SECS Message Format Specification¶

Table of Contents¶

Overview
SECS-II Data Format
Stream Definitions
Message Categories
Common Message Examples
Implementation Guidelines

Overview¶

SECS/GEM (Semiconductor Equipment Communications Standard/Generic Equipment Model) is a comprehensive communication protocol suite specifically designed for semiconductor manufacturing equipment. Developed by SEMI (Semiconductor Equipment and Materials International), it provides standardized methods for equipment communication, control, and data collection in semiconductor fabrication facilities.

SECS-I (Physical Layer)¶

Purpose: Defines the physical communication interface
Connection: Traditional RS-232C serial communication
Characteristics: Point-to-point connection between equipment and host, slower data transmission rates, primarily used in legacy systems

SECS-II (Message Layer)¶

Purpose: Defines message structure and data formatting
Data Types: Supports various data formats including ASCII text, binary data, integers (1, 2, 4, 8 bytes, signed/unsigned), floating point numbers, and lists (nested data structures)
Message Structure: Hierarchical data organization using lists and items

HSMS (High-Speed Message Services)¶

Purpose: Modern replacement for SECS-I physical layer
Connection: TCP/IP-based Ethernet communication
Advantages: Higher data transmission speeds, support for multiple simultaneous connections, better network integration capabilities, enhanced reliability and error handling

GEM (Generic Equipment Model)¶

Purpose: Defines standard behaviors and capabilities for equipment
Functionality: Establishes common equipment states, events, and control mechanisms

Core Communication Concepts¶

SECS defines a standardized communication protocol for semiconductor manufacturing equipment, enabling consistent equipment integration and automation through stream and function organization, where streams (S1-S127) categorize message types by functionality and functions (F1-F255) define specific operations within each stream.

Stream Definitions¶

Stream 1: Equipment Status¶

Purpose: Equipment state information and basic communication

Message	Direction	Description
S1F1	→ Equipment	Are You There (Request)
S1F2	← Equipment	Are You There (Response)
S1F3	→ Equipment	Selected Equipment Status Request
S1F4	← Equipment	Selected Equipment Status Response
S1F11	→ Equipment	Status Variable Namelist Request
S1F12	← Equipment	Status Variable Namelist Response
S1F13	→ Equipment	Establish Communications Request
S1F14	← Equipment	Establish Communications Response
S1F15	→ Equipment	Request Offline
S1F16	← Equipment	Offline Acknowledge
S1F17	→ Equipment	Request Online
S1F18	← Equipment	Online Acknowledge
S1F19	→ Equipment	Recipe Name Request
S1F20	← Equipment	Recipe Name Response
S1F21	→ Equipment	Recipe Body Request
S1F22	← Equipment	Recipe Body Response
S1F23	→ Equipment	Process Program Request
S1F24	← Equipment	Process Program Response

S1F1 - Are You There (Request)¶

Format: <none> (empty data)

S1F2 - Are You There (Response)¶

Format: <none> (empty data) or
{L:0} (empty list)

S1F3 - Selected Equipment Status Request¶

Format: 
{L:n
  SVID_1
  SVID_2
  ...
  SVID_n
}

Where:
- SVID: Status Variable ID (U1, U2, U4, or A)

S1F4 - Selected Equipment Status Response¶

Format:
{L:n
  SV_1
  SV_2
  ...
  SV_n
}

Where:
- SV: Status Variable value (any format)

S1F11 - Status Variable Namelist Request¶

Format: <none> (empty data)

S1F12 - Status Variable Namelist Response¶

Format:
{L:n
  {L:3
    SVID
    SVNAME
    UNITS
  }
}

Where:
- SVID: Status Variable ID (U1, U2, U4, or A)
- SVNAME: Status Variable Name (A)
- UNITS: Units of Measure (A)

S1F13 - Establish Communications Request¶

Format:
{L:2
  MDLN
  SOFTREV
}

Where:
- MDLN: Model Number (A[20])
- SOFTREV: Software Revision (A[20])

Or simply: <L:0> (empty list)

S1F14 - Establish Communications Response¶

Format:
{L:2
  COMMACK
  {L:2
    MDLN
    SOFTREV
  }
}

Where:
- COMMACK: Communication Acknowledge (B[1])
  - 0: Accepted
  - 1: Denied, Try Again
  - 2: Denied, Permission Not Granted
- MDLN: Model Number (A[20])
- SOFTREV: Software Revision (A[20])

S1F15 - Request Offline¶

Format: <none> (empty data)

S1F16 - Offline Acknowledge¶

Format:
OFLACK

Where:
- OFLACK: Offline Acknowledge (B[1])
  - 0: Offline Accepted
  - 1: Offline Not Allowed

S1F17 - Request Online¶

Format: <none> (empty data)

S1F18 - Online Acknowledge¶

Format:
ONLACK

Where:
- ONLACK: Online Acknowledge (B[1])
  - 0: Online Accepted
  - 1: Online Not Allowed

S1F19 - Recipe Name Request¶

Format: <none> (empty data)

S1F20 - Recipe Name Response¶

Format:
{L:n
  PPID_1
  PPID_2
  ...
  PPID_n
}

Where:
- PPID: Process Program ID (A)

S1F21 - Recipe Body Request¶

Format:
PPID

Where:
- PPID: Process Program ID (A)

S1F22 - Recipe Body Response¶

Format:
{L:2
  PPID
  PPBODY
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)

S1F23 - Process Program Request¶

Format:
{L:n
  PPID_1
  PPID_2
  ...
  PPID_n
}

Where:
- PPID: Process Program ID (A)

S1F24 - Process Program Response¶

Format:
{L:n
  {L:3
    PPID
    PPBODY
    PPSTATUS
  }
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)
- PPSTATUS: Process Program Status (U1)
  - 0: Available
  - 1: Not Available
  - 2: In Use
  - 3: Error

Stream 2: Equipment Control and Diagnostics¶

Purpose: Equipment configuration and diagnostic operations

Message	Direction	Description
S2F1	→ Equipment	Equipment Status Request
S2F2	← Equipment	Equipment Status Response
S2F3	→ Equipment	Status Variable Value Request
S2F4	← Equipment	Status Variable Value Response
S2F5	← Equipment	Send Equipment Status
S2F6	→ Equipment	Send Equipment Status Acknowledge
S2F7	→ Equipment	Load Port Status Request
S2F8	← Equipment	Load Port Status Response
S2F9	→ Equipment	Equipment Status Multi-Block Inquire
S2F10	← Equipment	Equipment Status Multi-Block Grant
S2F11	← Equipment	Equipment Status Multi-Block
S2F12	→ Equipment	Equipment Status Multi-Block Acknowledge
S2F13	→ Equipment	Equipment Constant Request
S2F14	← Equipment	Equipment Constant Response
S2F15	→ Equipment	New Equipment Constant Send
S2F16	← Equipment	New Equipment Constant Acknowledge
S2F17	→ Equipment	Date and Time Request
S2F18	← Equipment	Date and Time Response
S2F19	→ Equipment	Recipe Body Request
S2F20	← Equipment	Recipe Body Response
S2F21	→ Equipment	Recipe Body Send
S2F22	← Equipment	Recipe Body Acknowledge
S2F23	→ Equipment	Trace Initialize Send
S2F24	← Equipment	Trace Initialize Acknowledge
S2F25	→ Equipment	Loopback Diagnostic Request
S2F26	← Equipment	Loopback Diagnostic Response
S2F27	→ Equipment	Initiate Processing Request
S2F28	← Equipment	Initiate Processing Acknowledge
S2F29	→ Equipment	Equipment Constant Namelist Request
S2F30	← Equipment	Equipment Constant Namelist Response
S2F31	→ Equipment	Date and Time Set Request
S2F32	← Equipment	Date and Time Set Response
S2F33	→ Equipment	Define Report
S2F34	← Equipment	Define Report Acknowledge
S2F35	→ Equipment	Link Event Report
S2F36	← Equipment	Link Event Report Acknowledge
S2F37	→ Equipment	Enable/Disable Event Report
S2F38	← Equipment	Enable/Disable Event Report Acknowledge
S2F39	→ Equipment	Status Variable Namelist Request
S2F40	← Equipment	Status Variable Namelist Response
S2F41	→ Equipment	Host Command Send
S2F42	← Equipment	Host Command Acknowledge
S2F43	→ Equipment	Reset Spooling Streams and Functions
S2F44	← Equipment	Reset Spooling Acknowledge
S2F45	→ Equipment	Define Variable Limit Attributes
S2F46	← Equipment	Define Variable Limit Attributes Acknowledge
S2F47	→ Equipment	Variable Limit Attribute Request
S2F48	← Equipment	Variable Limit Attribute Response
S2F49	→ Equipment	Enhanced Remote Command
S2F50	← Equipment	Enhanced Remote Command Acknowledge
S2F51	→ Equipment	Automated Substrate Mapping
S2F52	← Equipment	Automated Substrate Mapping Acknowledge
S2F53	→ Equipment	Enhanced Define Report
S2F54	← Equipment	Enhanced Define Report Acknowledge
S2F55	→ Equipment	Enhanced Link Event Report
S2F56	← Equipment	Enhanced Link Event Report Acknowledge
S2F57	→ Equipment	Enhanced Enable/Disable Event Report
S2F58	← Equipment	Enhanced Enable/Disable Event Report Acknowledge
S2F59	→ Equipment	Formatted Process Program Send
S2F60	← Equipment	Formatted Process Program Acknowledge
S2F61	→ Equipment	Formatted Process Program Request
S2F62	← Equipment	Formatted Process Program Response
S2F63	→ Equipment	Define Object
S2F64	← Equipment	Define Object Acknowledge

S2F1 - Equipment Status Request¶

Format:
{L:n
  SVID_1
  SVID_2
  ...
  SVID_n
}

Where:
- SVID: Status Variable ID (U1, U2, U4, or A)

S2F2 - Equipment Status Response¶

Format:
{L:n
  SV_1
  SV_2
  ...
  SV_n
}

Where:
- SV: Status Variable value (any format)

S2F13 - Equipment Constant Request¶

Format:
{L:n
  ECID_1
  ECID_2
  ...
  ECID_n
}

Where:
- ECID: Equipment Constant ID (U1, U2, U4, or A)

S2F14 - Equipment Constant Response¶

Format:
{L:n
  ECV_1
  ECV_2
  ...
  ECV_n
}

Where:
- ECV: Equipment Constant Value (any format)

S2F15 - New Equipment Constant Send¶

Format:
{L:n
  {L:2
    ECID
    ECV
  }
}

Where:
- ECID: Equipment Constant ID (U1, U2, U4, or A)
- ECV: Equipment Constant Value (any format)

S2F16 - New Equipment Constant Acknowledge¶

Format:
EAC

Where:
- EAC: Equipment Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Denied, At least one constant does not exist
  - 2: Denied, Busy
  - 3: Denied, At least one constant out of range

S2F17 - Date and Time Request¶

Format: <none> (empty data)

S2F18 - Date and Time Response¶

Format:
TIME

Where:
- TIME: Current Time (A[16]) format: "YYMMDDhhmmss[cc]"
  - YY: Year (2 digits)
  - MM: Month (01-12)
  - DD: Day (01-31)
  - hh: Hour (00-23)
  - mm: Minute (00-59)
  - ss: Second (00-59)
  - cc: Centisecond (00-99) optional

S2F31 - Date and Time Set Request¶

Format:
TIME

Where:
- TIME: Time to Set (A[16]) format: "YYMMDDhhmmss[cc]"

