarms Response
S5F7	→ Equipment	List Enabled Alarm Request
S5F8	← Equipment	List Enabled Alarm Response

S5F1 - Alarm Report Send

S5F1->
{L[3]
  ALCD
  ALID
  ALTX
}

Parameters:

Parameter	Type	Description
ALCD	B[1]	Alarm Code
		Bit 0: Alarm Set (1) or Clear (0)
		Bit 7: Alarm (1) or Warning (0)
ALID	U1/U2/U4/A	Alarm ID
ALTX	A[120]	Alarm Text

S5F2 - Alarm Report Acknowledge

<-S5F2
ACKC5

Parameters:

Parameter	Type	Description
ACKC5	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S5F3 - Enable/Disable Alarm Send

<-S5F3
{L[2]
  ALED
  {L[n]
    ALID_1
    ALID_2
    ...
    ALID_n
  }
}

**Parameters:**

| Parameter | Type | Description |
|-----------|------|-------------|
| ALED | B[1] | Alarm Enable/Disable |
| | | 128 (0x80): Enable |
| | | 0: Disable |
| ALID | U1, U2, U4, or A | Alarm ID |

S5F4 - Enable/Disable Alarm Acknowledge

S5F4->
ACKC5

**Parameters:**

| Parameter | Type | Description |
|-----------|------|-------------|
| ACKC5 | B[1] | Acknowledge Code |
| | | 0: Acknowledged |
| | | 1: Error |

S5F5 - List Alarms Request

<-S5F5
{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

S5F6 - List Alarms Response

S5F6->
{L[n]
  ALID_1
  ALID_2
  ...
  ALID_n
}

Parameters:

Parameter	Type	Description
ALID	U1, U2, U4, or A	Alarm ID

S5F7 - List Enabled Alarm Request

<-S5F7
{}

Parameters:

Parameter	Type	Description
Empty	-	Empty list (header only message)

S5F8 - List Enabled Alarm Response

S5F8->
{L[n]
  ALID_1
  ALID_2
  ...
  ALID_n
}

Parameters:

Parameter	Type	Description
ALID	U1, U2, U4, or A	Alarm ID - Only enabled alarms

Stream 6: Data Collection

Purpose: Process data collection and event reporting

Message	Direction	Description
S6F1	← Equipment	Trace Data Send
S6F2	→ Equipment	Trace Data Acknowledge
S6F3	← Equipment	Discrete Variable Data Send
S6F4	→ Equipment	Discrete Variable Data Acknowledge
S6F5	← Equipment	Multi-block Data Send Inquire
S6F6	→ Equipment	Multi-block Grant
S6F7	→ Equipment	Data Transfer Request
S6F8	← Equipment	Data Transfer Data
S6F9	← Equipment	Formatted Variable Send
S6F10	→ Equipment	Formatted Variable Acknowledge
S6F11	← Equipment	Event Report Send
S6F12	→ Equipment	Event Report Acknowledge
S6F13	← Equipment	Annotated Event Report Send
S6F14	→ Equipment	Annotated Event Report Acknowledge
S6F15	→ Equipment	Event Report Request
S6F16	← Equipment	Event Report Data
S6F17	→ Equipment	Annotated Event Report Request
S6F18	← Equipment	Annotated Event Report Data
S6F19	→ Equipment	Individual Report Request
S6F20	← Equipment	Individual Report Data
S6F21	→ Equipment	Annotated Individual Report Request
S6F22	← Equipment	Annotated Individual Report Data
S6F23	→ Equipment	Request or Purge Spooled Data
S6F24	← Equipment	Request or Purge Spooled Data Acknowledge
S6F25	↔ Host/Equipment	Notification Report Send
S6F26	↔ Host/Equipment	Notification Report Acknowledge
S6F27	← Equipment	Trace Report Send
S6F28	→ Equipment	Trace Report Acknowledge
S6F29	→ Equipment	Trace Report Request
S6F30	← Equipment	Trace Report Data

S6F1 - Trace Data Send

S6F1->
{L[4]
  TRID
  SMPLN
  STIME
  {L[n]
    SV
  }
}

Parameters:

Parameter	Type	Description
TRID	U1, U2, U4, or A	Trace Request ID
SMPLN	U1, U2, U4	Sample Number
STIME	A	Sample Time
SV	any format	Sample Value

S6F2 - Trace Data Acknowledge

<-S6F2
ACKC6

Parameters:

Parameter	Type	Description
ACKC6	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S6F3 - Discrete Variable Data Send

S6F3->
{L[3]
  DATAID
  CEID
  {L[n]
    {L[2]
      DSID
      {L[m]
        {L[2]
          DVNAME
          DVVAL
        }
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID
CEID	U1, U2, U4, or A	Collection Event ID
DSID	U1, U2, U4, or A	Data Set ID
DVNAME	A	Discrete Variable Name
DVVAL	any format	Discrete Variable Value

S6F4 - Discrete Variable Data Acknowledge

<-S6F4
ACKC6

Parameters:

Parameter	Type	Description
ACKC6	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S6F5 - Multi-block Data Send Inquire

S6F5->
{L[2]
  DATAID
  DATALENGTH
}

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID
DATALENGTH	U4	Data Length

S6F6 - Multi-block Grant

<-S6F6
GRANT6

Parameters:

Parameter	Type	Description
GRANT6	B[1]	Grant Code
		0: Granted
		1: Busy, try again
		2: No space

S6F7 - Data Transfer Request

<-S6F7
DATAID

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID

S6F8 - Data Transfer Data

S6F8->
{L[3]
  DATAID
  CEID
  {L[n]
    DSID
    {L[m]
      {L[2]
        DVNAME
        DVVAL
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
CEID	U1/U2/U4/A	Collection Event ID
DSID	U1/U2/U4/A	Data Set ID
DVNAME	A	Discrete Variable Name
DVVAL	any format	Discrete Variable Value

S6F9 - Formatted Variable Send

<-S6F9
{L[4]
  PFCD
  DATAID
  CEID
  {L[n]
    {L[2]
      DSID
      {L[m]
        DVVAL
      }
    }
  }
}

Parameters:

Parameter	Type	Description
PFCD	A	Process Function Code
DATAID	U1/U2/U4/A	Data ID
CEID	U1/U2/U4/A	Collection Event ID
DSID	U1/U2/U4/A	Data Set ID
DVVAL	any format	Discrete Variable Value

S6F10 - Formatted Variable Acknowledge

S6F10->
ACKC6

Parameters:

Parameter	Type	Description
ACKC6	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S6F11 - Event Report Send

S6F11->
{L[3]
  DATAID
  CEID
  {L[a]
    {L[2]
      RPTID
      {L[b]
        V
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
CEID	U1/U2/U4/A	Collection Event ID
RPTID	U1/U2/U4/A	Report ID
V	any format	Variable Value

S6F12 - Event Report Acknowledge

ACKC6

Parameters:

Parameter	Type	Description
ACKC6	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S6F13 - Annotated Event Report Send

{L[3]
  DATAID
  CEID
  {L[a]
    {L[2]
      RPTID
      {L[b]
        {L[2]
          VID
          V
        }
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
CEID	U1/U2/U4/A	Collection Event ID
RPTID	U1/U2/U4/A	Report ID
VID	U1/U2/U4/A	Variable ID
V	any format	Variable Value

S6F14 - Annotated Event Report Acknowledge

ACKC6

Parameters:

Parameter	Type	Description
ACKC6	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S6F15 - Event Report Request

CEID

Parameters:

Parameter	Type	Description
CEID	U1/U2/U4/A	Collection Event ID

S6F16 - Event Report Data

{L[3]
  DATAID
  CEID
  {L[a]
    {L[2]
      RPTID
      {L[b]
        V
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
CEID	U1/U2/U4/A	Collection Event ID
RPTID	U1/U2/U4/A	Report ID
V	any format	Variable Value

S6F17 - Annotated Event Report Request

CEID

Parameters:

Parameter	Type	Description
CEID	U1/U2/U4/A	Collection Event ID

S6F18 - Annotated Event Report Data

{L[3]
  DATAID
  CEID
  {L[a]
    {L[2]
      RPTID
      {L[b]
        {L[2]
          VID
          V
        }
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
CEID	U1/U2/U4/A	Collection Event ID
RPTID	U1/U2/U4/A	Report ID
VID	U1/U2/U4/A	Variable ID
V	any format	Variable Value

S6F19 - Individual Report Request

RPTID

Parameters:

Parameter	Type	Description
RPTID	U1/U2/U4/A	Report ID

S6F20 - Individual Report Data

{L[n]
  V
}

Parameters:

Parameter	Type	Description
V	any format	Variable Value

S6F21 - Annotated Individual Report Request

RPTID

Parameters:

Parameter	Type	Description
RPTID	U1/U2/U4/A	Report ID

S6F22 - Annotated Individual Report Data

{L[n]
  {L[2]
    VID
    V
  }
}

Parameters:

Parameter	Type	Description
VID	U1, U2, U4, or A	Variable ID
V	any format	Variable Value

S6F23 - Request or Purge Spooled Data

RSDC

Parameters:

Parameter	Type	Description
RSDC	A	Request or Purge Spooled Data Command

S6F24 - Request or Purge Spooled Data Acknowledge

RSDA

Parameters:

Parameter	Type	Description
RSDA	A	Request or Purge Spooled Data Acknowledge

S6F25 - Notification Report Send

{L[7]
  DATAID
  OPID
  LINKID
  RCPSPEC
  RMCHGSTAT
  {L[m]
    {L[2]
      RCPATTRID
      RCPATTRDATA
    }
  }
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID
OPID	A	Operator ID
LINKID	A	Link ID
RCPSPEC	A	Recipe Specification
RMCHGSTAT	A	Recipe Change Status
RCPATTRID	A	Recipe Attribute ID
RCPATTRDATA	any format	Recipe Attribute Data
RMACK	B[1]	Recipe Acknowledge
ERRCODE	U1	Error Code
ERRTEXT	A	Error Text

S6F26 - Notification Report Acknowledge

ACKC6

Parameters:

Parameter	Type	Description
ACKC6	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S6F27 - Trace Report Send

{L[3]
  DATAID
  TRID
  {L[n]
    {L[p]
      {L[2]
        RPTID
        {L[m]
          V
        }
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID
TRID	U1, U2, U4, or A	Trace Request ID
RPTID	U1, U2, U4, or A	Report ID
V	any format	Variable Value

S6F28 - Trace Report Acknowledge

TRID

Parameters:

Parameter	Type	Description
TRID	U1, U2, U4, or A	Trace Request ID

S6F29 - Trace Report Request

TRID

Parameters:

Parameter	Type	Description
TRID	U1, U2, U4, or A	Trace Request ID

S6F30 - Trace Report Data

{L[3]
  TRID
    {L[n]
      {L[2]
        RPTID
        {L[m]
          V
        }
    }
  }
  ERRCODE
}

Parameters:

Parameter	Type	Description
TRID	U1, U2, U4, or A	Trace Request ID
RPTID	U1, U2, U4, or A	Report ID
V	any format	Variable Value
ERRCODE	A	Error Code

Stream 7: Process Program Management

Purpose: Recipe and process program handling

Message	Direction	Description
S7F1	↔ Host/Equipment	Process Program Load Inquire
S7F2	↔ Host/Equipment	Process Program Load Grant
S7F3	↔ Host/Equipment	Process Program Send
S7F4	↔ Host/Equipment	Process Program Send Acknowledge
S7F5	↔ Host/Equipment	Process Program Request
S7F6	↔ Host/Equipment	Process Program Data
S7F7	← Equipment	Process Program ID Request
S7F8	→ Host	Process Program ID Data
S7F9	↔ Host/Equipment	Material/Process Matrix Request
S7F10	↔ Host/Equipment	Material/Process Matrix Data
S7F11	→ Host	Material/Process Matrix Update Send
S7F12	← Equipment	Material/Process Matrix Update Acknowledge
S7F13	→ Host	Material/Process Matrix Delete Entry Send
S7F14	← Equipment	Delete Material/Process Matrix Entry Acknowledge
S7F15	→ Host	Matrix Mode Select Send
S7F16	← Equipment	Matrix Mode Select Acknowledge
S7F17	→ Host	Delete Process Program Send
S7F18	← Equipment	Delete Process Program Acknowledge
S7F19	→ Host	Current Process Program Directory Request
S7F20	← Equipment	Current Process Program Data
S7F21	→ Host	Process Capabilities Request
S7F22	← Equipment	Process Capabilities Data
S7F23	↔ Host/Equipment	Formatted Process Program Send
S7F24	↔ Host/Equipment	Formatted Process Program Acknowledge
S7F25	↔ Host/Equipment	Formatted Process Program Request
S7F26	↔ Host/Equipment	Formatted Process Program Data
S7F27	← Equipment	Process Program Verification Send
S7F28	→ Host	Process Program Verification Acknowledge
S7F29	← Equipment	Process Program Verification Inquire
S7F30	→ Host	Process Program Verification Grant
S7F31	→ Host	Verification Request Send
S7F32	← Equipment	Verification Request Acknowledge
S7F33	↔ Host/Equipment	Process Program Available Request
S7F34	↔ Host/Equipment	Process Program Availability Data
S7F35	↔ Host/Equipment	Process Program for MID Request
S7F36	↔ Host/Equipment	Process Program for MID Data
S7F37	↔ Host/Equipment	Large Process Program Send
S7F38	↔ Host/Equipment	Large Process Program Send Acknowledge
S7F39	↔ Host/Equipment	Large Formatted Process Program Send
S7F40	↔ Host/Equipment	Large Formatted Process Program Acknowledge
S7F41	↔ Host/Equipment	Large Process Program Request
S7F42	↔ Host/Equipment	Large Process Program Request Acknowledge
S7F43	↔ Host/Equipment	Large Formatted Process Program Request
S7F44	↔ Host/Equipment	Large Formatted Process Program Request Acknowledge