S2F32 - Date and Time Set Response¶

Format:
TIACK

Where:
- TIACK: Time Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Error

S2F33 - Define Report¶

Format:
{L:n
  {L:2
    DATAID
    {L:m
      {L:2
        RPTID
        {L:k
          VID_1
          VID_2
          ...
          VID_k
        }
      }
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- RPTID: Report ID (U1, U2, U4, or A)
- VID: Variable ID (U1, U2, U4, or A)

S2F34 - Define Report Acknowledge¶

Format:
DRACK

Where:
- DRACK: Define Report Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Denied, Insufficient space
  - 2: Denied, Invalid format
  - 3: Denied, At least one RPTID already defined
  - 4: Denied, At least one VID does not exist

S2F35 - Link Event Report¶

Format:
{L:n
  {L:2
    DATAID
    {L:m
      {L:2
        CEID
        {L:k
          RPTID_1
          RPTID_2
          ...
          RPTID_k
        }
      }
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- CEID: Collection Event ID (U1, U2, U4, or A)
- RPTID: Report ID (U1, U2, U4, or A)

S2F36 - Link Event Report Acknowledge¶

Format:
LRACK

Where:
- LRACK: Link Report Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Denied, Insufficient space
  - 2: Denied, Invalid format
  - 3: Denied, At least one CEID already defined
  - 4: Denied, At least one CEID does not exist
  - 5: Denied, At least one RPTID does not exist

S2F37 - Enable/Disable Event Report¶

Format:
{L:2
  CEED
  {L:n
    CEID_1
    CEID_2
    ...
    CEID_n
  }
}

Where:
- CEED: Collection Event Enable/Disable (BOOLEAN)
  - True: Enable
  - False: Disable
- CEID: Collection Event ID (U1, U2, U4, or A)

S2F38 - Enable/Disable Event Report Acknowledge¶

Format:
ERACK

Where:
- ERACK: Enable/Disable Event Report Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Denied, At least one CEID does not exist
  - 2: Denied, Busy

S2F3 - Status Variable Value Request¶

Format:
{L:n
  SVID_1
  SVID_2
  ...
  SVID_n
}

Where:
- SVID: Status Variable ID (U1, U2, U4, or A)

S2F4 - Status Variable Value Response¶

Format:
{L:n
  SV_1
  SV_2
  ...
  SV_n
}

Where:
- SV: Status Variable value (any format)

S2F5 - Send Equipment Status¶

Format:
{L:n
  {L:2
    SVID
    SV
  }
}

Where:
- SVID: Status Variable ID (U1, U2, U4, or A)
- SV: Status Variable value (any format)

S2F6 - Send Equipment Status Acknowledge¶

Format:
ACKC2

Where:
- ACKC2: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S2F7 - Load Port Status Request¶

Format:
{L:n
  PORTID_1
  PORTID_2
  ...
  PORTID_n
}

Where:
- PORTID: Port ID (U1, U2, U4, or A)

S2F8 - Load Port Status Response¶

Format:
{L:n
  {L:3
    PORTID
    PORTSTATE
    PORTMODE
  }
}

Where:
- PORTID: Port ID (U1, U2, U4, or A)
- PORTSTATE: Port State (U1)
  - 0: Unloaded
  - 1: Transfer Blocked
  - 2: Ready to Load
  - 3: Ready to Unload
  - 4: Transfer Ready
- PORTMODE: Port Mode (U1)
  - 0: Manual
  - 1: Auto

S2F9 - Equipment Status Multi-Block Inquire¶

Format:
{L:2
  DSPER
  TOTSMP
}

Where:
- DSPER: Data Sample Period (U1, U2, U4)
- TOTSMP: Total Samples (U1, U2, U4)

S2F10 - Equipment Status Multi-Block Grant¶

Format:
GRANT

Where:
- GRANT: Grant Code (B[1])
  - 0: Granted
  - 1: Busy, try again
  - 2: No space

S2F11 - Equipment Status Multi-Block¶

Format:
{L:3
  DSID
  SMPLN
  {L:n
    SV_1
    SV_2
    ...
    SV_n
  }
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- SMPLN: Sample Number (U1, U2, U4)
- SV: Status Variable value (any format)

S2F12 - Equipment Status Multi-Block Acknowledge¶

Format:
ACKC2

Where:
- ACKC2: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S2F19 - Recipe Body Request¶

Format:
{L:n
  PPID_1
  PPID_2
  ...
  PPID_n
}

Where:
- PPID: Process Program ID (A)

S2F20 - Recipe Body Response¶

Format:
{L:n
  {L:2
    PPID
    PPBODY
  }
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)

S2F21 - Recipe Body Send¶

Format:
{L:n
  {L:2
    PPID
    PPBODY
  }
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)

S2F22 - Recipe Body Acknowledge¶

Format:
ACKC2

Where:
- ACKC2: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Recipe ID already exists
  - 3: No space available

S2F23 - Trace Initialize Send¶

Format:
{L:2
  TRID
  {L:n
    SVID_1
    SVID_2
    ...
    SVID_n
  }
}

Where:
- TRID: Trace Request ID (U1, U2, U4, or A)
- SVID: Status Variable ID (U1, U2, U4, or A)

S2F24 - Trace Initialize Acknowledge¶

Format:
TIAACK

Where:
- TIAACK: Trace Initialize Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Denied, Insufficient space
  - 2: Denied, Invalid format
  - 3: Denied, At least one SVID does not exist
  - 4: Denied, Busy

S2F25 - Loopback Diagnostic Request¶

Format:
{L:n
  DATA_1
  DATA_2
  ...
  DATA_n
}

Where:
- DATA: Test Data (any format)

S2F26 - Loopback Diagnostic Response¶

Format:
{L:n
  DATA_1
  DATA_2
  ...
  DATA_n
}

Where:
- DATA: Echoed Test Data (any format)

S2F27 - Initiate Processing Request¶

Format:
{L:2
  PPID
  {L:n
    PARAMETER_1
    PARAMETER_2
    ...
    PARAMETER_n
  }
}

Where:
- PPID: Process Program ID (A)
- PARAMETER: Process Parameters (any format)

S2F28 - Initiate Processing Acknowledge¶

Format:
ACKC2

Where:
- ACKC2: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Recipe not found
  - 3: Equipment busy

S2F29 - Equipment Constant Namelist Request¶

Format: <none> (empty data)

S2F30 - Equipment Constant Namelist Response¶

Format:
{L:n
  {L:6
    ECID
    ECNAME
    ECMIN
    ECMAX
    ECDEF
    UNITS
  }
}

Where:
- ECID: Equipment Constant ID (U1, U2, U4, or A)
- ECNAME: Equipment Constant Name (A)
- ECMIN: Minimum Value (any format)
- ECMAX: Maximum Value (any format)
- ECDEF: Default Value (any format)
- UNITS: Units (A)

S2F39 - Status Variable Namelist Request¶

Format: <none> (empty data)

S2F40 - Status Variable Namelist Response¶

Format:
{L:n
  {L:6
    SVID
    SVNAME
    SVMIN
    SVMAX
    SVDEF
    UNITS
  }
}

Where:
- SVID: Status Variable ID (U1, U2, U4, or A)
- SVNAME: Status Variable Name (A)
- SVMIN: Minimum Value (any format)
- SVMAX: Maximum Value (any format)
- SVDEF: Default Value (any format)
- UNITS: Units (A)

S2F41 - Host Command Send¶

Format:
{L:3
  RCMD
  {L:n
    CPNAME_1
    CPNAME_2
    ...
    CPNAME_n
  }
  {L:n
    CPVAL_1
    CPVAL_2
    ...
    CPVAL_n
  }
}

Where:
- RCMD: Remote Command (A)
- CPNAME: Command Parameter Name (A)
- CPVAL: Command Parameter Value (any format)

S2F42 - Host Command Acknowledge¶

Format:
{L:2
  HCACK
    {L:n
      {L:2
        CPNAME
        CPACK
      }
    }
}

Where:
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists
- CPNAME: Command Parameter Name (A)
- CPACK     Format: B:1 (invariant)    
      remote command parameter acknowledge, only received if error (B[1])   
  1 - unknown CPNAME
  2 - illegal value for CPVAL
  3 - illegal format for CPVAL

S2F43 - Reset Spooling Streams and Functions¶

Format:
{L:2
  STRID
  FCNID
}

Where:
- STRID: Stream ID (B[1])
- FCNID: Function ID (B[1])

S2F44 - Reset Spooling Acknowledge¶

Format:
RSPACK

Where:
- RSPACK: Reset Spool Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Error

S2F45 - Define Variable Limit Attributes¶

Format:
{L:n
  {L:8
    VID
    LIMITID
    UPPERDB
    LOWERDB
    UPPERDB
    LOWERDB
    LVID
    DVVAL
  }
}

Where:
- VID: Variable ID (U1, U2, U4, or A)
- LIMITID: Limit ID (U1, U2, U4, or A)
- UPPERDB: Upper Deadband (any format)
- LOWERDB: Lower Deadband (any format)
- LVID: Limit Variable ID (U1, U2, U4, or A)  
- DVVAL: Default Variable Value (any format)

S2F46 - Define Variable Limit Attributes Acknowledge¶

Format:
ACKC2

Where:
- ACKC2: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: At least one VID does not exist
  - 3: Invalid limit specification

S2F47 - Variable Limit Attribute Request¶

Format:
{L:n
  VID_1
  VID_2
  ...
  VID_n
}

Where:
- VID: Variable ID (U1, U2, U4, or A)

S2F48 - Variable Limit Attribute Response¶

Format:
{L:n
  {L:8
    VID
    LIMITID
    UPPERDB
    LOWERDB
    UPPERDB
    LOWERDB
    LVID
    DVVAL
  }
}

Where:
- VID: Variable ID (U1, U2, U4, or A)
- LIMITID: Limit ID (U1, U2, U4, or A)
- UPPERDB: Upper Deadband (any format)
- LOWERDB: Lower Deadband (any format)
- LVID: Limit Variable ID (U1, U2, U4, or A)
- DVVAL: Default Variable Value (any format)

S2F49 - Enhanced Remote Command¶

Format:
{L:4
  DATAID
  OBJSPEC
  RCMD
  {L:n
    {L:2
      CPNAME
      CPACK
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- OBJSPEC: Object Specifier (A)
- RCMD: Remote Command (A)
- CPNAME: Command Parameter Name (A)
- CPACK: Command Parameter Acknowledge (any format)

S2F50 - Enhanced Remote Command Acknowledge¶

Format:
{L:3
  DATAID
  HCACK
  {L:n
    {L:2
      CPNAME
      CPACK
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
- CPNAME: Command Parameter Name (A)
- CPACK: Command Parameter Acknowledge (any format)

S2F51 - Automated Substrate Mapping¶

Format:
{L:3
  DATAID
  OBJSPEC
  {L:n
    MAPDATA_1
    MAPDATA_2
    ...
    MAPDATA_n
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- OBJSPEC: Object Specifier (A)
- MAPDATA: Mapping Data (various formats)

S2F52 - Automated Substrate Mapping Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])

S2F53 - Enhanced Define Report¶

Format:
{L:3
  DATAID
  OBJTYPE
  {L:n
    {L:2
      RPTID
      {L:m
        VID_1
        VID_2
        ...
        VID_m
      }
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- OBJTYPE: Object Type (A)
- RPTID: Report ID (U1, U2, U4, or A)
- VID: Variable ID (U1, U2, U4, or A)

S2F54 - Enhanced Define Report Acknowledge¶

Format:
{L:2
  DATAID
  DRACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- DRACK: Define Report Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Denied, Insufficient space
  - 2: Denied, Invalid format
  - 3: Denied, At least one RPTID already defined
  - 4: Denied, At least one VID does not exist

S2F55 - Enhanced Link Event Report¶

Format:
{L:3
  DATAID
  OBJTYPE
  {L:n
    {L:2
      CEID
      {L:m
        RPTID_1
        RPTID_2
        ...
        RPTID_m
      }
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- OBJTYPE: Object Type (A)
- CEID: Collection Event ID (U1, U2, U4, or A)
- RPTID: Report ID (U1, U2, U4, or A)

S2F56 - Enhanced Link Event Report Acknowledge¶

Format:
{L:2
  DATAID
  LRACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- LRACK: Link Report Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Denied, Insufficient space
  - 2: Denied, Invalid format
  - 3: Denied, At least one CEID already defined
  - 4: Denied, At least one CEID does not exist
  - 5: Denied, At least one RPTID does not exist

S2F57 - Enhanced Enable/Disable Event Report¶

Format:
{L:3
  DATAID
  CEED
  {L:n
    CEID_1
    CEID_2
    ...
    CEID_n
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- CEED: Collection Event Enable/Disable (BOOLEAN)
- CEID: Collection Event ID (U1, U2, U4, or A)

S2F58 - Enhanced Enable/Disable Event Report Acknowledge¶

Format:
{L:2
  DATAID
  ERACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- ERACK: Enable/Disable Event Report Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Denied, At least one CEID does not exist
  - 2: Denied, Busy

S2F59 - Formatted Process Program Send¶

Format:
{L:3
  PPID
  PPBODY
  PPFORMAT
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)
- PPFORMAT: Process Program Format (U1)
  - 0: ASCII
  - 1: Binary
  - 2: Structured

S2F60 - Formatted Process Program Acknowledge¶

Format:
ACKC2

Where:
- ACKC2: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Format not supported
  - 3: PPID already exists
  - 4: No space available

S2F61 - Formatted Process Program Request¶

Format:
{L:2
  PPID
  PPFORMAT
}

Where:
- PPID: Process Program ID (A)
- PPFORMAT: Process Program Format (U1)
  - 0: ASCII
  - 1: Binary
  - 2: Structured

S2F62 - Formatted Process Program Response¶

Format:
{L:3
  PPID
  PPBODY
  PPFORMAT
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)
- PPFORMAT: Process Program Format (U1)
  - 0: ASCII
  - 1: Binary
  - 2: Structured

S2F63 - Define Object¶

Format:
{L:3
  DATAID
  OBJTYPE
  {L:n
    {L:3
      OBJID
      OBJNAME
      {L:m
        ATTRID_1
        ATTRID_2
        ...
        ATTRID_m
      }
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- OBJTYPE: Object Type (A)
- OBJID: Object ID (A)
- OBJNAME: Object Name (A)
- ATTRID: Attribute ID (U1, U2, U4, or A)

S2F64 - Define Object Acknowledge¶

Format:
{L:2
  DATAID
  OBJACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- OBJACK: Object Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Object type not supported
  - 3: Object already exists
  - 4: No space available

Stream 3: Material Status¶

Purpose: Material and carrier tracking

Message	Direction	Description
S3F1	→ Equipment	Carrier Action Request
S3F2	← Equipment	Carrier Action Response
S3F3	→ Equipment	Carrier Status Request
S3F4	← Equipment	Carrier Status Response
S3F5	← Equipment	Carrier Status Send
S3F6	→ Equipment	Carrier Status Acknowledge
S3F7	→ Equipment	Port Status Request
S3F8	← Equipment	Port Status Response
S3F9	← Equipment	Port Status Send
S3F10	→ Equipment	Port Status Acknowledge
S3F11	→ Equipment	Substrate Map Request
S3F12	← Equipment	Substrate Map Response
S3F13	← Equipment	Substrate Map Send
S3F14	→ Equipment	Substrate Map Acknowledge
S3F15	→ Equipment	Substrate Position Request
S3F16	← Equipment	Substrate Position Response
S3F17	→ Equipment	Carrier Action Request (Extended)
S3F18	← Equipment	Carrier Action Response (Extended)
S3F19	→ Equipment	Port Action Request
S3F20	← Equipment	Port Action Response
S3F21	→ Equipment	Port Group Request
S3F22	← Equipment	Port Group Response
S3F23	→ Equipment	Port Group Define
S3F24	← Equipment	Port Group Define Acknowledge
S3F25	→ Equipment	Carrier ID Request
S3F26	← Equipment	Carrier ID Response
S3F27	→ Equipment	Carrier ID Send
S3F28	← Equipment	Carrier ID Acknowledge
S3F29	→ Equipment	Substrate Location Request
S3F30	← Equipment	Substrate Location Response
S3F31	← Equipment	Substrate Location Send
S3F32	→ Equipment	Substrate Location Acknowledge
S3F33	→ Equipment	Load Lock Status Request
S3F34	← Equipment	Load Lock Status Response
S3F35	← Equipment	Load Lock Status Send
S3F36	→ Equipment	Load Lock Status Acknowledge

S3F1 - Carrier Action Request¶

Format:
{L:5
  DATAID
  CARRIERACTION
  CARRIERID
  PTN
  {L:n
    {L:2
      CATTRID
      CATTRDATA
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- CARRIERACTION: Carrier Action (U1)
  - 1: Load
  - 2: Unload
  - 3: Transfer
- CARRIERID: Carrier ID (A)
- PTN: Port Number (U1)
- CATTRID: Carrier Attribute ID (U1, U2, U4, or A)
- CATTRDATA: Carrier Attribute Data (any format)

S3F2 - Carrier Action Response¶

Format:
{L:2
  DATAID
  CAACK
}

Where:
- DATAID: Data ID (matching request)
- CAACK: Carrier Action Acknowledge (U1)
  - 0: Acknowledged
  - 1: Denied, Invalid Command
  - 2: Denied, Cannot Perform Now

S3F3 - Carrier Status Request¶

Format:
{L:n
  CARRIERID_1
  CARRIERID_2
  ...
  CARRIERID_n
}

Where:
- CARRIERID: Carrier ID (A)

S3F4 - Carrier Status Response¶

Format:
{L:n
  {L:3
    CARRIERID
    CARRIERSTATUS
    {L:m
      {L:2
        CATTRID
        CATTRDATA
      }
    }
  }
}

Where:
- CARRIERID: Carrier ID (A)
- CARRIERSTATUS: Carrier Status (U1)
  - 0: No State
  - 1: Not Present
  - 2: Present
  - 3: Moving
- CATTRID: Carrier Attribute ID (U1, U2, U4, or A)
- CATTRDATA: Carrier Attribute Data (any format)

S3F5 - Carrier Status Send¶

Format:
{L:3
  CARRIERID
  CARRIERSTATUS
  {L:n
    {L:2
      CATTRID
      CATTRDATA
    }
  }
}

Where:
- CARRIERID: Carrier ID (A)
- CARRIERSTATUS: Carrier Status (U1)
  - 0: No State
  - 1: Not Present
  - 2: Present
  - 3: Moving
- CATTRID: Carrier Attribute ID (U1, U2, U4, or A)
- CATTRDATA: Carrier Attribute Data (any format)

S3F6 - Carrier Status Acknowledge¶

Format:
ACKC3

Where:
- ACKC3: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S3F7 - Port Status Request¶

Format:
{L:n
  PTN_1
  PTN_2
  ...
  PTN_n
}

Where:
- PTN: Port Number (U1)

S3F8 - Port Status Response¶

Format:
{L:n
  {L:3
    PTN
    PORTSTATUS
    {L:m
      {L:2
        PATTRID
        PATTRDATA
      }
    }
  }
}

Where:
- PTN: Port Number (U1)
- PORTSTATUS: Port Status (U1)
  - 0: No State
  - 1: Unoccupied
  - 2: Occupied
  - 3: Loading
  - 4: Unloading
- PATTRID: Port Attribute ID (U1, U2, U4, or A)
- PATTRDATA: Port Attribute Data (any format)

S3F9 - Port Status Send¶

Format:
{L:3
  PTN
  PORTSTATUS
  {L:n
    {L:2
      PATTRID
      PATTRDATA
    }
  }
}

Where:
- PTN: Port Number (U1)
- PORTSTATUS: Port Status (U1)
- PATTRID: Port Attribute ID (U1, U2, U4, or A)
- PATTRDATA: Port Attribute Data (any format)

S3F10 - Port Status Acknowledge¶

Format:
ACKC3

Where:
- ACKC3: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S3F11 - Substrate Map Request¶

Format:
{L:2
  CARRIERID
  {L:n
    SUBSTRATEID_1
    SUBSTRATEID_2
    ...
    SUBSTRATEID_n
  }
}

Where:
- CARRIERID: Carrier ID (A)
- SUBSTRATEID: Substrate ID (A)

S3F12 - Substrate Map Response¶

Format:
{L:n
  {L:3
    SUBSTRATEID
    SUBSTRATELOC
    {L:m
      {L:2
        SATTRID
        SATTRDATA
      }
    }
  }
}

Where:
- SUBSTRATEID: Substrate ID (A)
- SUBSTRATELOC: Substrate Location (U1)
- SATTRID: Substrate Attribute ID (U1, U2, U4, or A)
- SATTRDATA: Substrate Attribute Data (any format)

S3F13 - Substrate Map Send¶

Format:
{L:2
  CARRIERID
  {L:n
    {L:3
      SUBSTRATEID
      SUBSTRATELOC
      {L:m
        {L:2
          SATTRID
          SATTRDATA
        }
      }
    }
  }
}

Where:
- CARRIERID: Carrier ID (A)
- SUBSTRATEID: Substrate ID (A)
- SUBSTRATELOC: Substrate Location (U1)
- SATTRID: Substrate Attribute ID (U1, U2, U4, or A)
- SATTRDATA: Substrate Attribute Data (any format)

S3F14 - Substrate Map Acknowledge¶

Format:
ACKC3

Where:
- ACKC3: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S3F15 - Substrate Position Request¶

Format:
{L:2
  CARRIERID
  SUBSTRATEID
}

Where:
- CARRIERID: Carrier ID (A)
- SUBSTRATEID: Substrate ID (A)

S3F16 - Substrate Position Response¶

Format:
{L:3
  SUBSTRATEID
  SUBSTRATELOC
  SUBSTRATESTATUS
}

Where:
- SUBSTRATEID: Substrate ID (A)
- SUBSTRATELOC: Substrate Location (U1)
- SUBSTRATESTATUS: Substrate Status (U1)
  - 0: No State
  - 1: Present
  - 2: Processing
  - 3: Completed

S3F17 - Carrier Action Request (Extended)¶

Format:
{L:5
  DATAID
  CARRIERACTION
  CARRIERID
  PTN
  {L:n
    {L:2
      CATTRID
      CATTRDATA
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- CARRIERACTION: Carrier Action (U1)
- CARRIERID: Carrier ID (A)
- PTN: Port Number (U1)
- CATTRID: Carrier Attribute ID (U1, U2, U4, or A)
- CATTRDATA: Carrier Attribute Data (any format)

S3F18 - Carrier Action Response (Extended)¶

Format:
{L:2
  DATAID
  CAACK
}

Where:
- DATAID: Data ID (matching request)
- CAACK: Carrier Action Acknowledge (U1)
  - 0: Acknowledged
  - 1: Denied, Invalid Command
  - 2: Denied, Cannot Perform Now