S7F1 - Process Program Load Inquire

S7F1-> or <-S7F1
{L[2]
  PPID
  LENGTH
}

Parameters:

Parameter	Type	Description
PPID	A	Process Program ID
LENGTH	U1/U2/U4	Length of Process Program

S7F2 - Process Program Load Grant

S7F2-> or <-S7F2
PPGNT

Parameters:

Parameter	Type	Description
PPGNT	B[1]	Process Program Grant
		0: Granted
		1: Busy, try again
		2: No space
		3: Invalid PPID

S7F3 - Process Program Send

S7F3-> or <-S7F3
{L[2]
  PPID
  PPBODY
}

Parameters:

Parameter	Type	Description
PPID	A	Process Program ID
PPBODY	A/B	Process Program Body

S7F4 - Process Program Send Acknowledge

S7F4-> or <-S7F4
ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F5 - Process Program Request

S7F5-> or <-S7F5
PPID

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID

S7F6 - Process Program Data

S7F6-> or <-S7F6
{L[2]
  PPID
  PPBODY
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
PPBODY	ASCII/Binary	Process Program Body

S7F7 - Process Program ID Request

<-S7F7
MID

Parameters:

Parameter	Type	Description
MID	ASCII	Material ID

S7F8 - Process Program ID Data

S7F8->
{L[2]
  PPID
  MID
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
MID	ASCII	Material ID

S7F9 - Material/Process Matrix Request

S7F9-> or <-S7F9
header only

Parameters:

Parameter	Type	Description
Header	-	Header only message

S7F10 - Material/Process Matrix Data

S7F10-> or <-S7F10
{L[n]
  {L[2]
    PPID
    {L[a]
      MID
    }
  }
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
MID	ASCII	Material ID

S7F11 - Material/Process Matrix Update Send

{L[n]
  {L[2]
    PPID
    {L[a]
      MID
    }
  }
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
MID	ASCII	Material ID

S7F12 - Material/Process Matrix Update Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F13 - Material/Process Matrix Delete Entry Send

{L[n]
  {L[2]
    PPID
    {L[a]
      MID
    }
  }
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
MID	ASCII	Material ID

S7F14 - Delete Material/Process Matrix Entry Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F15 - Matrix Mode Select Send

MMODE

Parameters:

Parameter	Type	Description
MMODE	ASCII	Matrix Mode

S7F16 - Matrix Mode Select Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F17 - Delete Process Program Send

<-S7F17
{L[n]
  PPID
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID

S7F18 - Delete Process Program Acknowledge

S7F18->
ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F19 - Current Process Program Directory Request

<-S7F19
header only

Parameters:

Parameter	Type	Description
Header	-	Header only message

S7F20 - Current Process Program Data

S7F20->
{L[n]
    PPID
    }

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID

S7F21 - Process Capabilities Request

<-S7F21
header only

Parameters:

Parameter	Type	Description
Header	-	Header only message

S7F22 - Process Capabilities Data

S7F22->
{L[5]
  MDLN
  SOFTREV
  CMDMAX
  BYTMAX
  {L[c]
    {L[11]
      CCODE
      CNAME
      RQCMD
      BLKDEF
      BCDS
      IBCDS
      NBCDS
      ACDS
      IACDS
      NACDS
      {L[p]
        L[x]
      }
    }
  }
}

Parameters:

Parameter	Type	Description
MDLN	ASCII	Model Number
SOFTREV	ASCII	Software Revision
CMDMAX	U1/U2/U4	Command Maximum
BYTMAX	U1/U2/U4	Byte Maximum
CCODE	ASCII	Command Code
CNAME	ASCII	Command Name
RQCMD	ASCII	Required Command
BLKDEF	ASCII	Block Definition
BCDS	ASCII	Block Code Data Set
IBCDS	ASCII	Input Block Code Data Set
NBCDS	ASCII	Number Block Code Data Set
ACDS	ASCII	Alarm Code Data Set
IACDS	ASCII	Input Alarm Code Data Set
NACDS	ASCII	Number Alarm Code Data Set
L[x]	Various	Variable length data (any format)

S7F23 - Formatted Process Program Send

<-S7F23
{L[4]
  PPID
  MDLN
  SOFTREV
  {L[c]
    {L[2]
      CCODE
      {L[p]
        PPARM
      }
    }
  }
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
MDLN	ASCII	Model Number
SOFTREV	ASCII	Software Revision
CCODE	ASCII	Command Code
PPARM	Various	Process Program Parameter (any format)

S7F24 - Formatted Process Program Acknowledge

S7F24->
ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F25 - Formatted Process Program Request

<-S7F25
PPID

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID

S7F26 - Formatted Process Program Data

S7F26->
{L[4]
  PPID
  MDLN
  SOFTREV
  {L[c]
    {L[2]
      CCODE
      {L[p]
        PPARM
      }
    }
  }
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
MDLN	ASCII	Model Number
SOFTREV	ASCII	Software Revision
CCODE	ASCII	Command Code
PPARM	Various	Process Program Parameter (any format)

S7F27 - Process Program Verification Send

{L[2]
  PPID
  {L[n]
    {L[3]
      ACKC7A
      SEQNUM
      ERRW7
    }
  }
}

Parameters:

Parameter	Type	Description
PPID	ASCII	Process Program ID
ACKC7A	B[1]	Acknowledge Code 7A
SEQNUM	U1/U2/U4	Sequence Number
ERRW7	ASCII	Error Word 7

S7F28 - Process Program Verification Acknowledge

header only

Parameters:

Parameter	Type	Description
Header	-	Header only message

S7F29 - Process Program Verification Inquire

LENGTH

Parameters:

Parameter	Type	Description
LENGTH	U4	Length of S7F27 message

S7F30 - Process Program Verification Grant

PPGNT

Parameters:

Parameter	Type	Description
PPGNT	B[1]	Process Program Grant
		0: Granted
		1: Busy, try again
		2: No space
		3: Invalid PPID

S7F31 - Verification Request Send

{L[4]
  PPID
  MDLN
  SOFTREV
  {L[c]
    {L[2]
      CCODE
      {L[p]
        PPARM
      }
    }
  }
}

Parameters:

Parameter	Type	Description
PPID	A	Process Program ID
MDLN	A	Model Number
SOFTREV	A	Software Revision
CCODE	A	Command Code
PPARM	any format	Process Program Parameter

S7F32 - Verification Request Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F33 - Process Program Available Request

PPID

Parameters:

Parameter	Type	Description
PPID	A	Process Program ID

S7F34 - Process Program Availability Data

{L[3]
  PPID
  UNFLEN
  FRMLEN
}

Parameters:

Parameter	Type	Description
PPID	A	Process Program ID
UNFLEN	U1/U2/U4	Unformatted Length
FRMLEN	U1/U2/U4	Formatted Length

S7F35 - Process Program for MID Request

MID

Parameters:

Parameter	Type	Description
MID	A	Material ID

S7F36 - Process Program for MID Data

{L[3]
  MID
  PPID
  PPBODY
}

Parameters:

Parameter	Type	Description
MID	A	Material ID
PPID	A	Process Program ID
PPBODY	A/B	Process Program Body

S7F37 - Large Process Program Send

DSNAME

Parameters:

Parameter	Type	Description
DSNAME	A	Data Set Name

S7F38 - Large Process Program Send Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F39 - Large Formatted Process Program Send

DSNAME

Parameters:

Parameter	Type	Description
DSNAME	A	Data Set Name

S7F40 - Large Formatted Process Program Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F41 - Large Process Program Request

DSNAME

Parameters:

Parameter	Type	Description
DSNAME	A	Data Set Name

S7F42 - Large Process Program Request Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

S7F43 - Large Formatted Process Program Request

DSNAME

Parameters:

Parameter	Type	Description
DSNAME	A	Data Set Name

S7F44 - Large Formatted Process Program Request Acknowledge

ACKC7

Parameters:

Parameter	Type	Description
ACKC7	B[1]	Acknowledge Code
		0: Accepted
		1: Permission not granted
		2: Length error
		3: Matrix overflow
		4: PPID not found
		5: Mode unsupported
		6: Communication not available
		7: Busy

Stream 8: Control Program Management

Purpose: Control program and recipe management

Message	Direction	Description
S8F1	→ Equipment	Boot Program Request
S8F2	← Equipment	Boot Program Data
S8F3	→ Equipment	Executive Program Request
S8F4	← Equipment	Executive Program Data

S8F1 - Boot Program Request

<-S8F1
{}

Parameters:

Parameter	Type	Description
-	-	Empty list (header only message)

S8F2 - Boot Program Data

S8F2->
BPD

Parameters:

Parameter	Type	Description
BPD	B	Boot Program Data

S8F3 - Executive Program Request

<-S8F3
{}

Parameters:

Parameter	Type	Description
-	-	Empty list (header only message)

S8F4 - Executive Program Data

S8F4->
EPD

Parameters:

Parameter	Type	Description
EPD	B	Executive Program Data

Stream 9: System Errors

Purpose: Communication error reporting

Message	Direction	Description
S9F1	← Equipment	Unrecognized Device ID
S9F3	← Equipment	Unrecognized Stream Type
S9F5	← Equipment	Unrecognized Function Type
S9F7	← Equipment	Illegal Data
S9F9	← Equipment	Transaction Timer Timeout
S9F11	← Equipment	Data Too Long
S9F13	← Equipment	Conversation Timeout

S9F1 - Unrecognized Device ID

S9F1->
MHEAD

Parameters:

Parameter	Type	Description
MHEAD	B[10]	Message Header (The complete 10-byte header of the unrecognized message)

S9F3 - Unrecognized Stream Type

S9F3->
MHEAD

Parameters:

Parameter	Type	Description
MHEAD	B[10]	Message Header (The complete 10-byte header of the message with unrecognized stream type)

S9F5 - Unrecognized Function Type

S9F5->
MHEAD

Parameters:

Parameter	Type	Description
MHEAD	B[10]	Message Header (The complete 10-byte header of the message with unrecognized function type)

S9F7 (Error message) Overview

The S9F7 message is an unsolicited message sent by the equipment to notify the host of an error when it cannot process a received message. This message helps diagnose communication errors and enables the host to correct or respond to the issue.

1. Scenario Initiation: Host Message Transmission

• The host sends a SECS-II message (e.g., S1F1, S2F23) to the equipment.
• The message contains commands or data requests (e.g., status variable requests, data collection setup) that the equipment is expected to process.

2. Error Occurrence

• An error occurs while the equipment processes the received message. Common causes for S9F7 errors include:
  • Invalid Data Format: The message's data structure does not comply with SEMI standards or contains unexpected values (e.g., incorrect SVID, abnormal data length).
  • Unknown Stream/Function: The stream or function sent by the host is not supported by the equipment (e.g., an undefined message like S99F99).
  • Invalid Transaction ID: The transaction ID is invalid or does not match the expected response.
  • Equipment State Mismatch: The requested operation cannot be performed in the equipment's current state (e.g., requesting a setting change during processing).
  • Message Length Error: The message length does not conform to standards or is shorter/longer than expected.

3. S9F7 Message Transmission

• Upon detecting the error, the equipment sends an S9F7 message to the host.
• The S9F7 message includes the following information:
  • MHEAD: Header information from the original message (stream/function and transaction ID of the erroneous message).
  • ERRCODE: An error code identifying the cause of the error (e.g., 1 = unknown stream, 3 = invalid data).
  • ERRTEXT: A human-readable description of the error (string format).
• Example: If the host sends an S2F23 message with an invalid SVID, the equipment reports the error via S9F7 with ERRTEXT such as "Invalid SVID."

4. Host Response

• The host receives the S9F7 message and analyzes the ERRCODE and ERRTEXT to identify the error cause.
• Response actions:
  • Message Correction: Fix invalid data (e.g., SVID, data format) and retransmit the message.
  • Equipment State Check: Verify the equipment’s current state (e.g., via S1F1) to ensure the request is appropriate.
  • Log Recording: Log the error for debugging or further action.
• Example: If S9F7 reports "Invalid SVID," the host verifies the correct SVID and retransmits S2F23.

5. Scenario Termination

• Once the host sends a corrected message or resolves the error, normal communication resumes.
• If the error persists, the host may perform additional diagnostics (e.g., request equipment logs, check status variables via S2F13) or request operator intervention.