S3F19 - Port Action Request¶

Format:
{L:4
  DATAID
  PORTACTION
  PTN
  {L:n
    {L:2
      PATTRID
      PATTRDATA
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- PORTACTION: Port Action (U1)
  - 1: Open
  - 2: Close
  - 3: Lock
  - 4: Unlock
- PTN: Port Number (U1)
- PATTRID: Port Attribute ID (U1, U2, U4, or A)
- PATTRDATA: Port Attribute Data (any format)

S3F20 - Port Action Response¶

Format:
{L:2
  DATAID
  PAACK
}

Where:
- DATAID: Data ID (matching request)
- PAACK: Port Action Acknowledge (U1)
  - 0: Acknowledged
  - 1: Denied, Invalid Command
  - 2: Denied, Cannot Perform Now

S3F21 - Port Group Request¶

Format:
{L:n
  PORTGROUPID_1
  PORTGROUPID_2
  ...
  PORTGROUPID_n
}

Where:
- PORTGROUPID: Port Group ID (A)

S3F22 - Port Group Response¶

Format:
{L:n
  {L:2
    PORTGROUPID
    {L:m
      PTN_1
      PTN_2
      ...
      PTN_m
    }
  }
}

Where:
- PORTGROUPID: Port Group ID (A)
- PTN: Port Number (U1)

S3F23 - Port Group Define¶

Format:
{L:2
  PORTGROUPID
  {L:n
    PTN_1
    PTN_2
    ...
    PTN_n
  }
}

Where:
- PORTGROUPID: Port Group ID (A)
- PTN: Port Number (U1)

S3F24 - Port Group Define Acknowledge¶

Format:
ACKC3

Where:
- ACKC3: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S3F25 - Carrier ID Request¶

Format:
PTN

Where:
- PTN: Port Number (U1)

S3F26 - Carrier ID Response¶

Format:
{L:2
  PTN
  CARRIERID
}

Where:
- PTN: Port Number (U1)
- CARRIERID: Carrier ID (A)

S3F27 - Carrier ID Send¶

Format:
{L:2
  PTN
  CARRIERID
}

Where:
- PTN: Port Number (U1)
- CARRIERID: Carrier ID (A)

S3F28 - Carrier ID Acknowledge¶

Format:
ACKC3

Where:
- ACKC3: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S3F29 - Substrate Location Request¶

Format:
{L:n
  SUBSTRATEID_1
  SUBSTRATEID_2
  ...
  SUBSTRATEID_n
}

Where:
- SUBSTRATEID: Substrate ID (A)

S3F30 - Substrate Location Response¶

Format:
{L:n
  {L:3
    SUBSTRATEID
    CARRIERID
    SUBSTRATELOC
  }
}

Where:
- SUBSTRATEID: Substrate ID (A)
- CARRIERID: Carrier ID (A)
- SUBSTRATELOC: Substrate Location (U1)

S3F31 - Substrate Location Send¶

Format:
{L:3
  SUBSTRATEID
  CARRIERID
  SUBSTRATELOC
}

Where:
- SUBSTRATEID: Substrate ID (A)
- CARRIERID: Carrier ID (A)
- SUBSTRATELOC: Substrate Location (U1)

S3F32 - Substrate Location Acknowledge¶

Format:
ACKC3

Where:
- ACKC3: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S3F33 - Load Lock Status Request¶

Format:
{L:n
  LLID_1
  LLID_2
  ...
  LLID_n
}

Where:
- LLID: Load Lock ID (A)

S3F34 - Load Lock Status Response¶

Format:
{L:n
  {L:3
    LLID
    LLSTATUS
    {L:m
      {L:2
        LLATTRID
        LLATTRDATA
      }
    }
  }
}

Where:
- LLID: Load Lock ID (A)
- LLSTATUS: Load Lock Status (U1)
  - 0: No State
  - 1: Open
  - 2: Closed
  - 3: Pumping
  - 4: Venting
- LLATTRID: Load Lock Attribute ID (U1, U2, U4, or A)
- LLATTRDATA: Load Lock Attribute Data (any format)

S3F35 - Load Lock Status Send¶

Format:
{L:3
  LLID
  LLSTATUS
  {L:n
    {L:2
      LLATTRID
      LLATTRDATA
    }
  }
}

Where:
- LLID: Load Lock ID (A)
- LLSTATUS: Load Lock Status (U1)
- LLATTRID: Load Lock Attribute ID (U1, U2, U4, or A)
- LLATTRDATA: Load Lock Attribute Data (any format)

S3F36 - Load Lock Status Acknowledge¶

Format:
ACKC3

Where:
- ACKC3: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

Stream 4: Material Control¶

Purpose: Material transfer and handling

Message	Direction	Description
S4F1	→ Equipment	Transfer Job Create
S4F2	← Equipment	Transfer Job Create Acknowledge
S4F3	→ Equipment	Transfer Job Cancel
S4F4	← Equipment	Transfer Job Cancel Acknowledge
S4F5	→ Equipment	Transfer Job Start
S4F6	← Equipment	Transfer Job Start Acknowledge
S4F7	→ Equipment	Transfer Job Pause
S4F8	← Equipment	Transfer Job Pause Acknowledge
S4F9	→ Equipment	Transfer Job Stop
S4F10	← Equipment	Transfer Job Stop Acknowledge
S4F11	→ Equipment	Transfer Job Abort
S4F12	← Equipment	Transfer Job Abort Acknowledge
S4F13	→ Equipment	Transfer Job Resume
S4F14	← Equipment	Transfer Job Resume Acknowledge
S4F15	→ Equipment	Transfer Job Status Request
S4F16	← Equipment	Transfer Job Status Response
S4F17	→ Equipment	Transfer Job Priority Update
S4F18	← Equipment	Transfer Job Priority Acknowledge
S4F19	→ Equipment	Transfer Command
S4F20	← Equipment	Transfer Command Acknowledge
S4F21	→ Equipment	Enhanced Transfer Command
S4F22	← Equipment	Enhanced Transfer Acknowledge
S4F23	← Equipment	Transfer Status Send
S4F24	→ Equipment	Transfer Status Acknowledge
S4F25	→ Equipment	Material Status Request
S4F26	← Equipment	Material Status Response

S4F1 - Transfer Job Create¶

Format:
{L:5
  DATAID
  TRANSFERTYPE
  SOURCEID
  DESTID
  PRIORITY
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- TRANSFERTYPE: Transfer Type (U1)
  - 1: Material Transfer
  - 2: Carrier Transfer
  - 3: Substrate Transfer
- SOURCEID: Source Location ID (A)
- DESTID: Destination Location ID (A)
- PRIORITY: Transfer Priority (U1)

S4F2 - Transfer Job Create Acknowledge¶

S4F1 - Transfer Job Create¶

Format:
{L:5
  DATAID
  JOBID
  CARRIERID
  FROMPTN
  TOPTN
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- JOBID: Job ID (A)
- CARRIERID: Carrier ID (A)
- FROMPTN: From Port Number (U1)
- TOPTN: To Port Number (U1)

S4F2 - Transfer Job Create Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F3 - Transfer Job Data¶

Format:
{L:n
  {L:5
    JOBID
    CARRIERID
    FROMPTN
    TOPTN
    JOBST
  }
}

Where:
- JOBID: Job ID (A)
- CARRIERID: Carrier ID (A)
- FROMPTN: From Port Number (U1)
- TOPTN: To Port Number (U1)
- JOBST: Job State (U1)
  - 0: Queued
  - 1: Selected
  - 2: Executing
  - 3: Completed
  - 4: Canceled
  - 5: Aborted
  - 6: Failed

S4F4 - Transfer Job Data Acknowledge¶

Format:
ACKC4

Where:
- ACKC4: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S4F5 - Transfer Command¶

Format:
{L:3
  DATAID
  COMMCODE
  {L:n
    PARAMETER_1
    PARAMETER_2
    ...
    PARAMETER_n
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- COMMCODE: Command Code (A)
  - "START": Start transfer
  - "STOP": Stop transfer
  - "PAUSE": Pause transfer
  - "RESUME": Resume transfer
  - "CANCEL": Cancel transfer
- PARAMETER: Command Parameters (various formats)

S4F6 - Transfer Command Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F7 - Transfer Job Pause¶

Format:
{L:2
  DATAID
  JOBID
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- JOBID: Job ID (A)

S4F8 - Transfer Job Pause Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F9 - Transfer Job Stop¶

Format:
{L:2
  DATAID
  JOBID
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- JOBID: Job ID (A)

S4F10 - Transfer Job Stop Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F11 - Transfer Job Abort¶

Format:
{L:2
  DATAID
  JOBID
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- JOBID: Job ID (A)

S4F12 - Transfer Job Abort Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F13 - Transfer Job Resume¶

Format:
{L:2
  DATAID
  JOBID
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- JOBID: Job ID (A)

S4F14 - Transfer Job Resume Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F15 - Transfer Job Status Request¶

Format:
{L:n
  JOBID_1
  JOBID_2
  ...
  JOBID_n
}

Where:
- JOBID: Job ID (A)

S4F16 - Transfer Job Status Response¶

Format:
{L:n
  {L:5
    JOBID
    CARRIERID
    FROMPTN
    TOPTN
    JOBST
  }
}

Where:
- JOBID: Job ID (A)
- CARRIERID: Carrier ID (A)
- FROMPTN: From Port Number (U1)
- TOPTN: To Port Number (U1)
- JOBST: Job State (U1)
  - 0: Queued
  - 1: Selected
  - 2: Executing
  - 3: Completed
  - 4: Canceled
  - 5: Aborted
  - 6: Failed

S4F17 - Transfer Job Priority Update¶

Format:
{L:3
  DATAID
  JOBID
  PRIORITY
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- JOBID: Job ID (A)
- PRIORITY: Transfer Priority (U1)

S4F18 - Transfer Job Priority Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F19 - Transfer Command¶

Format:
{L:4
  DATAID
  TRANSFERTYPE
  SOURCEID
  DESTID
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- TRANSFERTYPE: Transfer Type (U1)
  - 1: Material Transfer
  - 2: Carrier Transfer
  - 3: Substrate Transfer
- SOURCEID: Source Location ID (A)
- DESTID: Destination Location ID (A)

S4F20 - Transfer Command Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F21 - Enhanced Transfer Command¶

Format:
{L:5
  DATAID
  TRANSFERTYPE
  SOURCEID
  DESTID
  {L:n
    {L:2
      PARAMID
      PARAMVAL
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- TRANSFERTYPE: Transfer Type (U1)
  - 1: Material Transfer
  - 2: Carrier Transfer
  - 3: Substrate Transfer
- SOURCEID: Source Location ID (A)
- DESTID: Destination Location ID (A)
- PARAMID: Parameter ID (A)
- PARAMVAL: Parameter Value (any format)

S4F22 - Enhanced Transfer Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F23 - Transfer Status Send¶

Format:
{L:4
  DATAID
  TRANSFERID
  TRANSFERSTATUS
  {L:n
    {L:2
      STATID
      STATVAL
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- TRANSFERID: Transfer ID (A)
- TRANSFERSTATUS: Transfer Status (U1)
  - 0: Idle
  - 1: Executing
  - 2: Paused
  - 3: Completed
  - 4: Failed
- STATID: Status ID (A)
- STATVAL: Status Value (any format)

S4F24 - Transfer Status Acknowledge¶

Format:
{L:2
  DATAID
  HCACK
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- HCACK: Host Command Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Invalid command
  - 2: Cannot perform now
  - 3: At least one parameter invalid
  - 4: Acknowledge after completion
  - 5: Rejected, already in desired condition
  - 6: No such object exists

S4F25 - Material Status Request¶

Format:
{L:n
  MATERIALID_1
  MATERIALID_2
  ...
  MATERIALID_n
}

Where:
- MATERIALID: Material ID (A)

S4F26 - Material Status Response¶

Format:
{L:n
  {L:4
    MATERIALID
    MATERIALTYPE
    LOCATION
    {L:m
      {L:2
        ATTRID
        ATTRVAL
      }
    }
  }
}

Where:
- MATERIALID: Material ID (A)
- MATERIALTYPE: Material Type (A)
- LOCATION: Current Location (A)
- ATTRID: Attribute ID (A)
- ATTRVAL: Attribute Value (any format)

Stream 5: Exception Reporting¶

Purpose: Alarm and exception handling

Message	Direction	Description
S5F1	← Equipment	Alarm Report Send
S5F2	→ Equipment	Alarm Report Acknowledge
S5F3	→ Equipment	En/Disable Alarm Send
S5F4	← Equipment	En/Disable Alarm Acknowledge
S5F5	→ Equipment	List Alarms Request
S5F6	← Equipment	List Alarms Response
S5F7	→ Equipment	List Enabled Alarm Request
S5F8	← Equipment	List Enabled Alarm Response

S5F1 - Alarm Report Send¶

Format:
{L:3
  ALCD
  ALID
  ALTX
}

Where:
- ALCD: Alarm Code (B[1])
  - Bit 0: Alarm Set (1) or Clear (0)
  - Bit 7: Alarm (1) or Warning (0)
- ALID: Alarm ID (U1, U2, U4, or A)
- ALTX: Alarm Text (A[120])

S5F2 - Alarm Report Acknowledge¶

Format:
ACKC5

Where:
- ACKC5: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S5F3 - Enable/Disable Alarm Send¶

Format:
{L:2
  ALED
  {L:n
    ALID_1
    ALID_2
    ...
    ALID_n
  }
}

Where:
- ALED: Alarm Enable/Disable (B[1])
  - 128 (0x80): Enable
  - 0: Disable
- ALID: Alarm ID (U1, U2, U4, or A)

S5F4 - Enable/Disable Alarm Acknowledge¶

Format:
ACKC5

Where:
- ACKC5: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S5F5 - List Alarms Request¶

Format: <none> (empty data)

S5F6 - List Alarms Response¶

Format:
{L:n
  ALID_1
  ALID_2
  ...
  ALID_n
}

Where:
- ALID: Alarm ID (U1, U2, U4, or A)

S5F7 - List Enabled Alarm Request¶

Format: <none> (empty data)

S5F8 - List Enabled Alarm Response¶

Format:
{L:n
  ALID_1
  ALID_2
  ...
  ALID_n
}

Where:
- ALID: Alarm ID (U1, U2, U4, or A) - Only enabled alarms

Stream 6: Data Collection¶

Purpose: Process data collection and event reporting

Message	Direction	Description
S6F1	← Equipment	Trace Data Send
S6F2	→ Equipment	Trace Data Acknowledge
S6F3	← Equipment	Discrete Variable Data Send
S6F4	→ Equipment	Discrete Variable Data Acknowledge
S6F5	← Equipment	Multi-block Data Send
S6F6	→ Equipment	Multi-block Grant
S6F7	→ Equipment	Data Transfer Request
S6F8	← Equipment	Data Transfer Response
S6F11	← Equipment	Event Report Send
S6F12	→ Equipment	Event Report Acknowledge
S6F15	→ Equipment	Event Report Request
S6F16	← Equipment	Event Report Response
S6F19	→ Equipment	Individual Report Request
S6F20	← Equipment	Individual Report Response
S6F21	→ Equipment	Annotated Individual Report Request
S6F22	← Equipment	Annotated Individual Report Response
S6F23	→ Equipment	Request Spooled Data
S6F24	← Equipment	Request Spooled Data Response
S6F25	→ Equipment	Data Set Upload
S6F26	← Equipment	Data Set Upload Acknowledge
S6F27	→ Equipment	Data Set Download Request
S6F28	← Equipment	Data Set Download Response
S6F29	→ Equipment	Data Set List Request
S6F30	← Equipment	Data Set List Response

S6F11 - Event Report Send¶

Format:
{L:3
  DATAID
  CEID
  {L:n
    {L:3
      RPTID
      {L:m
        V_1
        V_2
        ...
        V_m
      }
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- CEID: Collection Event ID (U1, U2, U4, or A)
- RPTID: Report ID (U1, U2, U4, or A)
- V: Variable Value (any format)

S6F12 - Event Report Acknowledge¶

Format:
ACKC6

Where:
- ACKC6: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S6F15 - Event Report Request¶

Format:
CEID

Where:
- CEID: Collection Event ID (U1, U2, U4, or A)

S6F16 - Event Report Response¶

Format:
{L:2
  DATAID
  {L:n
    {L:3
      RPTID
      {L:m
        V_1
        V_2
        ...
        V_m
      }
    }
  }
}

Where:
- DATAID: Data ID (U1, U2, U4, or A)
- RPTID: Report ID (U1, U2, U4, or A)
- V: Variable Value (any format)

S6F1 - Trace Data Send¶

Format:
{L:3
  TRID
  SMPLN
  {L:n
    SV_1
    SV_2
    ...
    SV_n
  }
}

Where:
- TRID: Trace Request ID (U1, U2, U4, or A)
- SMPLN: Sample Number (U1, U2, U4)
- SV: Sample Value (any format)

S6F2 - Trace Data Acknowledge¶

Format:
ACKC6

Where:
- ACKC6: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S6F3 - Discrete Variable Data Send¶

Format:
{L:2
  DVID
  DVVAL
}

Where:
- DVID: Discrete Variable ID (U1, U2, U4, or A)
- DVVAL: Discrete Variable Value (any format)

S6F4 - Discrete Variable Data Acknowledge¶

Format:
ACKC6

Where:
- ACKC6: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S6F5 - Multi-block Data Send¶

Format:
{L:3
  MID
  IDTYP
  {L:n
    DATA_1
    DATA_2
    ...
    DATA_n
  }
}

Where:
- MID: Message ID (U1, U2, U4, or A)
- IDTYP: ID Type (B[1])
  - 0: Data ID
  - 1: Equipment ID
- DATA: Data blocks (any format)

S6F6 - Multi-block Grant¶

Format:
GRANT

Where:
- GRANT: Grant Code (B[1])
  - 0: Granted
  - 1: Busy, try again
  - 2: No space

S6F7 - Data Transfer Request¶

Format:
{L:2
  DATALENGTH
  DATA
}

Where:
- DATALENGTH: Data Length (U1, U2, U4)
- DATA: Binary Data (B)

S6F8 - Data Transfer Response¶

Format:
ACK

Where:
- ACK: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

S6F19 - Individual Report Request¶

Format:
RPTID

Where:
- RPTID: Report ID (U1, U2, U4, or A)

S6F20 - Individual Report Response¶

Format:
{L:n
  V_1
  V_2
  ...
  V_n
}

Where:
- V: Variable Value (any format)

S6F21 - Annotated Individual Report Request¶

Format:
RPTID

Where:
- RPTID: Report ID (U1, U2, U4, or A)

S6F22 - Annotated Individual Report Response¶

Format:
{L:n
  {L:2
    VID
    V
  }
}

Where:
- VID: Variable ID (U1, U2, U4, or A)
- V: Variable Value (any format)

S6F23 - Request Spooled Data¶

Format:
DSID

Where:
- DSID: Data Set ID (U1, U2, U4, or A)

S6F24 - Request Spooled Data Response¶

Format:
{L:3
  DSID
  DSCOUNT
  {L:n
    DATA_1
    DATA_2
    ...
    DATA_n
  }
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSCOUNT: Data Set Count (U1, U2, U4)
- DATA: Spooled Data (any format)

S6F25 - Data Set Upload¶

Format:
{L:4
  DSID
  DSNAME
  DSTYPE
  {L:n
    DATA_1
    DATA_2
    ...
    DATA_n
  }
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSNAME: Data Set Name (A)
- DSTYPE: Data Set Type (U1)
  - 0: Process data
  - 1: Equipment data
  - 2: Alarm data
  - 3: Event data
- DATA: Data Set Content (any format)

S6F26 - Data Set Upload Acknowledge¶

Format:
{L:2
  DSID
  DSUPACK
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSUPACK: Data Set Upload Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Data set already exists
  - 3: No space available

S6F27 - Data Set Download Request¶

Format:
{L:2
  DSID
  DSNAME
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSNAME: Data Set Name (A)

S6F28 - Data Set Download Response¶

Format:
{L:4
  DSID
  DSNAME
  DSTYPE
  {L:n
    DATA_1
    DATA_2
    ...
    DATA_n
  }
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSNAME: Data Set Name (A)
- DSTYPE: Data Set Type (U1)
- DATA: Data Set Content (any format)

S6F29 - Data Set List Request¶

Format: <none> (empty data)

S6F30 - Data Set List Response¶

Format:
{L:n
  {L:3
    DSID
    DSNAME
    DSTYPE
  }
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSNAME: Data Set Name (A)
- DSTYPE: Data Set Type (U1)
  - 0: Process data
  - 1: Equipment data
  - 2: Alarm data
  - 3: Event data

Stream 7: Process Program Management¶

Purpose: Recipe and process program handling

Message	Direction	Description
S7F1	→ Equipment	Process Program Load Inquire
S7F2	← Equipment	Process Program Load Grant
S7F3	→ Equipment	Process Program Send
S7F4	← Equipment	Process Program Acknowledge
S7F5	→ Equipment	Process Program Request
S7F6	← Equipment	Process Program Data
S7F17	→ Equipment	Delete Process Program Send
S7F18	← Equipment	Delete Process Program Acknowledge
S7F19	→ Equipment	Current EPPD Request
S7F20	← Equipment	Current EPPD Data
S7F21	→ Equipment	Process Program Directory Request
S7F22	← Equipment	Process Program Directory Response
S7F23	→ Equipment	Process Program Upload
S7F24	← Equipment	Process Program Upload Acknowledge
S7F25	→ Equipment	Process Program Status Request
S7F26	← Equipment	Process Program Status Response
S7F27	→ Equipment	Process Program Execute
S7F28	← Equipment	Process Program Execute Acknowledge
S7F29	→ Equipment	Process Program Stop
S7F30	← Equipment	Process Program Stop Acknowledge
S7F31	→ Equipment	Process Program Pause
S7F32	← Equipment	Process Program Pause Acknowledge
S7F33	→ Equipment	Process Program Resume
S7F34	← Equipment	Process Program Resume Acknowledge
S7F35	→ Equipment	Process Program Variable Request
S7F36	← Equipment	Process Program Variable Response
S7F37	→ Equipment	Process Program Variable Send
S7F38	← Equipment	Process Program Variable Acknowledge
S7F39	→ Equipment	Recipe Validation Request
S7F40	← Equipment	Recipe Validation Response
S7F41	→ Equipment	Recipe Parameter Request
S7F42	← Equipment	Recipe Parameter Response
S7F43	→ Equipment	Recipe Parameter Set
S7F44	← Equipment	Recipe Parameter Set Acknowledge

S7F1 - Process Program Load Inquire¶

Format:
{L:2
  PPID
  LENGTH
}

Where:
- PPID: Process Program ID (A)
- LENGTH: Length of Process Program (U1, U2, U4)