S9F7 - Illegal Data

S9F7->
MHEAD

Parameters:

Parameter	Type	Description
MHEAD	B[10]	Message Header (The complete 10-byte header of the message with illegal data)

S9F9 - Transaction Timer Timeout

S9F9->
MHEAD

Parameters:

Parameter	Type	Description
MHEAD	B[10]	Message Header (The complete 10-byte header of the message that timed out)

S9F11 - Data Too Long

S9F11->
MHEAD

Parameters:

Parameter	Type	Description
MHEAD	B[10]	Message Header (The complete 10-byte header of the message that was too long)

S9F13 - Conversation Timeout

S9F13->
{L[2]
  MEXP
  EDID
}

Parameters:

Parameter	Type	Description
MEXP	B[1]	Message Expected (Stream and Function of the expected message)
EDID	U1/U2/U4/A	Equipment ID (ID of the equipment that timed out)

Stream 10: Terminal Services

Purpose: Operator interface communication

Message	Direction	Description
S10F1	→ Equipment	Terminal Request
S10F2	← Equipment	Terminal Response
S10F3	→ Equipment	Terminal Display, Single
S10F5	→ Equipment	Terminal Display, Multi-Block
S10F7	← Equipment	Multi-block Not Allowed
S10F9	→ Equipment	Broadcast Display Request
S10F10	← Equipment	Broadcast Display Acknowledge

S10F1 - Terminal Request

<-S10F1
{L[2]
  TID
  TEXT
}

Parameters:

Parameter	Type	Description
TID	U1	Terminal ID
TEXT	ASCII	Text Message

S10F2 - Terminal Response

S10F2->
{L[2]
  TID
  ACKC10
}

Parameters:

Parameter	Type	Description
TID	U1	Terminal ID
ACKC10	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Terminal not available

S10F3 - Terminal Display, Single

S10F3->
{L[2]
  TID
  TEXT
}

Parameters:

Parameter	Type	Description
TID	U1	Terminal ID
TEXT	A	Text Message

S10F5 - Terminal Display, Multi-Block

S10F5->
{L[3]
  TID
  {L[n]
    TEXT_1
    TEXT_2
    ...
    TEXT_n
  }
  MHEAD
}

Parameters:

Parameter	Type	Description
TID	U1	Terminal ID
TEXT	ASCII	Text Message
MHEAD	B[10]	Message Header

S10F7 - Multi-block Not Allowed

S10F7->
TID

Parameters:

Parameter	Type	Description
TID	U1/U2/U4/A	Transaction ID

S10F9 - Broadcast Display Request

<-S10F9
TEXT

Parameters:

Parameter	Type	Description
TEXT	ASCII	Text Message

S10F10 - Broadcast Display Acknowledge

S10F10->
ACKC10

Parameters:

Parameter	Type	Description
ACKC10	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Broadcast not supported

Stream 12: Wafer Mapping

Purpose: Wafer map data handling

Message	Direction	Description
S12F1	→ Equipment	Map Setup Data Send
S12F2	← Equipment	Map Setup Data Acknowledge
S12F3	→ Equipment	Map Setup Data Request
S12F4	← Equipment	Map Setup Data Response
S12F5	→ Equipment	Map Transmit Inquire
S12F6	← Equipment	Map Transmit Grant
S12F7	→ Equipment	Map Data Send Type 1
S12F8	← Equipment	Map Data Ack Type 1
S12F9	→ Equipment	Map Data Send Type 2
S12F10	← Equipment	Map Data Ack Type 2
S12F11	→ Equipment	Map Data Send Type 3
S12F12	← Equipment	Map Data Ack Type 3
S12F13	→ Equipment	Map Data Request Type 1
S12F14	← Equipment	Map Data Type 1
S12F15	→ Equipment	Map Data Request Type 2
S12F16	← Equipment	Map Data Type 2
S12F17	→ Equipment	Map Data Request Type 3
S12F18	← Equipment	Map Data Type 3
S12F19	↔ Host/Equipment	Map Error Report Send

S12F1 - Map Setup Data Send

<-S12F1
{L[15]
  MID
  IDTYP
  FNLOC
  FFROT
  ORLOC
  RPSEL
  {L[n]
    REFP
  }
  DUTMS
  XDIES
  YDIES
  ROWCT
  COLCT
  NULBC
  PRDCT
  PRAXI
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
FNLOC	ASCII	Final Location
FFROT	ASCII	Final Format Rotation
ORLOC	ASCII	Origin Location
RPSEL	ASCII	Reference Point Select
REFP	ASCII	Reference Point
DUTMS	ASCII	Die Unit Time Stamp
XDIES	U1/U2/U4	X Dies
YDIES	U1/U2/U4	Y Dies
ROWCT	U1/U2/U4	Row Count
COLCT	U1/U2/U4	Column Count
NULBC	U1/U2/U4	Null Block Count
PRDCT	U1/U2/U4	Production Count
PRAXI	ASCII	Production Axis

S12F2 - Map Setup Data Acknowledge

S12F2->
SDACK

Parameters:

Parameter	Type	Description
SDACK	B[1]	Setup Data Acknowledge
		0: Acknowledged
		1: Error

S12F3 - Map Setup Data Request

<-S12F3
{L[9]
  MID
  IDTYP
  MAPFT
  FNLOC
  FFROT
  ORLOC
  PRAXI
  BCEQU
  NULBC
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
MAPFT	ASCII	Map Format
FNLOC	ASCII	Final Location
FFROT	ASCII	Final Format Rotation
ORLOC	ASCII	Origin Location
PRAXI	ASCII	Production Axis
BCEQU	U1/U2/U4	Block Count Equal
NULBC	U1/U2/U4	Null Block Count

S12F4 - Map Setup Data Response

S12F4->
{L[15]
  MID
  IDTYP
  FNLOC
  ORLOC
  RPSEL
  {L[n]
    REFP
  }
  DUTMS
  XDIES
  YDIES
  ROWCT
  COLCT
  PRDCT
  BCEQU
  NULBC
  MLCL
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
FNLOC	ASCII	Final Location
ORLOC	ASCII	Origin Location
RPSEL	ASCII	Reference Point Select
REFP	ASCII	Reference Point
DUTMS	ASCII	Die Unit Time Stamp
XDIES	U1/U2/U4	X Dies
YDIES	U1/U2/U4	Y Dies
ROWCT	U1/U2/U4	Row Count
COLCT	U1/U2/U4	Column Count
PRDCT	U1/U2/U4	Production Count
BCEQU	U1/U2/U4	Block Count Equal
NULBC	U1/U2/U4	Null Block Count
MLCL	ASCII	Map Location

S12F5 - Map Transmit Inquire

<-S12F5
{L[4]
  MID
  IDTYP
  MAPFT
  MLCL
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
MAPFT	ASCII	Map Format
MLCL	ASCII	Map Location

S12F6 - Map Transmit Grant

S12F6->
GRNT1

Parameters:

Parameter	Type	Description
GRNT1	B[1]	Grant Type 1
		0: Granted
		1: Busy, try again
		2: No space

S12F7 - Map Data Send Type 1

<-S12F7
{L[3]
  MID
  IDTYP
  {L[n]
    {L[2]
      RSINF
      BINLT
    }
  }
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
RSINF	ASCII	Row Information
BINLT	Binary	Binary Data

S12F8 - Map Data Ack Type 1

S12F8->
MDACK

Parameters:

Parameter	Type	Description
MDACK	B[1]	Map Data Acknowledge
		0: Acknowledged
		1: Error

S12F9 - Map Data Send Type 2

<-S12F9
{L[4]
  MID
  IDTYP
  STRP
  BINLT
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
STRP	ASCII	Strip Data
BINLT	Binary	Binary Data

S12F10 - Map Data Ack Type 2

S12F10->
MDACK

Parameters:

Parameter	Type	Description
MDACK	B[1]	Map Data Acknowledge
		0: Acknowledged
		1: Error

S12F11 - Map Data Send Type 3

<-S12F11
{L[3]
  MID
  IDTYP
  {L[n]
    {L[2]
      XYPOS
      BINLT
    }
  }
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
XYPOS	ASCII	XY Position
BINLT	Binary	Binary Data

S12F12 - Map Data Ack Type 3

S12F12->
MDACK

Parameters:

Parameter	Type	Description
MDACK	B[1]	Map Data Acknowledge
		0: Acknowledged
		1: Error

S12F13 - Map Data Request Type 1

<-S12F13
{L[2]
  MID
  IDTYP
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type

S12F14 - Map Data Type 1

S12F14->
{L[3]
  MID
  IDTYP
  {L[n]
    {L[2]
      RSINF
      BINLT
    }
  }
}

Parameters:

Parameter	Type	Description
MID	ASCII	Map ID
IDTYP	B[1]	ID Type
RSINF	ASCII	Row Information
BINLT	Binary	Binary Data

S12F15 - Map Data Request Type 2

<-S12F15
{L[2]
  MID
  IDTYP
}

Parameters:

Parameter	Type	Description
MID	A	Map ID
IDTYP	B[1]	ID Type

S12F16 - Map Data Type 2

S12F16->
{L[4]
  MID
  IDTYP
  STRP
  BINLT
}

Parameters:

Parameter	Type	Description
MID	A	Map ID
IDTYP	B[1]	ID Type
STRP	A	Strip Data
BINLT	B	Binary Data

S12F17 - Map Data Request Type 3

<-S12F17
{L[3]
  MID
  IDTYP
  SDBIN
}

Parameters:

Parameter	Type	Description
MID	A	Map ID
IDTYP	B[1]	ID Type
SDBIN	B	Sub Data Binary

S12F18 - Map Data Type 3

{L[3]
  MID
  IDTYP
  {L[n]
    {L[2]
      XYPOS
      BINLT
    }
  }
}

Parameters:

Parameter	Type	Description
MID	A	Map ID
IDTYP	B[1]	ID Type
XYPOS	A	XY Position
BINLT	B	Binary Data

S12F19 - Map Error Report Send

{L[2]
  MAPER
  DATLC
}

Parameters:

Parameter	Type	Description
MAPER	ASCII	Map Error
DATLC	ASCII	Data Location

Stream 13: Data Set Management

Purpose: Advanced data set handling and management

Message	Direction	Description
S13F1	↔ Host/Equipment	Send Data Set Send
S13F2	↔ Host/Equipment	Send Data Set Ack
S13F3	↔ Host/Equipment	Open Data Set Request
S13F4	↔ Host/Equipment	Open Data Set Data
S13F5	↔ Host/Equipment	Read Data Set Request
S13F6	↔ Host/Equipment	Read Data Set Data
S13F7	↔ Host/Equipment	Close Data Set Send
S13F8	↔ Host/Equipment	Close Data Set Ack
S13F9	↔ Host/Equipment	Reset Data Set Send
S13F10	↔ Host/Equipment	Reset Data Set Ack
S13F11	↔ Host/Equipment	Data Set Obj Multi-Block Inquire
S13F12	↔ Host/Equipment	Data Set Obj Multi-Block Grant
S13F13	↔ Host/Equipment	Table Data Send
S13F14	↔ Host/Equipment	Table Data Ack
S13F15	↔ Host/Equipment	Table Data Request
S13F16	↔ Host/Equipment	Table Data

S13F1 - Send Data Set Send

{L[1]
  DSNAME
}

Parameters:

Parameter	Type	Description
DSNAME	ASCII	Data Set Name
Comment	-	S13F1 seems to have the L: wrapper that S13F2 is missing. Be prepared to receive DSNAME without the L:

S13F2 - Send Data Set Ack

{L[2]
  DSNAME
  ACKC13
}

Parameters:

Parameter	Type	Description
DSNAME	ASCII	Data Set Name
ACKC13	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
Comment	-	The standards have had an erroneous structure for years - the L[2] has been missing. Unfortunately some implementations have not realized it was an error. The latest Hume versions automagically create the L[2] wrapper when it is missing.

S13F3 - Open Data Set Request

{L[3]
  HANDLE
  DSNAME
  CKPNT
}

Parameters:

Parameter	Type	Description
HANDLE	ASCII	Handle
DSNAME	ASCII	Data Set Name
CKPNT	ASCII	Checkpoint
Comment	-	Sent by the receiver to open a data set for reading

S13F4 - Open Data Set Data

S13F4->
{L[5]
  HANDLE
  DSNAME
  ACKC13
  RTYPE
  RECLEN
}

Parameters:

Parameter	Type	Description
HANDLE	ASCII	Handle
DSNAME	ASCII	Data Set Name
ACKC13	B[1]	Acknowledge Code
RTYPE	ASCII	Record Type
RECLEN	U1/U2/U4	Record Length

S13F5 - Read Data Set Request

<-S13F5
{L[2]
  HANDLE
  READLN
}

Parameters:

Parameter	Type	Description
HANDLE	ASCII	Handle
READLN	U1/U2/U4	Read Length

S13F6 - Read Data Set Data

S13F6->
{L[4]
  HANDLE
  ACKC13
  CKPNT
  {L[n]
    FILDAT
  }
}

Parameters:

Parameter	Type	Description
HANDLE	ASCII	Handle
ACKC13	B[1]	Acknowledge Code
CKPNT	ASCII	Checkpoint
FILDAT	Various	File Data (any format)

S13F7 - Close Data Set Send

<-S13F7
{L[1]
  HANDLE
}

Parameters:

Parameter	Type	Description
HANDLE	ASCII	Handle

S13F8 - Close Data Set Ack

S13F8->
{L[2]
  HANDLE
  ACKC13
}

Parameters:

Parameter	Type	Description
HANDLE	ASCII	Handle
ACKC13	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error

S13F9 - Reset Data Set Send

<-S13F9
{}

Parameters:

Parameter	Type	Description
Header	-	Empty list (header only message)

S13F10 - Reset Data Set Ack

{}

Parameters:

Parameter	Type	Description
Header	-	Empty list (header only message)

S13F11 - Data Set Obj Multi-Block Inquire

{L[3]
  DATAID
  OBJSPEC
  DATALENGTH
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
OBJSPEC	ASCII	Object Specification
DATALENGTH	U1/U2/U4	Data Length

S13F12 - Data Set Obj Multi-Block Grant

GRANT

Parameters:

Parameter	Type	Description
GRANT	B[1]	Grant signal
		0: Not granted
		1: Granted

S13F13 - Table Data Send

{L[8]
  DATAID
  OBJSPEC
  TBLTYP
  TBLID
  TBLCMD
  {L[n]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[c]
    COLHDR
  }
  {L[r]
    {L[m]
      TBLELT
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
OBJSPEC	ASCII	Object Specification
TBLTYP	ASCII	Table Type
TBLID	ASCII	Table ID
TBLCMD	ASCII	Table Command
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)
COLHDR	ASCII	Column Header
TBLELT	Various	Table Element (any format)
Comment	-	The first element of every row is a primary key value which identifies the row. The row items correspond in sequence to the column headers. E58 uses attributes NumCols, NumRows, and DataLength

S13F14 - Table Data Ack

{L[2]
  TBLACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
TBLACK	B[1]	Table Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S13F15 - Table Data Request

{L[7]
  DATAID
  OBJSPEC
  TBLTYP
  TBLID
  TBLCMD
  {L[p]
    COLHDR
  }
  {L[q]
    TBLELT
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
OBJSPEC	ASCII	Object Specification
TBLTYP	ASCII	Table Type
TBLID	ASCII	Table ID
TBLCMD	ASCII	Table Command
COLHDR	ASCII	Column Header
TBLELT	Various	Table Element (any format)
Comment	-	Either p or q or both are 0.