S7F2 - Process Program Load Grant¶

Format:
GRANT

Where:
- GRANT: Grant Code (B[1])
  - 0: OK
  - 1: Busy, try again
  - 2: No space
  - 3: Invalid PPID
  - 4: Mode not supported
  - 5: Communication not available
  - 6: PPID already exists

S7F3 - Process Program Send¶

Format:
{L:2
  PPID
  PPBODY
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)

S7F4 - Process Program Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F5 - Process Program Request¶

Format:
PPID

Where:
- PPID: Process Program ID (A)

S7F6 - Process Program Data¶

Format:
{L:2
  PPID
  PPBODY
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)

S7F17 - Delete Process Program Send¶

Format:
{L:n
  PPID_1
  PPID_2
  ...
  PPID_n
}

Where:
- PPID: Process Program ID (A)

S7F18 - Delete Process Program Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F19 - Current EPPD Request¶

Format: <none> (empty data)

S7F20 - Current EPPD Data¶

Format:
{L:n
  {L:2
    PPID
    {L:m
      PARAMETER_1
      PARAMETER_2
      ...
      PARAMETER_m
    }
  }
}

Where:
- PPID: Process Program ID (A)
- PARAMETER: Process Parameter (any format)

S7F21 - Process Program Directory Request¶

Format: <none> (empty data)

S7F22 - Process Program Directory Response¶

Format:
{L:n
  PPID_1
  PPID_2
  ...
  PPID_n
}

Where:
- PPID: Process Program ID (A)

S7F23 - Process Program Upload¶

Format:
{L:3
  PPID
  PPBODY
  PPFORMAT
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)
- PPFORMAT: Process Program Format (U1)
  - 0: ASCII
  - 1: Binary
  - 2: Structured

S7F24 - Process Program Upload Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F25 - Process Program Status Request¶

Format:
PPID

Where:
- PPID: Process Program ID (A)

S7F26 - Process Program Status Response¶

Format:
{L:3
  PPID
  PPSTATUS
  PPSIZE
}

Where:
- PPID: Process Program ID (A)
- PPSTATUS: Process Program Status (U1)
  - 0: Not exists
  - 1: Exists
  - 2: Active
  - 3: Paused
- PPSIZE: Process Program Size (U1, U2, U4)

S7F27 - Process Program Execute¶

Format:
{L:2
  PPID
  {L:n
    PARAMETER_1
    PARAMETER_2
    ...
    PARAMETER_n
  }
}

Where:
- PPID: Process Program ID (A)
- PARAMETER: Execution Parameters (any format)

S7F28 - Process Program Execute Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F29 - Process Program Stop¶

Format:
PPID

Where:
- PPID: Process Program ID (A)

S7F30 - Process Program Stop Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F31 - Process Program Pause¶

Format:
PPID

Where:
- PPID: Process Program ID (A)

S7F32 - Process Program Pause Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F33 - Process Program Resume¶

Format:
PPID

Where:
- PPID: Process Program ID (A)

S7F34 - Process Program Resume Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F35 - Process Program Variable Request¶

Format:
{L:2
  PPID
  {L:n
    PPVARID_1
    PPVARID_2
    ...
    PPVARID_n
  }
}

Where:
- PPID: Process Program ID (A)
- PPVARID: Process Program Variable ID (A)

S7F36 - Process Program Variable Response¶

Format:
{L:2
  PPID
  {L:n
    {L:2
      PPVARID
      PPVARVAL
    }
  }
}

Where:
- PPID: Process Program ID (A)
- PPVARID: Process Program Variable ID (A)
- PPVARVAL: Process Program Variable Value (any format)

S7F37 - Process Program Variable Send¶

Format:
{L:2
  PPID
  {L:n
    {L:2
      PPVARID
      PPVARVAL
    }
  }
}

Where:
- PPID: Process Program ID (A)
- PPVARID: Process Program Variable ID (A)
- PPVARVAL: Process Program Variable Value (any format)

S7F38 - Process Program Variable Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

S7F39 - Recipe Validation Request¶

Format:
{L:2
  PPID
  PPBODY
}

Where:
- PPID: Process Program ID (A)
- PPBODY: Process Program Body (A or B)

S7F40 - Recipe Validation Response¶

Format:
{L:3
  PPID
  VALRESULT
  {L:n
    ERROR_1
    ERROR_2
    ...
    ERROR_n
  }
}

Where:
- PPID: Process Program ID (A)
- VALRESULT: Validation Result (B[1])
  - 0: Valid
  - 1: Invalid
- ERROR: Validation Error (A)

S7F41 - Recipe Parameter Request¶

Format:
{L:2
  PPID
  {L:n
    PARAMID_1
    PARAMID_2
    ...
    PARAMID_n
  }
}

Where:
- PPID: Process Program ID (A)
- PARAMID: Parameter ID (A)

S7F42 - Recipe Parameter Response¶

Format:
{L:2
  PPID
  {L:n
    {L:3
      PARAMID
      PARAMVAL
      PARAMUNIT
    }
  }
}

Where:
- PPID: Process Program ID (A)
- PARAMID: Parameter ID (A)
- PARAMVAL: Parameter Value (any format)
- PARAMUNIT: Parameter Unit (A)

S7F43 - Recipe Parameter Set¶

Format:
{L:2
  PPID
  {L:n
    {L:3
      PARAMID
      PARAMVAL
      PARAMUNIT
    }
  }
}

Where:
- PPID: Process Program ID (A)
- PARAMID: Parameter ID (A)
- PARAMVAL: Parameter Value (any format)
- PARAMUNIT: Parameter Unit (A)

S7F44 - Recipe Parameter Set Acknowledge¶

Format:
ACKC7

Where:
- ACKC7: Acknowledge Code (B[1])
  - 0: Accepted
  - 1: Permission not granted
  - 2: Length error
  - 3: Matrix overflow
  - 4: PPID not found
  - 5: Mode unsupported
  - 6: Communication not available
  - 7: Busy

Stream 8: Control Program Management¶

Purpose: Control program and recipe management

Message	Direction	Description
S8F1	→ Equipment	Format ECP
S8F2	← Equipment	Format ECP Acknowledge
S8F3	→ Equipment	ECP Data
S8F4	← Equipment	ECP Data Acknowledge

S8F1 - Format ECP¶

Format:
{L:2
  ECPID
  ECPBODY
}

Where:
- ECPID: Equipment Control Program ID (A)
- ECPBODY: Equipment Control Program Body (A or B)

S8F2 - Format ECP Acknowledge¶

Format:
ACKC8

Where:
- ACKC8: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: ECP ID already exists
  - 3: No space available

S8F3 - ECP Data¶

Format:
{L:2
  ECPID
  ECPBODY
}

Where:
- ECPID: Equipment Control Program ID (A)
- ECPBODY: Equipment Control Program Body (A or B)

S8F4 - ECP Data Acknowledge¶

Format:
ACKC8

Where:
- ACKC8: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: ECP ID not found
  - 3: Format error

Stream 9: System Errors¶

Purpose: Communication error reporting

Message	Direction	Description
S9F1	← Equipment	Unrecognized Device ID
S9F3	← Equipment	Unrecognized Stream Type
S9F5	← Equipment	Unrecognized Function Type
S9F7	← Equipment	Illegal Data
S9F9	← Equipment	Transaction Timer Timeout
S9F11	← Equipment	Data Too Long
S9F13	← Equipment	Conversation Timeout

S9F1 - Unrecognized Device ID¶

Format:
MHEAD

Where:
- MHEAD: Message Header (B[10])
  The complete 10-byte header of the unrecognized message

S9F3 - Unrecognized Stream Type¶

Format:
MHEAD

Where:
- MHEAD: Message Header (B[10])
  The complete 10-byte header of the message with unrecognized stream type

S9F5 - Unrecognized Function Type¶

Format:
MHEAD

Where:
- MHEAD: Message Header (B[10])
  The complete 10-byte header of the message with unrecognized function type

S9F7 - Illegal Data¶

Format:
MHEAD

Where:
- MHEAD: Message Header (B[10])
  The complete 10-byte header of the message with illegal data

S9F9 - Transaction Timer Timeout¶

Format:
MHEAD

Where:
- MHEAD: Message Header (B[10])
  The complete 10-byte header of the message that timed out

S9F11 - Data Too Long¶

Format:
MHEAD

Where:
- MHEAD: Message Header (B[10])
  The complete 10-byte header of the message that was too long

S9F13 - Conversation Timeout¶

Format:
{L:2
  MEXP
  EDID
}

Where:
- MEXP: Message Expected (B[1])
  - Stream and Function of the expected message
- EDID: Equipment ID (U1, U2, U4, or A)
  - ID of the equipment that timed out

Stream 10: Terminal Services¶

Purpose: Operator interface communication

Message	Direction	Description
S10F1	→ Equipment	Terminal Request
S10F2	← Equipment	Terminal Response
S10F3	→ Equipment	Terminal Display, Single
S10F5	→ Equipment	Terminal Display, Multi-Block
S10F9	→ Equipment	Broadcast Display Request
S10F10	← Equipment	Broadcast Display Acknowledge

S10F1 - Terminal Request¶

Format:
{L:2
  TID
  TEXT
}

Where:
- TID: Terminal ID (B[1])
- TEXT: Text Message (A)

S10F2 - Terminal Response¶

Format:
{L:2
  TID
  TEXT
}

Where:
- TID: Terminal ID (B[1])
- TEXT: Response Text (A)

S10F3 - Terminal Display, Single¶

Format:
{L:2
  TID
  TEXT
}

Where:
- TID: Terminal ID (B[1])
- TEXT: Display Text (A)

S10F5 - Terminal Display, Multi-Block¶

Format:
{L:2
  TID
  {L:n
    TEXT_1
    TEXT_2
    ...
    TEXT_n
  }
}

Where:
- TID: Terminal ID (B[1])
- TEXT: Display Text Lines (A)

S10F9 - Broadcast Display Request¶

Format:
TEXT

Where:
- TEXT: Broadcast Message (A)

S10F10 - Broadcast Display Acknowledge¶

Format:
ACKC10

Where:
- ACKC10: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

Stream 12: Wafer Mapping¶

Purpose: Wafer map data handling

Message	Direction	Description
S12F1	→ Equipment	Map Setup Data Send
S12F2	← Equipment	Map Setup Data Acknowledge
S12F3	→ Equipment	Map Setup Data Request
S12F4	← Equipment	Map Setup Data Response
S12F5	→ Equipment	Map Transmit Inquire
S12F6	← Equipment	Map Transmit Grant
S12F7	→ Equipment	Map Data Send
S12F8	← Equipment	Map Data Acknowledge
S12F9	→ Equipment	Map Data Request
S12F10	← Equipment	Map Data Response
S12F11	→ Equipment	Map Data Request 2
S12F12	← Equipment	Map Data Response 2
S12F13	← Equipment	Map Error Report
S12F14	→ Equipment	Map Error Acknowledge
S12F15	→ Equipment	Map Sample Send
S12F16	← Equipment	Map Sample Acknowledge
S12F17	→ Equipment	Map Sample Request
S12F18	← Equipment	Map Sample Response
S12F19	→ Equipment	Map Update Send
S12F20	← Equipment	Map Update Acknowledge

S12F1 - Map Setup Data Send¶

Format:
{L:3
  MID
  IDTYP
  {L:n
    STRP_1
    STRP_2
    ...
    STRP_n
  }
}

Where:
- MID: Map ID (A)
- IDTYP: ID Type (B[1])
  - 0: Wafer ID
  - 1: Die ID
- STRP: Map Strip Data (various formats)

S12F2 - Map Setup Data Acknowledge¶

Format:
ACKC12

Where:
- ACKC12: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Map ID already exists
  - 3: No space available

S12F3 - Map Setup Data Request¶

Format:
MID

Where:
- MID: Map ID (A)

S12F4 - Map Setup Data Response¶

Format:
{L:3
  MID
  IDTYP
  {L:n
    STRP_1
    STRP_2
    ...
    STRP_n
  }
}

Where:
- MID: Map ID (A)
- IDTYP: ID Type (B[1])
- STRP: Map Strip Data (various formats)

S12F5 - Map Transmit Inquire¶

Format:
{L:2
  MID
  DATALENGTH
}

Where:
- MID: Map ID (A)
- DATALENGTH: Expected Data Length (U1, U2, U4)

S12F6 - Map Transmit Grant¶

Format:
GRANT

Where:
- GRANT: Grant Code (B[1])
  - 0: Granted
  - 1: Busy, try again
  - 2: No space
  - 3: Map ID not found

S12F7 - Map Data Send¶

Format:
{L:2
  MID
  BINLT
}

Where:
- MID: Map ID (A)
- BINLT: Binary Map Data (B)

S12F8 - Map Data Acknowledge¶

Format:
ACKC12

Where:
- ACKC12: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Map ID not found
  - 3: Data format error

S12F9 - Map Data Request¶

Format:
MID

Where:
- MID: Map ID (A)

S12F10 - Map Data Response¶

Format:
{L:2
  MID
  BINLT
}

Where:
- MID: Map ID (A)
- BINLT: Binary Map Data (B)

S12F13 - Map Error Report¶

Format:
{L:3
  MID
  MERLOC
  MERDESCRP
}

Where:
- MID: Map ID (A)
- MERLOC: Map Error Location (U1, U2, U4)
- MERDESCRP: Map Error Description (A)

S12F14 - Map Error Acknowledge¶

Format:
ACKC12

Where:
- ACKC12: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error

Stream 13: Data Set Management¶

Purpose: Advanced data set handling and management

Message	Direction	Description
S13F1	→ Equipment	Data Set Upload Request
S13F2	← Equipment	Data Set Upload Response
S13F3	→ Equipment	Data Set Download Request
S13F4	← Equipment	Data Set Download Response
S13F5	→ Equipment	Data Set Directory Request
S13F6	← Equipment	Data Set Directory Response
S13F7	→ Equipment	Data Set Delete Request
S13F8	← Equipment	Data Set Delete Response

S13F1 - Data Set Upload Request¶

Format:
{L:3
  DSID
  DSNAME
  DSTYPE
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSNAME: Data Set Name (A)
- DSTYPE: Data Set Type (U1)
  - 0: Process data
  - 1: Equipment data
  - 2: Alarm data
  - 3: Event data

S13F2 - Data Set Upload Response¶

Format:
{L:2
  DSID
  DSACK
}

Where:
- DSID: Data Set ID (U1, U2, U4, or A)
- DSACK: Data Set Acknowledge (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Data set already exists
  - 3: No space available

Stream 14: Object Services¶

Purpose: Object-oriented equipment control and management

Message	Direction	Description
S14F1	→ Equipment	Object Request
S14F2	← Equipment	Object Response
S14F3	→ Equipment	Object Attribute Request
S14F4	← Equipment	Object Attribute Response
S14F5	→ Equipment	Object Attribute Set
S14F6	← Equipment	Object Attribute Acknowledge

S14F1 - Object Request¶

Format:
{L:2
  OBJTYPE
  OBJID
}

Where:
- OBJTYPE: Object Type (A)
- OBJID: Object ID (A)

S14F2 - Object Response¶

Format:
{L:3
  OBJTYPE
  OBJID
  {L:n
    ATTRID_1
    ATTRID_2
    ...
    ATTRID_n
  }
}

Where:
- OBJTYPE: Object Type (A)
- OBJID: Object ID (A)
- ATTRID: Attribute ID (A)

Stream 15: Recipe Management¶

Purpose: Advanced recipe handling and validation

Message	Direction	Description
S15F1	→ Equipment	Recipe Upload Request
S15F2	← Equipment	Recipe Upload Response
S15F3	→ Equipment	Recipe Download Request
S15F4	← Equipment	Recipe Download Response
S15F5	→ Equipment	Recipe Validation Request
S15F6	← Equipment	Recipe Validation Response
S15F7	→ Equipment	Recipe Execute Request
S15F8	← Equipment	Recipe Execute Response

S15F1 - Recipe Upload Request¶

Format:
{L:3
  RECIPEID
  RECIPEBODY
  RECIPEFORMAT
}

Where:
- RECIPEID: Recipe ID (A)
- RECIPEBODY: Recipe Body (A or B)
- RECIPEFORMAT: Recipe Format (U1)
  - 0: ASCII
  - 1: Binary
  - 2: XML

S15F2 - Recipe Upload Response¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Recipe already exists
  - 3: No space available

S15F9 - Recipe Directory Request¶

Format: <none> (empty data)

S15F10 - Recipe Directory Response¶

Format:
{L:n
  RECIPEID_1
  RECIPEID_2
  ...
  RECIPEID_n
}

Where:
- RECIPEID: Recipe ID (A)

S15F11 - Recipe Delete Request¶

Format:
{L:n
  RECIPEID_1
  RECIPEID_2
  ...
  RECIPEID_n
}

Where:
- RECIPEID: Recipe ID (A)

S15F12 - Recipe Delete Response¶

Format:
{L:n
  {L:2
    RECIPEID
    ACKC15
  }
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F13 - Recipe Parameter Request¶

Format:
{L:2
  RECIPEID
  {L:n
    RCPPARNM_1
    RCPPARNM_2
    ...
    RCPPARNM_n
  }
}

Where:
- RECIPEID: Recipe ID (A)
- RCPPARNM: Recipe Parameter Name (A)

S15F14 - Recipe Parameter Response¶

Format:
{L:2
  RECIPEID
  {L:n
    {L:3
      RCPPARNM
      RCPPARVAL
      UNITS
    }
  }
}

Where:
- RECIPEID: Recipe ID (A)
- RCPPARNM: Recipe Parameter Name (A)
- RCPPARVAL: Recipe Parameter Value (various)
- UNITS: Units (A)

S15F15 - Recipe Parameter Set¶

Format:
{L:2
  RECIPEID
  {L:n
    {L:3
      RCPPARNM
      RCPPARVAL
      UNITS
    }
  }
}

Where:
- RECIPEID: Recipe ID (A)
- RCPPARNM: Recipe Parameter Name (A)
- RCPPARVAL: Recipe Parameter Value (various)
- UNITS: Units (A)

S15F16 - Recipe Parameter Set Acknowledge¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F17 - Recipe Status Request¶

Format:
RECIPEID

Where:
- RECIPEID: Recipe ID (A)

S15F18 - Recipe Status Response¶

Format:
{L:3
  RECIPEID
  RCPSTAT
  RCPVERS
}

Where:
- RECIPEID: Recipe ID (A)
- RCPSTAT: Recipe Status (U1)
  - 0: Not exists
  - 1: Available
  - 2: Active
  - 3: Paused
- RCPVERS: Recipe Version (A)

S15F19 - Recipe Copy Request¶

Format:
{L:2
  RECIPEID
  RCPNEWID
}

Where:
- RECIPEID: Recipe ID (A)
- RCPNEWID: Recipe New ID (A)

S15F20 - Recipe Copy Response¶

Format:
{L:2
  RCPNEWID
  ACKC15
}

Where:
- RCPNEWID: Recipe New ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F21 - Recipe Lock Request¶

Format:
{L:2
  RECIPEID
  LOCKTYPE
}

Where:
- RECIPEID: Recipe ID (A)
- LOCKTYPE: Lock Type (U1)
  - 0: Unlock
  - 1: Read lock
  - 2: Write lock
  - 3: Exclusive lock

S15F22 - Recipe Lock Response¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F23 - Recipe Attribute Request¶

Format:
{L:2
  RECIPEID
  {L:n
    RCPATTRID_1
    RCPATTRID_2
    ...
    RCPATTRID_n
  }
}

Where:
- RECIPEID: Recipe ID (A)
- RCPATTRID: Recipe Attribute ID (A)

S15F24 - Recipe Attribute Response¶

Format:
{L:2
  RECIPEID
  {L:n
    {L:2
      RCPATTRID
      RCPATTRDATA
    }
  }
}

Where:
- RECIPEID: Recipe ID (A)
- RCPATTRID: Recipe Attribute ID (A)
- RCPATTRDATA: Recipe Attribute Data (various)

S15F25 - Recipe Security Request¶

Format:
{L:3
  RECIPEID
  RCPSECCODE
  ACCESSMODE
}

Where:
- RECIPEID: Recipe ID (A)
- RCPSECCODE: Recipe Security Code (A)
- ACCESSMODE: Access Mode (U1)

S15F26 - Recipe Security Response¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F27 - Recipe Version Request¶

Format:
RECIPEID

Where:
- RECIPEID: Recipe ID (A)

S15F28 - Recipe Version Response¶

Format:
{L:3
  RECIPEID
  RCPVERS
  {L:n
    VERSIONHISTORY_1
    VERSIONHISTORY_2
    ...
    VERSIONHISTORY_n
  }
}

Where:
- RECIPEID: Recipe ID (A)
- RCPVERS: Recipe Version (A)
- VERSIONHISTORY: Version History (A)

S15F29 - Recipe Export Request¶

Format:
{L:3
  RECIPEID
  EXPORTFORMAT
  EXPORTOPTIONS
}

Where:
- RECIPEID: Recipe ID (A)
- EXPORTFORMAT: Export Format (U1)
  - 0: Native
  - 1: XML
  - 2: JSON
- EXPORTOPTIONS: Export Options (various)

S15F30 - Recipe Export Response¶

Format:
{L:3
  RECIPEID
  EXPORTDATA
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- EXPORTDATA: Export Data (A or B)
- ACKC15: Acknowledge Code (B[1])

S15F31 - Recipe Import Request¶

Format:
{L:4
  RECIPEID
  IMPORTFORMAT
  IMPORTDATA
  IMPORTOPTIONS
}

Where:
- RECIPEID: Recipe ID (A)
- IMPORTFORMAT: Import Format (U1)
- IMPORTDATA: Import Data (A or B)
- IMPORTOPTIONS: Import Options (various)

S15F32 - Recipe Import Response¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F33 - Recipe Template Request¶

Format:
TEMPLATETYPE

Where:
- TEMPLATETYPE: Template Type (A)

S15F34 - Recipe Template Response¶

Format:
{L:3
  TEMPLATETYPE
  TEMPLATEBODY
  TEMPLATEFORMAT
}

Where:
- TEMPLATETYPE: Template Type (A)
- TEMPLATEBODY: Template Body (A or B)
- TEMPLATEFORMAT: Template Format (U1)

S15F35 - Recipe Dependency Request¶

Format:
RECIPEID

Where:
- RECIPEID: Recipe ID (A)

S15F36 - Recipe Dependency Response¶

Format:
{L:2
  RECIPEID
  {L:n
    DEPENDENCY_1
    DEPENDENCY_2
    ...
    DEPENDENCY_n
  }
}

Where:
- RECIPEID: Recipe ID (A)
- DEPENDENCY: Recipe Dependency (A)