S13F16 - Table Data

{L[6]
  TBLTYP
  TBLID
  {L[n]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[c]
    COLHDR
  }
  {L[r]
    {L[c]
      TBLELT
    }
  }
  {L[2]
    TBLACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
TBLTYP	ASCII	Table Type
TBLID	ASCII	Table ID
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)
COLHDR	ASCII	Column Header
TBLELT	Various	Table Element (any format)
TBLACK	B[1]	Table Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

Stream 14: Object Services

Purpose: Object-oriented data management and services

Message	Direction	Description
S14F1	→ Equipment	Get Attributes Request
S14F2	← Equipment	Attribute Data
S14F3	→ Equipment	Set Attributes
S14F4	← Equipment	Set Attributes Reply
S14F5	→ Equipment	Get Type Data
S14F6	← Equipment	Type Data
S14F7	→ Equipment	Get Attribute Names
S14F8	← Equipment	Attribute Names
S14F9	→ Equipment	Create Object Request
S14F10	← Equipment	Create Object Acknowledge
S14F11	→ Equipment	Delete Object Request
S14F12	← Equipment	Delete Object Acknowledge
S14F13	→ Equipment	Object Attach Request
S14F14	← Equipment	Object Attach Acknowledge
S14F15	→ Equipment	Attached Object Action Request
S14F16	← Equipment	Attached Object Action Acknowledge
S14F17	→ Equipment	Supervised Object Action Request
S14F18	← Equipment	Supervised Object Action Acknowledge
S14F19	→ Equipment	Generic Service Request
S14F20	← Equipment	Generic Service Acknowledge
S14F21	→ Equipment	Generic Service Completion
S14F22	← Equipment	Generic Service Completion Acknowledge
S14F23	→ Equipment	Multi-block Generic Service Inquire
S14F24	← Equipment	Multi-block Generic Service Grant
S14F25	→ Equipment	Service Name Request
S14F26	← Equipment	Service Name Data
S14F27	→ Equipment	Service Parameter Name Request
S14F28	← Equipment	Service Parameter Name Data

S14F1 - Get Attributes Request

<-S14F1
{L[5]
  OBJSPEC
  OBJTYPE
  {L[i]
    OBJID
  }
  {L[q]
    {L[3]
      ATTRID
      ATTRDATA
      ATTRRELN
    }
  }
  {L[a]
    ATTRID
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
OBJTYPE	ASCII	Object Type
OBJID	ASCII	Object ID
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)
ATTRRELN	ASCII	Attribute Relation
Comment	-	List lengths can be 0, and OBJSPEC can be zero-length.

S14F2 - Attribute Data

S14F2->
{L[2]
  {L[n]
    {L[2]
      OBJID
      {L[a]
        {L[2]
          ATTRID
          ATTRDATA
        }
      }
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S14F3 - Set Attributes

<-S14F3
{L[4]
  OBJSPEC
  OBJTYPE
  {L[i]
    OBJID
  }
  {L[n]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
OBJTYPE	ASCII	Object Type
OBJID	ASCII	Object ID
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)

S14F4 - Set Attributes Reply

S14F4->
{L[2]
  {L[i]
    {L[2]
      OBJID
      {L[n]
        {L[2]
          ATTRID
          ATTRDATA
        }
      }
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S14F5 - Get Type Data

<-S14F5
OBJSPEC

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
Comment	-	Asks for the types of objects owned by the type of specified object

S14F6 - Type Data

S14F6->
{L[2]
  {L[n]
    OBJTYPE
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
OBJTYPE	ASCII	Object Type
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S14F7 - Get Attribute Names

<-S14F7
{L[2]
  OBJSPEC
  {L[n]
    OBJTYPE
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
OBJTYPE	ASCII	Object Type

S14F8 - Attribute Names

S14F8->
{L[2]
  {L[n]
    {L[2]
      OBJTYPE
      {L[a]
        ATTRID
      }
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
OBJTYPE	ASCII	Object Type
ATTRID	ASCII	Attribute ID
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S14F9 - Create Object Request

<-S14F9
{L[3]
  OBJSPEC
  OBJTYPE
  {L[a]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
OBJTYPE	ASCII	Object Type
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)

S14F10 - Create Object Acknowledge

S14F10->
{L[3]
  OBJSPEC
  {L[b]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S14F11 - Delete Object Request

<-S14F11
{L[2]
  OBJSPEC
  {L[a]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)

S14F12 - Delete Object Acknowledge

S14F12->
{L[2]
  {L[b]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S14F13 - Object Attach Request

<-S14F13
{L[2]
  OBJSPEC
  {L[a]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
ATTRID	ASCII	Attribute ID
ATTRDATA	Various	Attribute Data (any format)

S14F14 - Object Attach Acknowledge

S14F14->
{L[3]
  OBJTOKEN
  {L[b]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
OBJTOKEN	A	Object Token
ATTRID	A	Attribute ID
ATTRDATA	any format	Attribute Data
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1, U2, U4, or A	Error Code
ERRTEXT	A	Error Text

S14F15 - Attached Object Action Request

<-S14F15
{L[4]
  OBJSPEC
  OBJCMD
  OBJTOKEN
  {L[a]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	A	Object Specification
OBJCMD	A	Object Command
OBJTOKEN	A	Object Token
ATTRID	A	Attribute ID
ATTRDATA	any format	Attribute Data

S14F16 - Attached Object Action Acknowledge

S14F16->
{L[2]
  {L[b]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
ATTRID	A	Attribute ID
ATTRDATA	any format	Attribute Data
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1, U2, U4, or A	Error Code
ERRTEXT	A	Error Text

S14F17 - Supervised Object Action Request

<-S14F17
{L[4]
  OBJSPEC
  OBJCMD
  TARGETSPEC
  {L[a]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	A	Object Specification
OBJCMD	A	Object Command
TARGETSPEC	A	Target Specification
ATTRID	A	Attribute ID
ATTRDATA	any format	Attribute Data

S14F18 - Supervised Object Action Acknowledge

S14F18->
{L[2]
  {L[b]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
ATTRID	A	Attribute ID
ATTRDATA	any format	Attribute Data
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1, U2, U4, or A	Error Code
ERRTEXT	A	Error Text

S14F19 - Generic Service Request

<-S14F19
{L[5]
  DATAID
  OPID
  OBJSPEC
  SVCNAME
  {L[m]
    {L[2]
      SPNAME
      SPVAL
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID
OPID	A	Operation ID
OBJSPEC	A	Object Specification
SVCNAME	A	Service Name
SPNAME	A	Service Parameter Name
SPVAL	any format	Service Parameter Value

S14F20 - Generic Service Acknowledge

S14F20->
{L[4]
  SVCACK
  LINKID
  {L[n]
    {L[2]
      SPNAME
      SPVAL
    }
  }
  {L[2]
    SVCACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
SVCACK	B[1]	Service Acknowledge
LINKID	A	Link ID
SPNAME	A	Service Parameter Name
SPVAL	any format	Service Parameter Value
ERRCODE	U1, U2, U4, or A	Error Code
ERRTEXT	A	Error Text
		Comment: It is not a mistake that SVCACK is included twice

S14F21 - Generic Service Completion

S14F21->
{L[5]
  DATAID
  OPID
  LINKID
  {L[n]
    {L[2]
      SPNAME
      SPVAL
    }
  }
  {L[2]
    SVCACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID
OPID	A	Operation ID
LINKID	A	Link ID
SPNAME	A	Service Parameter Name
SPVAL	any format	Service Parameter Value
SVCACK	B[1]	Service Acknowledge
ERRCODE	U1, U2, U4, or A	Error Code
ERRTEXT	A	Error Text

S14F22 - Generic Service Completion Acknowledge

<-S14F22
DATAACK

Parameters:

Parameter	Type	Description
DATAACK	B[1]	Data Acknowledge

S14F23 - Multi-block Generic Service Inquire

<-S14F23
{L[2]
  DATAID
  DATALENGTH
}

Parameters:

Parameter	Type	Description
DATAID	U1, U2, U4, or A	Data ID
DATALENGTH	U1, U2, U4	Data Length
		Comment: You are advised not to implement this message

S14F24 - Multi-block Generic Service Grant

S14F24->
GRANT

Parameters:

Parameter	Type	Description
GRANT	B[1]	Grant signal (0: Not granted, 1: Granted)

S14F25 - Service Name Request

<-S14F25
{L[2]
  OBJSPEC
  {L[n]
    OBJTYPE
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
OBJTYPE	ASCII	Object Type

S14F26 - Service Name Data

S14F26->
{L[2]
  {L[n]
    {L[2]
      OBJTYPE
      {L[a]
        SVCNAME
      }
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
OBJTYPE	ASCII	Object Type
SVCNAME	ASCII	Service Name
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S14F27 - Service Parameter Name Request

<-S14F27
{L[3]
  OBJSPEC
  OBJTYPE
  {L[n]
    SVCNAME
  }
}

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object Specification
OBJTYPE	ASCII	Object Type
SVCNAME	ASCII	Service Name

S14F28 - Service Parameter Name Data

S14F28->
{L[2]
  {L[n]
    {L[2]
      SVCNAME
      {L[a]
        SPNAME
      }
    }
  }
  {L[2]
    OBJACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
SVCNAME	ASCII	Service Name
SPNAME	ASCII	Service Parameter Name
OBJACK	B[1]	Object Acknowledge
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

Stream 15: Recipe Management

Purpose: Recipe management and control

Message	Direction	Description
S15F1	↔ Host/Equipment	Recipe Management Multi-Block Inquire
S15F2	↔ Host/Equipment	Recipe Management Multi-block Grant
S15F3	↔ Host/Equipment	Recipe Namespace Action Req
S15F4	↔ Host/Equipment	Recipe Namespace Action
S15F5	↔ Host/Equipment	Recipe Namespace Rename Req
S15F6	↔ Host/Equipment	Recipe Namespace Rename Ack
S15F7	↔ Host/Equipment	Recipe Space Req
S15F8	↔ Host/Equipment	Recipe Space Data
S15F9	↔ Host/Equipment	Recipe Status Request
S15F10	↔ Host/Equipment	Recipe Status Data
S15F11	↔ Host/Equipment	Recipe Version Request
S15F12	↔ Host/Equipment	Recipe Version Data
S15F13	↔ Host/Equipment	Recipe Create Req
S15F14	↔ Host/Equipment	Recipe Create Ack
S15F15	↔ Host/Equipment	Recipe Store Req
S15F16	↔ Host/Equipment	Recipe Store Ack
S15F17	↔ Host/Equipment	Recipe Retrieve Req
S15F18	↔ Host/Equipment	Recipe Retrieve Data
S15F19	↔ Host/Equipment	Recipe Rename Req
S15F20	↔ Host/Equipment	Recipe Rename Ack
S15F21	↔ Host/Equipment	Recipe Action Req
S15F22	↔ Host/Equipment	Recipe Action Ack
S15F23	↔ Host/Equipment	Recipe Descriptor Req
S15F24	↔ Host/Equipment	Recipe Descriptor Data
S15F25	↔ Host/Equipment	Recipe Parameter Update Req
S15F26	↔ Host/Equipment	Recipe Parameter Update Ack
S15F27	→ Host	Recipe Download Req
S15F28	← Equipment	Recipe Download Ack
S15F29	→ Host	Recipe Verify Req
S15F30	← Equipment	Recipe Verify Ack
S15F31	→ Host	Recipe Unload Req
S15F32	← Equipment	Recipe Unload Data
S15F33	→ Host	Recipe Select Req
S15F34	← Equipment	Recipe Select Ack
S15F35	→ Host	Recipe Delete Req
S15F36	← Equipment	Recipe Delete Ack
S15F37	↔ Host/Equipment	DRNS Segment Approve Action Req
S15F38	↔ Host/Equipment	DRNS Segment Approve Action Ack
S15F39	↔ Host/Equipment	DRNS Recorder Seg Req
S15F40	↔ Host/Equipment	DRNS Recorder Seg Ack
S15F41	↔ Host/Equipment	DRNS Recorder Mod Req
S15F42	↔ Host/Equipment	DRNS Recorder Mod Ack
S15F43	↔ Host/Equipment	DRNS Get Change Req
S15F44	↔ Host/Equipment	DRNS Get Change Ack
S15F45	↔ Host/Equipment	DRNS Mgr Seg Aprvl Req
S15F46	↔ Host/Equipment	DRNS Mgr Seg Aprvl Ack
S15F47	↔ Host/Equipment	DRNS Mgr Rebuild Req
S15F48	↔ Host/Equipment	DRNS Mgr Rebuild Ack
S15F49	→ Host	Large Recipe Download Req
S15F50	← Equipment	Large Recipe Download Ack
S15F51	→ Host	Large Recipe Upload Req
S15F52	← Equipment	Large Recipe Upload Ack
S15F53	← Equipment	Recipe Verification Send
S15F54	→ Host	Recipe Verification Ack

S15F1 - Recipe Management Multi-Block Inquire

Comment: E5 fails to mention the message type is optional for HSMS

S15F1-> or <-S15F1
{L[3]
  DATAID
  RCPSPEC
  RMDATASIZE
}

S15F2 - Recipe Management Multi-block Grant

S15F2-> or <-S15F2
  RMGRNT

S15F3 - Recipe Namespace Action Req

S15F3-> or <-S15F3
{L[2]
  RMNSSPEC
  RMNSCMD
}

S15F4 - Recipe Namespace Action

S15F4-> or <-S15F4
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S15F5 - Recipe Namespace Rename Req

S15F5-> or <-S15F5
{L[2]
  RMNSSPEC
  RMNEWNS
}

Parameters:

Parameter	Type	Description
RMNSSPEC	ASCII	Recipe namespace specification
RMNEWNS	ASCII	New namespace name

S15F6 - Recipe Namespace Rename Ack

S15F6-> or <-S15F6
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
RMACK	U1	Recipe management acknowledge code
ERRCODE	U1	Error code
ERRTEXT	ASCII	Error text description

S15F7 - Recipe Space Req

S15F7-> or <-S15F7
OBJSPEC

Parameters:

Parameter	Type	Description
OBJSPEC	ASCII	Object specification for recipe space

S15F8 - Recipe Space Data

S15F8-> or <-S15F8
{L[2]
  RMSPACE
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
RMSPACE	U4	Recipe space information
RMACK	U1	Recipe management acknowledge code
ERRCODE	U1	Error code
ERRTEXT	ASCII	Error text description

S15F9 - Recipe Status Request

S15F9-> or <-S15F9
RCPSPEC

Parameters:

Parameter	Type	Description
RCPSPEC	ASCII	Recipe specification

S15F10 - Recipe Status Data

S15F10-> or <-S15F10
{L[3]
  RCPSTAT
  RCPVERS
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
RCPSTAT	U1	Recipe status
RCPVERS	ASCII	Recipe version
RMACK	U1	Recipe management acknowledge code
ERRCODE	U1	Error code
ERRTEXT	ASCII	Error text description

S15F11 - Recipe Version Request

S15F11-> or <-S15F11
{L[4]
  RMNSSPEC
  RCPCLASS
  RCPNAME
  AGENT
}

Parameters:

Parameter	Type	Description
RMNSSPEC	ASCII	Recipe namespace specification
RCPCLASS	ASCII	Recipe class
RCPNAME	ASCII	Recipe name
AGENT	ASCII	Agent identifier

S15F12 - Recipe Version Data

S15F12-> or <-S15F12
{L[3]
  AGENT
  RCPVERS
  {L[2]
    RMACK
    {L[p]
      {L[2]
      ERRCODE
      ERRTEXT
      }
    }
  }
}

S15F13 - Recipe Create Req

{L[5]
  DATAID
  RCPUPDT
  RCPSPEC
  {L[n]
    {L[2]
      RCPATTRID
      RCPATTRDATA
    }
  }
  RCPBODY
}

S15F14 - Recipe Create Ack

{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S15F15 - Recipe Store Req

Comment: L[2]* can be L[2] or L:0; E5 documentation is inadequate for L[n] other than L[3]

{L[4]
  DATAID
  RCPSPEC
  RCPSECCODE
  {L[3]
    {L[2]*
      RCPSECNM
        {L[o]
          {L[2]
            RCPATTRID
            RCPATTRDATA
          }
        }
    }
    RCPBODY
    {L[n]
      {L[2]
          RCPSECNM
          {L[n]
            {L[2]
            RCPATTRID
            RCPATTRDATA
          }
        }
      }
    }
  }
}

S15F16 - Recipe Store Ack

{L[2]
  RCPSECCODE
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

S15F17 - Recipe Retrieve Req

{L[2]
  RCPSPEC
  RCPSECCODE
}

S15F18 - Recipe Retrieve Data

{L[2]
  {L[n]
    {L[n]
      RCPSECNM
      {L[n]
        {L[2]
          RCPATTRID
          RCPATTRDATA
          }
        }
      }
      RCPBODY
      {L[n]
        {L[2]
          RCPSECNM
          {L[n]
            {L[2]
            RCPATTRID
            RCPATTRDATA
            }
          }
        }
      }
    }
    {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

S15F19 - Recipe Rename Req

{L[3]
  RCPSPEC
  RCPRENAME
  RCPNEWID
}

S15F20 - Recipe Rename Ack

{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S15F21 - Recipe Action Req

{L[6]
  DATAID
  RCPCMD
  RMNSSPEC
  OPID
  AGENT
  {L[n]
    RCPID
  }
}

S15F22 - Recipe Action Ack

{L[4]
  AGENT
  LINKID
  RCPCMD
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

S15F23 - Recipe Descriptor Req

{L[3]
  DATAID
  OBJSPEC
  {L[n]
    RCPID
  }
}

S15F24 - Recipe Descriptor Data

{L[2]
  {L[n]
    {L[n]
      {L[3]*
        RCPDESCNM
        RCPDESCTIME
        RCPDESCLTH
      }
    }
  }
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

S15F25 - Recipe Parameter Update Req

{L[4]
  DATAID
  RMNSSPEC
  AGENT
  {L[n]
    {L[3]
      RCPPARNM
      RCPPARVAL
      RCPPARRULE
    }
  }
}

S15F26 - Recipe Parameter Update Ack

{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

S15F27 - Recipe Download Req

<-S15F27
{L[5]
  DATAID
  RCPOWCODE
  RCPSPEC
  {L[n]
    {L[2]
      RCPATTRID
      RCPATTRDATA
    }
  }
  RCPBODY
}

S15F28 - Recipe Download Ack

S15F28->
{L[3]
  RCPID
  {L[n]
    {L[2]
      RCPATTRID
      RCPATTRDATA
    }
  }
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

S15F29 - Recipe Verify Req

<-S15F29
{L[4]
  DATAID
  OPID
  RESPEC
  {L[n]
    RCPID
  }
}

S15F30 - Recipe Verify Ack

S15F30->
{L[5]
  OPID
  LINKID
  RCPID
  {L[n]
    {L[2]
      RCPATTRID
      RCPATTRDATA
    }
  }
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

S15F31 - Recipe Unload Req

<-S15F31
RCPSPEC

S15F32 - Recipe Unload Data

S15F32->
{L[4]
  RCPSPEC
  {L[n]
    {L[2]
      RCPATTRID
      RCPATTRDATA
    }
  }
  RCPBODY
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

S15F33 - Recipe Select Req

<-S15F33
{L[3]
  DATAID
  RESPEC
  {L[m]
    {L[2]
      RCPID
      {L[p]
        {L[2]
          RCPPARNM
          RCPPARVAL
        }
      }
    }
  }
}

S15F34 - Recipe Select Acknowledge

S15F34->
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F35 - Recipe Delete Request

<-S15F35
{L[4]
  DATAID
  RESPEC
  RCPDEL
  {L[n]
    RCPID
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
RESPEC	A	Recipe Specification
RCPDEL	B[1]	Recipe Delete 0: Delete 1: Keep
RCPID	A	Recipe ID

S15F36 - Recipe Delete Acknowledge

S15F36->
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F37 - DRNS Segment Approve Action Request

S15F37-> or <-S15F37
{L[6]
  RMSEGSPEC
  OBJTOKEN
  RMGRNT
  OPID
  RCPID
  RMCHGTYPE
}

Parameters:

Parameter	Type	Description
RMSEGSPEC	A	Recipe Management Segment Specification
OBJTOKEN	A	Object Token
RMGRNT	B[1]	Recipe Management Grant 0: Granted 1: Not granted
OPID	A	Operation ID
RCPID	A	Recipe ID
RMCHGTYPE	A	Recipe Management Change Type

S15F38 - DRNS Segment Approve Action Acknowledge

S15F38-> or <-S15F38
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F39 - DRNS Recorder Segment Request

S15F39-> or <-S15F39
{L[5]
  DATAID
  RMNSCMD
  RMRECSPEC
  RMSEGSPEC
  OBJTOKEN
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
RMNSCMD	A	Recipe Management Namespace Command
RMRECSPEC	A	Recipe Management Recorder Specification
RMSEGSPEC	A	Recipe Management Segment Specification
OBJTOKEN	A	Object Token

S15F40 - DRNS Recorder Segment Acknowledge

S15F40-> or <-S15F40
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F41 - DRNS Recorder Module Request

S15F41-> or <-S15F41
{L[5]
  DATAID
  RMRECSPEC
  OBJTOKEN
  RMNSCMD
  {L[c]
    RCPID
    RCPNEWID
    RMSEGSPEC
    RMCHGTYPE
    OPID
    TIMESTAMP
    RMREQUESTOR
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
RMRECSPEC	A	Recipe Management Recorder Specification
OBJTOKEN	A	Object Token
RMNSCMD	A	Recipe Management Namespace Command
RCPID	A	Recipe ID
RCPNEWID	A	Recipe New ID
RMSEGSPEC	A	Recipe Management Segment Specification
RMCHGTYPE	A	Recipe Management Change Type
OPID	A	Operation ID
TIMESTAMP	A	Time Stamp
RMREQUESTOR	A	Recipe Management Requestor

S15F42 - DRNS Recorder Module Acknowledge

S15F42-> or <-S15F42
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F43 - DRNS Get Change Request

S15F43-> or <-S15F43
{L[3]
  DATAID
  OBJSPEC
  TARGETSPEC
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
OBJSPEC	A	Object Specification
TARGETSPEC	A	Target Specification

S15F44 - DRNS Get Change Acknowledge

S15F44-> or <-S15F44
{L[2]
  {L[n]
    {L[7]
      RCPID
      RCPNEWID
      RMSEGSPEC
      RMCHGTYPE
      OPID
      TIMESTAMP
      RMREQUESTOR
    }
  }
  {L[2]
    RMACK
    {L[p]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
RCPID	A	Recipe ID
RCPNEWID	A	Recipe New ID
RMSEGSPEC	A	Recipe Management Segment Specification
RMCHGTYPE	A	Recipe Management Change Type
OPID	A	Operation ID
TIMESTAMP	A	Time Stamp
RMREQUESTOR	A	Recipe Management Requestor
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F45 - DRNS Manager Segment Approval Request

S15F45-> or <-S15F45
{L[4]
  DATAID
  RCPSPEC
  RCPNEWID
  RMCHGTYPE
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
RCPSPEC	A	Recipe Specification
RCPNEWID	A	Recipe New ID
RMCHGTYPE	A	Recipe Management Change Type

S15F46 - DRNS Manager Segment Approval Acknowledge

S15F46-> or <-S15F46
{L[3]
  RMCHGTYPE
  RMGRNT
  OPID
}

Parameters:

Parameter	Type	Description
RMCHGTYPE	A	Recipe Management Change Type
RMGRNT	B[1]	Recipe Management Grant 0: Granted 1: Not granted
OPID	A	Operation ID

S15F47 - DRNS Manager Rebuild Request

S15F47-> or <-S15F47
{L[5]
  DATAID
  OBJSPEC
  RMNSSPEC
  RMRECSPEC
  {L[n]
    RMSEGSPEC
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
OBJSPEC	A	Object Specification
RMNSSPEC	A	Recipe Management Namespace Specification
RMRECSPEC	A	Recipe Management Recorder Specification
RMSEGSPEC	A	Recipe Management Segment Specification

S15F48 - DRNS Manager Rebuild Acknowledge

S15F48-> or <-S15F48
{L[2]
  RMACK
  {L[p]
    {L[2]
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F49 - Large Recipe Download Request

S15F49-> or <-S15F49
{L[2]
  DSNAME
  RCPOWCODE
}

Parameters:

Parameter	Type	Description
DSNAME	A	Data Set Name - The RCPSPEC for Stream 13 transfer
RCPOWCODE	A	Recipe Owner Code

S15F50 - Large Recipe Download Acknowledge

S15F50-> or <-S15F50
ACKC15

Parameters:

Parameter	Type	Description
ACKC15	B[1]	Acknowledge Code 0: Acknowledged 1: Error

S15F51 - Large Recipe Upload Request

S15F51-> or <-S15F51
DSNAME

Parameters:

Parameter	Type	Description
DSNAME	A	Data Set Name - The RCPSPEC used in Stream 13

S15F52 - Large Recipe Upload Acknowledge

S15F52-> or <-S15F52
ACKC15

Parameters:

Parameter	Type	Description
ACKC15	B[1]	Acknowledge Code 0: Acknowledged 1: Error

S15F53 - Recipe Verification Send

S15F53->
{L[3]
  RCPSPEC
  RCPID
  {L[2]
    RMACK
    {L[n]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
RCPSPEC	A	Recipe Specification
RCPID	A	Recipe ID
RMACK	B[1]	Recipe Management Acknowledge 0: Acknowledged 1: Error
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	A	Error Text

S15F54 - Recipe Verification Acknowledge

<-S15F54
{}

Parameters:

Parameter	Type	Description
-	-	Empty message (header only)

Stream 16: Process Job Management

Purpose: Process job creation, control, and management

Message	Direction	Description
S16F1	→ Equipment	Process Job Data MBI
S16F2	← Equipment	PJD MBI Grant
S16F3	→ Equipment	Process Job Create Req
S16F4	← Equipment	Process Job Create Ack
S16F5	→ Equipment	Process Job Cmd Req
S16F6	← Equipment	Process Job Cmd Ack
S16F7	← Equipment	Process Job Alert Notify
S16F8	→ Equipment	Process Job Alert Ack
S16F9	← Equipment	Process Job Event Notify
S16F10	→ Equipment	Process Job Event Ack
S16F11	→ Equipment	PRJobCreateEnh
S16F12	← Equipment	PRJobCreateEnh Ack
S16F15	→ Equipment	PRJobMultiCreate
S16F16	← Equipment	PRJobMultiCreate Ack
S16F17	→ Equipment	PRJobDequeue
S16F18	← Equipment	PRJobDequeue Ack
S16F19	→ Equipment	PRJob List Req
S16F20	← Equipment	PRJob List Data
S16F21	→ Equipment	PRJob Create Limit Req
S16F22	← Equipment	PRJob Create Limit Data
S16F23	→ Equipment	PRJob Recipe Variable Set
S16F24	← Equipment	PRJob Recipe Variable Ack
S16F25	→ Equipment	PRJob Start Method Set
S16F26	← Equipment	PRJob Start Method Ack
S16F27	→ Equipment	Control Job Command
S16F28	← Equipment	Control Job Command Ack
S16F29	→ Equipment	PRSetMtrlOrder
S16F30	← Equipment	PRSetMtrlOrder Ack

S16F1 - Process Job Data MBI

<-S16F1
{L[2]
  DATAID
  DATALENGTH
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
DATALENGTH	U1/U2/U4	Data Length

S16F2 - PJD MBI Grant

S16F2->
GRANT

Parameters:

Parameter	Type	Description
GRANT	B[1]	Grant Code (0: Granted, 1: Busy, try again, 2: No space)

S16F3 - Process Job Create Req

<-S16F3
{L[5]
  DATAID
  MF
  {L[n]
    MID
  }
  {L[3]
    PRRECIPEMETHOD
    RCPSPEC
    {L[m]
      {L[2]
        RCPPARNM
        RCPPARVAL
      }
    }
  }
  PRPROCESSSTART
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
MF	U1	Material Format
MID	ASCII	Material ID
PRRECIPEMETHOD	ASCII	Process Recipe Method
RCPSPEC	ASCII	Recipe Specification
RCPPARNM	ASCII	Recipe Parameter Name
RCPPARVAL	Any	Recipe Parameter Value
PRPROCESSSTART	ASCII	Process Process Start

S16F4 - Process Job Create Ack

S16F4->
{L[2]
  PRJOBID
  {L[2]
    ACKA
    {L[n]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
PRJOBID	ASCII	Process Job ID
ACKA	B[1]	Acknowledge Code (0: Acknowledged, 1: Error)
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S16F5 - Process Job Cmd Req

<-S16F5
{L[4]
  DATAID
  PRJOBID
  PRCMDNAME
  {L[n]
    {L[2]
      CPNAME
      CPVAL
    }
  }
}

Parameters:

Parameter	Type	Description
DATAID	U1/U2/U4/A	Data ID
PRJOBID	ASCII	Process Job ID
PRCMDNAME	ASCII	Process Command Name
CPNAME	ASCII	Command Parameter Name
CPVAL	Any	Command Parameter Value

S16F6 - Process Job Cmd Ack

S16F6->
{L[2]
  PRJOBID
  {L[2]
    ACKA
    {L[n]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
PRJOBID	ASCII	Process Job ID
ACKA	B[1]	Acknowledge Code (0: Acknowledged, 1: Error)
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S16F7 - Process Job Alert Notify

S16F7->
{L[4]
  TIMESTAMP
  PRJOBID
  PRJOBMILESTONE
  {L[2]
    ACKA
    {L[n]
      {L[2]
        ERRCODE
        ERRTEXT
      }
    }
  }
}

Parameters:

Parameter	Type	Description
TIMESTAMP	ASCII	Timestamp
PRJOBID	ASCII	Process Job ID
PRJOBMILESTONE	ASCII	Process Job Milestone
ACKA	B[1]	Acknowledge Code (0: Acknowledged, 1: Error)
ERRCODE	U1/U2/U4/A	Error Code
ERRTEXT	ASCII	Error Text

S16F8 - Process Job Alert Ack

{}

S16F9 - Process Job Event Notify

{L[4] PREVENTID TIMESTAMP PRJOBID {L[n] {L[2] VID V } } }

Parameters:

Parameter	Type	Description
PREVENTID	A	Process Event ID
TIMESTAMP	A	Timestamp
PRJOBID	A	Process Job ID
VID	U1/U2/U4/A	Variable ID
V	any format	Variable Value

S16F10 - Process Job Event Ack

{}

Parameters:

Parameter	Type	Description
-	-	No parameters required

S16F11 - Recipe Upload Send

{L[3]
  EQUIPMENTID
  RECIPETYPE
  RECIPEDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
RECIPEDATA	any format	Recipe Data

S16F12 - Recipe Upload Acknowledge

{L[2]
  EQUIPMENTID
  ACKC16
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
ACKC16	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Invalid recipe type
		3: Equipment not found

S16F13 - Recipe Download Request

{L[2]
  EQUIPMENTID
  RECIPETYPE
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type

S16F14 - Recipe Download Response

{L[3]
  EQUIPMENTID
  RECIPETYPE
  RECIPEDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
RECIPEDATA	any format	Recipe Data

S16F15 - Recipe Download Send

{L[3]
  EQUIPMENTID
  RECIPETYPE
  RECIPEDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
RECIPEDATA	any format	Recipe Data

S16F16 - Recipe Download Acknowledge

{L[2]
  EQUIPMENTID
  ACKC16
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
ACKC16	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Invalid recipe type
		3: Equipment not found

S16F17 - Recipe Validate Request

{L[3]
  EQUIPMENTID
  RECIPETYPE
  RECIPEDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
RECIPEDATA	any format	Recipe Data

S16F18 - Recipe Validate Response

{L[3]
  EQUIPMENTID
  VALRESULT
  {L[n]
    ERROR_1
    ERROR_2
    ...
    ERROR_n
  }
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
VALRESULT	B[1]	Validation Result
		0: Valid
		1: Invalid
ERROR	A	Validation Error

S16F19 - Recipe Validate Send

{L[3]
  EQUIPMENTID
  RECIPETYPE
  RECIPEDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
RECIPEDATA	any format	Recipe Data

S16F20 - Recipe Validate Acknowledge

{L[2]
  EQUIPMENTID
  ACKC16
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
ACKC16	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Invalid recipe type
		3: Equipment not found

S16F21 - Recipe Compress Request

{L[3]
  EQUIPMENTID
  RECIPETYPE
  RECIPEDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
RECIPEDATA	any format	Recipe Data

S16F22 - Recipe Compress Response

{L[3]
  EQUIPMENTID
  RECIPETYPE
  COMPRESSEDDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
COMPRESSEDDATA	B	Compressed Data

S16F23 - Recipe Compress Send

{L[3]
  EQUIPMENTID
  RECIPETYPE
  COMPRESSEDDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
COMPRESSEDDATA	B	Compressed Data

S16F24 - Recipe Compress Acknowledge

{L[2]
  EQUIPMENTID
  ACKC16
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
ACKC16	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Invalid recipe type
		3: Equipment not found

S16F25 - Recipe Encrypt Request

{L[3]
  EQUIPMENTID
  RECIPETYPE
  RECIPEDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
RECIPEDATA	any format	Recipe Data

S16F26 - Recipe Encrypt Response

{L[3]
  EQUIPMENTID
  RECIPETYPE
  ENCRYPTEDDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
ENCRYPTEDDATA	B	Encrypted Data

S16F27 - Recipe Encrypt Send

{L[3]
  EQUIPMENTID
  RECIPETYPE
  ENCRYPTEDDATA
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
RECIPETYPE	U1	Recipe Type
ENCRYPTEDDATA	B	Encrypted Data

S16F28 - Recipe Encrypt Acknowledge

{L[2]
  EQUIPMENTID
  ACKC16
}

Parameters:

Parameter	Type	Description
EQUIPMENTID	A	Equipment ID
ACKC16	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Invalid recipe type
		3: Equipment not found

S16F29 - PRSetMtrlOrder

PRMTRLORDER

Parameters:

Parameter	Type	Description
PRMTRLORDER	U2	Process Material Order

S16F30 - PRSetMtrlOrder Ack

ACKA

Parameters:

Parameter	Type	Description
ACKA	B[1]	Acknowledge Code
		0: Acknowledged
		1: Error
		2: Invalid material order
		3: Process not found

Stream 17: Data Report Management

Purpose: Data report and trace management

Message	Direction	Description
S17F1	→ Equipment	Data Report Create Request
S17F2	← Equipment	Data Report Create Acknowledgment
S17F3	→ Equipment	Data Report Delete Request
S17F4	← Equipment	Data Report Delete Acknowledgment
S17F5	→ Equipment	Trace Create Request
S17F6	← Equipment	Trace Create Acknowledgment
S17F7	→ Equipment	Trace Delete Request
S17F8	← Equipment	Trace Delete Acknowledgment
S17F9	→ Equipment	Collection Event Link Request
S17F10	← Equipment	Collection Event Link Acknowledgment
S17F11	→ Equipment	Collection Event Unlink Request
S17F12	← Equipment	Collection Event Unlink Acknowledgment
S17F13	→ Equipment	Trace Reset Request
S17F14	← Equipment	Trace Reset Acknowledgment

S17F1 - Data Report Create Request

<-S17F1
{L[4]
  DATAID
  RPTID
  DATASRC
  {L[n]
    VID
  }
}

Parameters:

Parameter	Type	Description
DATAID	U4	Data ID
RPTID	U4	Report ID
DATASRC	A	Data Source
VID	U4	Variable ID

S17F2 - Data Report Create Acknowledgment

S17F2->
{L[2]
  RPTID
  ERRCODE
}

Parameters:

Parameter	Type	Description
RPTID	U4	Report ID
ERRCODE	U4	Error Code

S17F3 - Data Report Delete Request

<-S17F3
{L[n]
  RPTID
}

Parameters:

Parameter	Type	Description
RPTID	U4	Report ID
		L:0 means delete all reports

S17F4 - Data Report Delete Acknowledgment

S17F4->
{L[2]
  ACKA
  {L[n]
    {L[3]
      RPTID
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
ACKA	U4	Acknowledge Code
RPTID	U4	Report ID
ERRCODE	U4	Error Code
ERRTEXT	A	Error Text

S17F5 - Trace Create Request

<-S17F5
{L[6]
  DATAID
  TRID
  CEED
  {L[n]
    RPTID
  }
  {L[8]
    TOTSMP
    REPGSZ
    EVNTSRC
    CEIDSTART
    EVNTSRC2
    CEIDSTOP
    TRAUTOD
    RPTOC
  }
}

Parameters:

Parameter	Type	Description
DATAID	U4	Data ID
TRID	U4	Trace ID
CEED	B[1]	Collection Event Enable/Disable
RPTID	U4	Report ID
TOTSMP	U4	Total Samples
REPGSZ	U4	Report Group Size
EVNTSRC	A	Event Source
CEIDSTART	U4	Collection Event ID Start
EVNTSRC2	A	Event Source 2
CEIDSTOP	U4	Collection Event ID Stop
TRAUTOD	B[1]	Trace Auto Delete
RPTOC	B[1]	Report On Change
		We recommend the host always provides the L:8 values

S17F6 - Trace Create Acknowledgment

S17F6->
{L[2]
  TRID
  ERRCODE
}

Parameters:

Parameter	Type	Description
TRID	U4	Trace ID
ERRCODE	U4	Error Code

S17F7 - Trace Delete Request

<-S17F7
{L[n]
  TRID
}

Parameters:

Parameter	Type	Description
TRID	U4	Trace ID

Note: Surprisingly, L:0 is not specified as a means to indicate all, but this feature has to be provided because there is no means to discover the existing traces.

S17F8 - Trace Delete Acknowledgment

S17F8->
{L[2]
  ACKA
  {L[n]
    {L[3]
      TRID
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
ACKA	U4	Acknowledge Code
TRID	U4	Trace ID
ERRCODE	U4	Error Code
ERRTEXT	ASCII	Error Text

S17F9 - Collection Event Link Request

<-S17F9
{L[4]
  DATAID
  EVNTSRC
  CEID
  {L[n]
    RPTID
  }
}

Parameters:

Parameter	Type	Description
DATAID	U4	Data ID
EVNTSRC	ASCII	Event Source
CEID	U4	Collection Event ID
RPTID	U4	Report ID

S17F10 - Collection Event Link Acknowledgment

{L[3]
  EVNTSRC
  CEID
  ERRCODE
}

Parameters:

Parameter	Type	Description
EVNTSRC	ASCII	Event Source
CEID	U4	Collection Event ID
ERRCODE	U4	Error Code

S17F11 - Collection Event Unlink Request

{L[3]
  EVNTSRC
  CEID
  RPTID
}

Parameters:

Parameter	Type	Description
EVNTSRC	ASCII	Event Source
CEID	U4	Collection Event ID
RPTID	U4	Report ID

S17F12 - Collection Event Unlink Acknowledgment

{L[4]
  EVNTSRC
  CEID
  RPTID
  ERRCODE
}

Parameters:

Parameter	Type	Description
EVNTSRC	ASCII	Event Source
CEID	U4	Collection Event ID
RPTID	U4	Report ID
ERRCODE	U4	Error Code

S17F13 - Trace Reset Request

{L[n]
TRID
}

Parameters:

Parameter	Type	Description
TRID	U4	Trace ID

S17F14 - Trace Reset Acknowledgment

{L[2]
  ACKA
  {L[n]
    {L[3]
      TRID
      ERRCODE
      ERRTEXT
    }
  }
}

Parameters:

Parameter	Type	Description
ACKA	U4	Acknowledge Code
TRID	U4	Trace ID
ERRCODE	U4	Error Code
ERRTEXT	ASCII	Error Text

Stream 18: Subsystem Management

Purpose: Subsystem attribute and data management

Message	Direction	Description
S18F1	→ Equipment	Read Attribute Request
S18F2	← Equipment	Read Attribute Data
S18F3	→ Equipment	Write Attribute Request
S18F4	← Equipment	Write Attribute Acknowledgment
S18F5	→ Equipment	Read Request
S18F6	← Equipment	Read Data
S18F7	→ Equipment	Write Data Request
S18F8	← Equipment	Write Data Acknowledgment
S18F9	→ Equipment	Read ID Request
S18F10	← Equipment	Read ID Data
S18F11	→ Equipment	Write ID Request
S18F12	← Equipment	Write ID Acknowledgment
S18F13	→ Equipment	Subsystem Command
S18F14	← Equipment	Subsystem Command Acknowledgment
S18F15	→ Equipment	Read 2D Code Condition Request
S18F16	← Equipment	Read 2D Code Condition Data

S18F1 - Read Attribute Request

<-S18F1
{L[2]
  TARGETID
  {L[n]
    ATTRID
  }
}

Parameters:

Parameter	Type	Description
TARGETID	ASCII	Target ID
ATTRID	ASCII	Attribute ID

S18F2 - Read Attribute Data

S18F2->
{L[4]
  TARGETID
  SSACK
  {L[n]
    ATTRDATA
  }
  {L[n]
    STATUS
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
ATTRDATA	any format	Attribute Data
STATUS	A	Status
		Comment: E5 differs from OEM tools

S18F3 - Write Attribute Request

<-S18F3
{L[2]
  TARGETID
  {L[n]
    {L[2]
      ATTRID
      ATTRDATA
    }
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
ATTRID	A	Attribute ID
ATTRDATA	any format	Attribute Data

S18F4 - Write Attribute Acknowledgment

S18F4->
{L[3]
  TARGETID
  SSACK
  {L[n]
    STATUS
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
STATUS	A	Status
		Comment: Fixed E5 mistake

S18F5 - Read Request

<-S18F5
{L[3]
  TARGETID
  DATASEG
  DATALENGTH
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
DATASEG	A	Data Segment
DATALENGTH	U4	Data Length

S18F6 - Read Data

S18F6->
{L[4]
  TARGETID
  SSACK
  DATA
  {L[n]
    STATUS
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
DATA	any format	Data
STATUS	A	Status

S18F7 - Write Data Request

<-S18F7
{L[4]
  TARGETID
  DATASEG
  DATALENGTH
  DATA
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
DATASEG	A	Data Segment
DATALENGTH	U4	Data Length
DATA	any format	Data

S18F8 - Write Data Acknowledgment

S18F8->
{L[3]
  TARGETID
  SSACK
  {L[n]
    STATUS
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
STATUS	A	Status

S18F9 - Read ID Request

<-S18F9
TARGETID

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID

S18F10 - Read ID Data

S18F10->
{L[4]
  TARGETID
  SSACK
  MID
  {L[n]
    STATUS
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
MID	A	Module ID
STATUS	A	Status

S18F11 - Write ID Request

<-S18F11
{L[2]
  TARGETID
  MID
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
MID	A	Module ID

S18F12 - Write ID Acknowledgment

S18F12->
{L[3]
  TARGETID
  SSACK
  {L[n]
    STATUS
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
STATUS	A	Status

S18F13 - Subsystem Command

<-S18F13
{L[3]
  TARGETID
  SSCMD
  {L[n]
    CPVAL
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSCMD	A	Subsystem Command
CPVAL	any format	Command Parameter Value

S18F14 - Subsystem Command Acknowledgment

S18F14->
{L[3]
  TARGETID
  SSACK
  {L[n]
    STATUS
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
STATUS	A	Status

S18F15 - Read 2D Code Condition Request

<-S18F15
TARGETID

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID

S18F16 - Read 2D Code Condition Data

S18F16->
{L[5]
  TARGETID
  SSACK
  MID
  {L[n]
    STATUS
  }
  {L[n]
    CONDITION
  }
}

Parameters:

Parameter	Type	Description
TARGETID	A	Target ID
SSACK	U4	Subsystem Acknowledge
MID	A	Module ID
STATUS	A	Status
CONDITION	A	Condition

Stream 19: Inventory Management

Purpose: Equipment and material inventory tracking

Message	Direction	Description
S19F1	→ Equipment	Inventory Request
S19F2	← Equipment	Inventory Response
S19F3	→ Equipment	Inventory Update
S19F4	← Equipment	Inventory Update Response
S19F5	→ Equipment	Inventory Add Request
S19F6	← Equipment	Inventory Add Response
S19F7	→ Equipment	Inventory Remove Request
S19F8	← Equipment	Inventory Remove Response
S19F9	→ Equipment	Inventory Status Request
S19F10	← Equipment	Inventory Status Response
S19F11	→ Equipment	Inventory Move Request
S19F12	← Equipment	Inventory Move Response
S19F13	→ Equipment	Inventory Search Request
S19F14	← Equipment	Inventory Search Response
S19F15	→ Equipment	Inventory Lock Request
S19F16	← Equipment	Inventory Lock Response
S19F17	→ Equipment	Inventory History Request
S19F18	← Equipment	Inventory History Response
S19F19	→ Equipment	Inventory Audit Request
S19F20	← Equipment	Inventory Audit Response

S19F1 - Inventory Request

<-S19F1
{L[n]
  INVTYPE_1
  INVTYPE_2
  ...
  INVTYPE_n
}

Parameters:

Parameter	Type	Description
INVTYPE	ASCII	Inventory Type

S19F2 - Inventory Response

S19F2->
{L[n]
  {L[3]
    INVTYPE
    INVID
    INVDATA
  }
}

Parameters:

Parameter	Type	Description
INVTYPE	ASCII	Inventory Type
INVID	ASCII	Inventory ID
INVDATA	Any	Inventory Data

S19F3 - Inventory Update

<-S19F3
{L[3]
  INVTYPE
  INVID
  INVDATA
}

Parameters:

Parameter	Type	Description
INVTYPE	ASCII	Inventory Type
INVID	ASCII	Inventory ID
INVDATA	Any	Inventory Data

S19F4 - Inventory Update Response

S19F4->
{L[2]
  INVID
  ACKC19
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
ACKC19	U1	Acknowledge Code

S19F5 - Inventory Add Request

<-S19F5
{L[4]
  INVTYPE
  INVID
  INVDATA
  LOCATION
}

Parameters:

Parameter	Type	Description
INVTYPE	ASCII	Inventory Type
INVID	ASCII	Inventory ID
INVDATA	Any	Inventory Data
LOCATION	ASCII	Location

S19F6 - Inventory Add Response

S19F6->
{L[2]
  INVID
  ACKC19
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
ACKC19	U1	Acknowledge Code

S19F7 - Inventory Remove Request

<-S19F7
{L[2]
  INVTYPE
  INVID
}

Parameters:

Parameter	Type	Description
INVTYPE	ASCII	Inventory Type
INVID	ASCII	Inventory ID

S19F8 - Inventory Remove Response

S19F8->
{L[2]
  INVID
  ACKC19
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
ACKC19	U1	Acknowledge Code

S19F9 - Inventory Status Request

<-S19F9
INVID

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID

S19F10 - Inventory Status Response

S19F10->
{L[4]
  INVID
  INVSTATUS
  LOCATION
  INVDATA
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
INVSTATUS	U1	Inventory Status
LOCATION	ASCII	Location
INVDATA	Any	Inventory Data

S19F11 - Inventory Move Request

<-S19F11
{L[3]
  INVID
  SRCLOCATION
  DESTLOCATION
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
SRCLOCATION	ASCII	Source Location
DESTLOCATION	ASCII	Destination Location

S19F12 - Inventory Move Response

S19F12->
{L[2]
  INVID
  ACKC19
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
ACKC19	U1	Acknowledge Code

S19F13 - Inventory Search Request

<-S19F13
{L[n]
  SEARCHCRITERIA
}

Parameters:

Parameter	Type	Description
SEARCHCRITERIA	ASCII	Search Criteria

S19F14 - Inventory Search Response

S19F14->
{L[n]
  {L[3]
    INVID
    LOCATION
    INVDATA
  }
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
LOCATION	ASCII	Location
INVDATA	Any	Inventory Data

S19F15 - Inventory Lock Request

<-S19F15
{L[2]
  INVID
  LOCKTYPE
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
LOCKTYPE	U1	Lock Type

S19F16 - Inventory Lock Response

S19F16->
{L[2]
  INVID
  LOCKSTATUS
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
LOCKSTATUS	U1	Lock Status

S19F17 - Inventory History Request

<-S19F17
{L[3]
  INVID
  STARTTIME
  ENDTIME
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
STARTTIME	ASCII	Start Time
ENDTIME	ASCII	End Time

S19F18 - Inventory History Response

S19F18->
{L[n]
  {L[4]
    INVID
    TIMESTAMP
    ACTION
    DETAILS
  }
}

Parameters:

Parameter	Type	Description
INVID	ASCII	Inventory ID
TIMESTAMP	ASCII	Timestamp
ACTION	ASCII	Action
DETAILS	ASCII	Details

S19F19 - Inventory Audit Request

<-S19F19
{L[2]
  AUDITTYPE
  AUDITPARAMS
}

Parameters:

Parameter	Type	Description
AUDITTYPE	U1	Audit Type
AUDITPARAMS	ASCII	Audit Parameters

S19F20 - Inventory Audit Response

S19F20->
{L[2]
  AUDITSTATUS
  AUDITRESULTS
}

Parameters:

Parameter	Type	Description
AUDITSTATUS	U1	Audit Status
AUDITRESULTS	ASCII	Audit Results

Stream 20: Substrate Transfer (SEMI-E157)

Purpose: Advanced substrate transfer operations

Message	Direction	Description
S20F1	→ Equipment	Transfer Request
S20F2	← Equipment	Transfer Response
S20F3	→ Equipment	Transfer Pause
S20F4	← Equipment	Transfer Pause Response
S20F5	→ Equipment	Transfer Resume
S20F6	← Equipment	Transfer Resume Response
S20F7	→ Equipment	Transfer Abort
S20F8	← Equipment	Transfer Abort Response
S20F9	→ Equipment	Transfer Status
S20F10	← Equipment	Transfer Resume Response
S20F11	→ Equipment	Transfer Queue Request
S20F12	← Equipment	Transfer Queue Response
S20F13	→ Equipment	Transfer Priority Request
S20F14	← Equipment	Transfer Priority Response
S20F15	→ Equipment	Transfer Route Request
S20F16	← Equipment	Transfer Route Response
S20F17	→ Equipment	Transfer Schedule Request
S20F18	← Equipment	Transfer Schedule Response
S20F19	→ Equipment	Transfer Log Request

S20F1 - SetSRO Attributes Request

<-S20F1
{L[6]
  OBJID
  OBJTYPE
  AUTOPOST_DISABLE
  AUTOCLEAR_DISABLE
  RETAINRECIPE_DISABLE
  AUTOCLOSE
}

S20F2 - SetSRO Attributes Acknowledge

S20F2->
SSAACK

S20F3 - GetOperationIDList Request

<-S20F3
{L[3]
  OBJID
  OBJTYPE
  OPETYPE
}

S20F4 - GetOperationIDList Acknowledge

S20F4->
{L[2]
  {L[n]
    OPEID
  }
  GOILACK
}

S20F5 - OpenConnectionEvent Send

<-S20F5
{L[7]
  OBJID
  OBJTYPE
  OPETYPE
  RMSUSERID
  RMSPWD
  EQUSERID
  OPEID
}

S20F6 - OpenConnectionEvent Acknowledge

S20F6->
{L[2]
  OPEID
  OCEACK
}

S20F7 - CloseConnectionEvent Send

<-S20F7
{L[4]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
}

S20F8 - CloseConnectionEvent Acknowledge

<-S20F8
{L[2]
  OPEID
  CCEACK
}

S20F9 - ClearOperation Request

<-S20F9
{L[4]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
}

S20F10 - ClearOperation Acknowledge

S20F10->
COACK

S20F11 - GetRecipeXIDList Request

<-S20F11
{L[4]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
}

S20F12 - GetRecipeXIDList Acknowledge

S20F12->
{L[2]
{L[n]
    {L[9]
    TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
    }
  }
  GRXLACK
}

S20F13 - DeleteRecipe Request

<-S20F13
{L[5]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  {L[9]
    TIMESTAMP
    OPEID
    ASSGNID
    COPYID
    REVID
    RecID
    VERID
    TYPEID
    EQID
  }
}

S20F14 - DeleteRecipe Acknowledge

S20F14->
DRRACK

S20F15 - WriteRecipe Request

<-S20F15
{L[5]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  {L[n]
    {L[10]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
      RCPBODYA
    }
  }
}

S20F16 - WriteRecipe Acknowledge

S20F16->
WRACK

S20F17 - ReadRecipe Request

<-S20F17
{L[5]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  {L[n]
    {L[9]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
    }
  }
}

S20F18 - ReadRecipe Acknowledge

S20F18->
{L[2]
  {L[n]
    {L[10]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
      RCPBODYA
    }
  }
  RRACK_S20
}

Parameters:

Parameter	Type	Description
TIMESTAMP	ASCII	Timestamp
OPEID	ASCII	Operation ID
ASSGNID	ASCII	Assignment ID
COPYID	ASCII	Copy ID
REVID	ASCII	Revision ID
RecID	ASCII	Recipe ID
VERID	ASCII	Version ID
TYPEID	ASCII	Type ID
EQID	ASCII	Equipment ID
RCPBODYA	ASCII	Recipe body data
RRACK_S20	U1	Read recipe acknowledge code

S20F19 - QueryRecipeXIDList Event Send

S20F19->
{L[4]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
OPETYPE	ASCII	Operation type
OPEID	ASCII	Operation ID

S20F20 - QueryRecipeXIDList Event Acknowledge

<-S20F20
{L[3]
  OPEID
  {L[n]
    {L[9]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
    }
  }
  QRXLEACK
}

Parameters:

Parameter	Type	Description
OPEID	ASCII	Operation ID
TIMESTAMP	ASCII	Timestamp
ASSGNID	ASCII	Assignment ID
COPYID	ASCII	Copy ID
REVID	ASCII	Revision ID
RecID	ASCII	Recipe ID
VERID	ASCII	Version ID
TYPEID	ASCII	Type ID
EQID	ASCII	Equipment ID
QRXLEACK	U1	Query recipe XID list event acknowledge

S20F21 - QueryRecipe Event Send

S20F21->
{L[5]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  {L[n]
    {L[9]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
    }
  }
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
OPETYPE	ASCII	Operation type
OPEID	ASCII	Operation ID
TIMESTAMP	ASCII	Timestamp
ASSGNID	ASCII	Assignment ID
COPYID	ASCII	Copy ID
REVID	ASCII	Revision ID
RecID	ASCII	Recipe ID
VERID	ASCII	Version ID
TYPEID	ASCII	Type ID
EQID	ASCII	Equipment ID

S20F22 - QueryRecipe Event Acknowledge

<-S20F22
QREACK

Parameters:

Parameter	Type	Description
QREACK	U1	Query recipe event acknowledge

S20F23 - PostRecipe Event Send

S20F23->
{L[5]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  PRJOBID
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
OPETYPE	ASCII	Operation type
OPEID	ASCII	Operation ID
PRJOBID	ASCII	Process job ID

S20F24 - PostRecipe Event Acknowledge

<-S20F24
PREACK

Parameters:

Parameter	Type	Description
PREACK	U1	Post recipe event acknowledge

S20F25 - SetPRC Attributes Request

<-S20F25
{L[5]
  OBJID
  OBJTYPE
  {L[n]
    MAXNUMBER
  }
  MAXTIME
  PRCPREEXECHK
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
MAXNUMBER	U4	Maximum number
MAXTIME	U4	Maximum time
PRCPREEXECHK	U1	Recipe pre-execution check

S20F26 - SetPRC Attributes Acknowledge

S20F26->
SPAACK

Parameters:

Parameter	Type	Description
SPAACK	U1	Set PRC attributes acknowledge

S20F27 - PreSpecifyRecipe Request

<-S20F27
{L[6]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  PRJOBID
  {L[n]
    {L[9]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
    }
  }
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
OPETYPE	ASCII	Operation type
OPEID	ASCII	Operation ID
PRJOBID	ASCII	Process job ID
TIMESTAMP	ASCII	Timestamp
ASSGNID	ASCII	Assignment ID
COPYID	ASCII	Copy ID
REVID	ASCII	Revision ID
RecID	ASCII	Recipe ID
VERID	ASCII	Version ID
TYPEID	ASCII	Type ID
EQID	ASCII	Equipment ID

S20F28 - PreSpecifyRecipe Acknowledge

S20F28->
PSRACK

Parameters:

Parameter	Type	Description
PSRACK	U1	PreSpecifyRecipe acknowledge

S20F29 - QueryPJRecipeXIDList Event Send

S20F29->
{L[5]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  PRJOBID
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
OPETYPE	ASCII	Operation type
OPEID	ASCII	Operation ID
PRJOBID	ASCII	Process job ID

S20F30 - QueryPJRecipeXIDList Event Acknowledge

<-S20F30
{L[2]
  {L[n]
    {L[9]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
    }
  }
  QPRKEACK
}

Parameters:

Parameter	Type	Description
TIMESTAMP	ASCII	Timestamp
OPEID	ASCII	Operation ID
ASSGNID	ASCII	Assignment ID
COPYID	ASCII	Copy ID
REVID	ASCII	Revision ID
RecID	ASCII	Recipe ID
VERID	ASCII	Version ID
TYPEID	ASCII	Type ID
EQID	ASCII	Equipment ID
QPRKEACK	U1	Query PJ recipe XID list event acknowledge

S20F31 - Pre-Exe Check Event Send

S20F31->
{L[6]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  PRJOBID
  CHKINFO
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
OPETYPE	ASCII	Operation type
OPEID	ASCII	Operation ID
PRJOBID	ASCII	Process job ID
CHKINFO	ASCII	Check information

S20F32 - Pre-Exe Check Event Acknowledge

<-S20F32
{L[3]
  PECRSLT
  {L[n]
    {L[10]
      TIMESTAMP
      OPEID
      ASSGNID
      COPYID
      REVID
      RecID
      VERID
      TYPEID
      EQID
      RCPBODYA
    }
  }
  PECEACK
}

Parameters:

Parameter	Type	Description
PECRSLT	U1	Pre-execution check result
TIMESTAMP	ASCII	Timestamp
OPEID	ASCII	Operation ID
ASSGNID	ASCII	Assignment ID
COPYID	ASCII	Copy ID
REVID	ASCII	Revision ID
RecID	ASCII	Recipe ID
VERID	ASCII	Version ID
TYPEID	ASCII	Type ID
EQID	ASCII	Equipment ID
RCPBODYA	ASCII	Recipe body data
PECEACK	U1	Pre-execution check event acknowledge

S20F33 - PreSpecifyRecipe Event Send

S20F33->
{L[5]
  OBJID
  OBJTYPE
  OPETYPE
  OPEID
  PRJOBID
}

Parameters:

Parameter	Type	Description
OBJID	ASCII	Object ID
OBJTYPE	ASCII	Object type
OPETYPE	ASCII	Operation type
OPEID	ASCII	Operation ID
PRJOBID	ASCII	Process job ID

S20F34 - PreSpecifyRecipe Event Acknowledge

<-S20F34
PSREACK

Parameters:

Parameter	Type	Description
PSREACK	U1	PreSpecifyRecipe event acknowledge

Stream 21: Material Transfer Management

Purpose: High-level material transfer coordination

Message	Direction	Description
S21F1	→ Equipment	Material Transfer Plan
S21F2	← Equipment	Material Transfer Plan Response
S21F3	→ Equipment	Item Send
S21F4	← Equipment	Item Send Acknowledge
S21F5	→ Equipment	Item Request
S21F6	← Equipment	Item Data
S21F7	→ Equipment	Item Type List Request
S21F8	← Equipment	Item Type List Results
S21F9	→ Equipment	Supported Item Type List Request
S21F10	← Equipment	Supported Item Type List Result
S21F11	→ Equipment	Item Delete
S21F12	← Equipment	Item Delete Acknowledge
S21F13	→ Equipment	Request Permission To Send Item
S21F14	← Equipment	Grant Permission To Send Item
S21F15	→ Equipment	Item Request
S21F16	← Equipment	Item Request Grant
S21F17	→ Equipment	Send Item Part
S21F18	← Equipment	Send Item Part Acknowledge
S21F19	→ Equipment	Item Type Feature Support
S21F20	← Equipment	Item Type Feature Support Results

S21F1 - Material Transfer Plan

<-S21F1
{L[4]
  ITEMTYPE
  ITEMID
  TRANSFERID
  TRANSFERINFO
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
TRANSFERID	ASCII	Transfer ID
TRANSFERINFO	ASCII	Transfer information

S21F2 - Material Transfer Plan Response

S21F2->
{L[2]
  ITEMACK
  ITEMERROR
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error

S21F3 - Item Send

<-S21F3
{L[5]
  ITEMTYPE
  ITEMID
  ITEMLENGTH
  ITEMVERSION
  {L[n]
    ITEMPART
  }
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
ITEMLENGTH	U4	Item length
ITEMVERSION	ASCII	Item version
ITEMPART	Any	Item part

S21F4 - Item Send Acknowledge

S21F4->
{L[2]
  ITEMACK
  ITEMERROR
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error

S21F5 - Item Request

<-S21F5
{L[2]
  ITEMTYPE
  ITEMID
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID

S21F6 - Item Data

S21F6->
{L[7]
  ITEMACK
  ITEMERROR
  ITEMTYPE
  ITEMID
  ITEMLENGTH
  ITEMVERSION
  {L[n]
    ITEMPART
  }
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
ITEMLENGTH	U4	Item length
ITEMVERSION	ASCII	Item version
ITEMPART	Any	Item part

S21F7 - Item Type List Request

<-S21F7
ITEMTYPE

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type

S21F8 - Item Type List Results

S21F8->
{L[7]
  ITEMACK
  ITEMERROR
  ITEMTYPE
  {L[n]
    {L[3]
      ITEMID
      ITEMLENGTH
      ITEMVERSION
    }
  }
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
ITEMLENGTH	U4	Item length
ITEMVERSION	ASCII	Item version

S21F9 - Supported Item Type List Request

<-S21F9
header only

Parameters:

Parameter	Type	Description
Empty	-	Header only message

S21F10 - Supported Item Type List Result

S21F10->
{L[3]
  ITEMACK
  ITEMERROR
  {L[n]
    ITEMTYPE
  }
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error
ITEMTYPE	ASCII	Item type

S21F11 - Item Delete

<-S21F11
{L[2]
  ITEMTYPE
  {L[n]
    ITEMID
  }
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID

S21F12 - Item Delete Acknowledge

S21F12->
{L[3]
  ITEMACK
  ITEMTYPE
  {L[n]
    {L[3]
      ITEMID
      ITEMACK
      ITEMERROR
    }
  }
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
ITEMERROR	ASCII	Item error

S21F13 - Request Permission To Send Item

<-S21F13
{L[5]
  ITEMTYPE
  ITEMID
  ITEMLENGTH
  ITEMVERSION
  ITEMPARTCOUNT
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
ITEMLENGTH	U4	Item length
ITEMVERSION	ASCII	Item version
ITEMPARTCOUNT	U4	Item part count

S21F14 - Grant Permission To Send Item

S21F14->
{L[2]
  ITEMACK
  ITEMERROR
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error

S21F15 - Item Request

<-S21F15
{L[2]
  ITEMTYPE
  ITEMID
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID

S21F16 - Item Request Grant

S21F16->
{L[7]
  ITEMACK
  ITEMERROR
  ITEMTYPE
  ITEMID
  ITEMLENGTH
  ITEMVERSION
  ITEMPARTCOUNT
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
ITEMLENGTH	U4	Item length
ITEMVERSION	ASCII	Item version
ITEMPARTCOUNT	U4	Item part count

S21F17 - Send Item Part

<-S21F17
{L[8]
  ITEMTYPE
  ITEMID
  ITEMLENGTH
  ITEMVERSION
  ITEMINDEX
  ITEMPARTCOUNT
  ITEMPARTLENGTH
  ITEMPART
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type
ITEMID	ASCII	Item ID
ITEMLENGTH	U4	Item length
ITEMVERSION	ASCII	Item version
ITEMINDEX	U4	Item index
ITEMPARTCOUNT	U4	Item part count
ITEMPARTLENGTH	U4	Item part length
ITEMPART	Any	Item part

S21F18 - Send Item Part Acknowledge

S21F18->
{L[2]
  ITEMACK
  ITEMERROR
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error

S21F19 - Item Type Feature Support

<-S21F19
{L[n]
  ITEMTYPE
}

Parameters:

Parameter	Type	Description
ITEMTYPE	ASCII	Item type

S21F20 - Item Type Feature Support Results

S21F20->
{L[n]
  {L[4]
    ITEMACK
    ITEMERROR
    ITEMTYPE
    ITEMTYPESUPPORT
  }
}

Parameters:

Parameter	Type	Description
ITEMACK	U1	Item acknowledge
ITEMERROR	ASCII	Item error
ITEMTYPE	ASCII	Item type
ITEMTYPESUPPORT	U1	Item type support