S15F37 - Recipe Schedule Request¶

Format:
{L:3
  RECIPEID
  SCHEDULETIME
  SCHEDULETYPE
}

Where:
- RECIPEID: Recipe ID (A)
- SCHEDULETIME: Schedule Time (A)
- SCHEDULETYPE: Schedule Type (U1)

S15F38 - Recipe Schedule Response¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F39 - Recipe Optimization Request¶

Format:
{L:3
  RECIPEID
  OPTIMIZATIONTYPE
  OPTIMIZATIONPARAMS
}

Where:
- RECIPEID: Recipe ID (A)
- OPTIMIZATIONTYPE: Optimization Type (U1)
- OPTIMIZATIONPARAMS: Optimization Parameters (various)

S15F40 - Recipe Optimization Response¶

Format:
{L:3
  RECIPEID
  OPTIMIZEDRECIPE
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- OPTIMIZEDRECIPE: Optimized Recipe (A or B)
- ACKC15: Acknowledge Code (B[1])

S15F41 - Recipe Simulation Request¶

Format:
{L:3
  RECIPEID
  SIMULATIONPARAMS
  SIMULATIONTYPE
}

Where:
- RECIPEID: Recipe ID (A)
- SIMULATIONPARAMS: Simulation Parameters (various)
- SIMULATIONTYPE: Simulation Type (U1)

S15F42 - Recipe Simulation Response¶

Format:
{L:3
  RECIPEID
  SIMULATIONRESULTS
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- SIMULATIONRESULTS: Simulation Results (various)
- ACKC15: Acknowledge Code (B[1])

S15F43 - Recipe Checkpoint Request¶

Format:
{L:2
  RECIPEID
  CHECKPOINTNAME
}

Where:
- RECIPEID: Recipe ID (A)
- CHECKPOINTNAME: Checkpoint Name (A)

S15F44 - Recipe Checkpoint Response¶

Format:
{L:3
  RECIPEID
  CHECKPOINTDATA
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- CHECKPOINTDATA: Checkpoint Data (various)
- ACKC15: Acknowledge Code (B[1])

S15F45 - Recipe Resume Request¶

Format:
{L:2
  RECIPEID
  CHECKPOINTNAME
}

Where:
- RECIPEID: Recipe ID (A)
- CHECKPOINTNAME: Checkpoint Name (A)

S15F46 - Recipe Resume Response¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

S15F47 - Recipe Performance Request¶

Format:
{L:2
  RECIPEID
  PERFORMANCEMETRICS
}

Where:
- RECIPEID: Recipe ID (A)
- PERFORMANCEMETRICS: Performance Metrics (various)

S15F48 - Recipe Performance Response¶

Format:
{L:3
  RECIPEID
  PERFORMANCEDATA
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- PERFORMANCEDATA: Performance Data (various)
- ACKC15: Acknowledge Code (B[1])

S15F49 - Recipe Audit Request¶

Format:
{L:3
  RECIPEID
  AUDITTYPE
  AUDITPARAMS
}

Where:
- RECIPEID: Recipe ID (A)
- AUDITTYPE: Audit Type (U1)
- AUDITPARAMS: Audit Parameters (various)

S15F50 - Recipe Audit Response¶

Format:
{L:3
  RECIPEID
  AUDITRESULTS
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- AUDITRESULTS: Audit Results (various)
- ACKC15: Acknowledge Code (B[1])

S15F51 - Recipe Backup Request¶

Format:
{L:3
  RECIPEID
  BACKUPTYPE
  BACKUPPARAMS
}

Where:
- RECIPEID: Recipe ID (A)
- BACKUPTYPE: Backup Type (U1)
- BACKUPPARAMS: Backup Parameters (various)

S15F52 - Recipe Backup Response¶

Format:
{L:3
  RECIPEID
  BACKUPDATA
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- BACKUPDATA: Backup Data (B)
- ACKC15: Acknowledge Code (B[1])

S15F53 - Recipe Restore Request¶

Format:
{L:3
  RECIPEID
  RESTOREDATA
  RESTOREOPTIONS
}

Where:
- RECIPEID: Recipe ID (A)
- RESTOREDATA: Restore Data (B)
- RESTOREOPTIONS: Restore Options (various)

S15F54 - Recipe Restore Response¶

Format:
{L:2
  RECIPEID
  ACKC15
}

Where:
- RECIPEID: Recipe ID (A)
- ACKC15: Acknowledge Code (B[1])

Stream 16: Processing Management¶

Purpose: Process control and monitoring

Message	Direction	Description
S16F1	→ Equipment	Process Start Request
S16F2	← Equipment	Process Start Response
S16F3	→ Equipment	Process Stop Request
S16F4	← Equipment	Process Stop Response
S16F5	→ Equipment	Process Status Request
S16F6	← Equipment	Process Status Response
S16F7	→ Equipment	Process Parameter Request
S16F8	← Equipment	Process Parameter Response
S16F9	→ Equipment	Process Job Status Request
S16F10	← Equipment	Process Job Status Response
S16F11	→ Equipment	Process Job Priority Request
S16F12	← Equipment	Process Job Priority Response
S16F13	→ Equipment	Process Job Queue Request
S16F14	← Equipment	Process Job Queue Response
S16F15	→ Equipment	Process Step Control Request
S16F16	← Equipment	Process Step Control Response
S16F17	→ Equipment	Process Data Request
S16F18	← Equipment	Process Data Response
S16F19	→ Equipment	Process Recipe Request
S16F20	← Equipment	Process Recipe Response
S16F21	→ Equipment	Process Material Request
S16F22	← Equipment	Process Material Response
S16F23	→ Equipment	Process Resource Request
S16F24	← Equipment	Process Resource Response
S16F25	→ Equipment	Process Event Report
S16F26	← Equipment	Process Event Acknowledge
S16F27	→ Equipment	Process Log Request
S16F28	← Equipment	Process Log Response
S16F29	→ Equipment	Process Control Request
S16F30	← Equipment	Process Control Response

S16F1 - Process Start Request¶

Format:
{L:2
  PROCESSID
  {L:n
    PARAMETER_1
    PARAMETER_2
    ...
    PARAMETER_n
  }
}

Where:
- PROCESSID: Process ID (A)
- PARAMETER: Process Parameters (any format)

S16F2 - Process Start Response¶

Format:
{L:2
  PROCESSID
  ACKC16
}

Where:
- PROCESSID: Process ID (A)
- ACKC16: Acknowledge Code (B[1])
  - 0: Acknowledged
  - 1: Error
  - 2: Process not found
  - 3: Equipment busy

S16F3 - Process Stop Request¶

Format:
PROCESSID

Where:
- PROCESSID: Process ID (A)

S16F4 - Process Stop Response¶

Format:
{L:2
  PROCESSID
  ACKC16
}

Where:
- PROCESSID: Process ID (A)
- ACKC16: Acknowledge Code (B[1])

S16F5 - Process Status Request¶

Format:
PROCESSID

Where:
- PROCESSID: Process ID (A)

S16F6 - Process Status Response¶

Format:
{L:3
  PROCESSID
  PRSTAT
  PRDATA
}

Where:
- PROCESSID: Process ID (A)
- PRSTAT: Process Status (U1)
- PRDATA: Process Data (various)

S16F7 - Process Parameter Request¶

Format:
{L:2
  PROCESSID
  {L:n
    PRPARNM_1
    PRPARNM_2
    ...
    PRPARNM_n
  }
}

Where:
- PROCESSID: Process ID (A)
- PRPARNM: Process Parameter Name (A)

S16F8 - Process Parameter Response¶

Format:
{L:2
  PROCESSID
  {L:n
    {L:3
      PRPARNM
      PRPARVAL
      UNITS
    }
  }
}

Where:
- PROCESSID: Process ID (A)
- PRPARNM: Process Parameter Name (A)
- PRPARVAL: Process Parameter Value (various)
- UNITS: Units (A)

S16F9 - Process Job Status Request¶

Format:
PJOBID

Where:
- PJOBID: Process Job ID (A)

S16F10 - Process Job Status Response¶

Format:
{L:4
  PJOBID
  PJOBST
  PRPROCESSTIME
  PRREMTIME
}

Where:
- PJOBID: Process Job ID (A)
- PJOBST: Process Job State (U1)
- PRPROCESSTIME: Process Time (U4)
- PRREMTIME: Remaining Time (U4)

S16F11 - Process Job Priority Request¶

Format:
{L:2
  PJOBID
  PRIORITY
}

Where:
- PJOBID: Process Job ID (A)
- PRIORITY: Priority (U1)

S16F12 - Process Job Priority Response¶

Format: {L:2 PJOBID ACKC16 }

Where: - PJOBID: Process Job ID (A) - ACKC16: Acknowledge Code (B[1])

#### **S16F13 - Process Job Queue Request**

Format: (empty data)

#### **S16F14 - Process Job Queue Response**

Format: {L:n {L:3 PJOBID PRIORITY PJOBST } }

Where: - PJOBID: Process Job ID (A) - PRIORITY: Priority (U1) - PJOBST: Process Job State (U1)

#### **S16F15 - Process Step Control Request**

Format: {L:3 PJOBID STEPID STEPCONTROL }

Where: - PJOBID: Process Job ID (A) - STEPID: Step ID (A) - STEPCONTROL: Step Control (U1)

#### **S16F16 - Process Step Control Response**

Format: {L:3 PJOBID STEPID ACKC16 }

Where: - PJOBID: Process Job ID (A) - STEPID: Step ID (A) - ACKC16: Acknowledge Code (B[1])

#### **S16F17 - Process Data Request**

Format: {L:2 PJOBID {L:n DATAID_1 DATAID_2 ... DATAID_n } }

Where: - PJOBID: Process Job ID (A) - DATAID: Data ID (A)

#### **S16F18 - Process Data Response**

Format: {L:2 PJOBID {L:n {L:3 DATAID DATAVALUE UNITS } } }

Where: - PJOBID: Process Job ID (A) - DATAID: Data ID (A) - DATAVALUE: Data Value (various) - UNITS: Units (A)

#### **S16F19 - Process Recipe Request**

Format: {L:2 PJOBID RECIPEID }

Where: - PJOBID: Process Job ID (A) - RECIPEID: Recipe ID (A)

#### **S16F20 - Process Recipe Response**

Format: {L:2 PJOBID ACKC16 }

Where: - PJOBID: Process Job ID (A) - ACKC16: Acknowledge Code (B[1])

#### **S16F21 - Process Material Request**

Format: {L:2 PJOBID {L:n MATID_1 MATID_2 ... MATID_n } }

Where: - PJOBID: Process Job ID (A) - MATID: Material ID (A)

#### **S16F22 - Process Material Response**

Format: {L:2 PJOBID {L:n {L:3 MATID MATSTATUS MATDATA } } }

Where: - PJOBID: Process Job ID (A) - MATID: Material ID (A) - MATSTATUS: Material Status (U1) - MATDATA: Material Data (various)

#### **S16F23 - Process Resource Request**

Format: {L:2 PJOBID {L:n RESOURCEID_1 RESOURCEID_2 ... RESOURCEID_n } }

Where: - PJOBID: Process Job ID (A) - RESOURCEID: Resource ID (A)

#### **S16F24 - Process Resource Response**

Format: {L:2 PJOBID {L:n {L:3 RESOURCEID RESOURCESTATUS RESOURCEDATA } } }

Where: - PJOBID: Process Job ID (A) - RESOURCEID: Resource ID (A) - RESOURCESTATUS: Resource Status (U1) - RESOURCEDATA: Resource Data (various)

#### **S16F25 - Process Event Report**

Format: {L:4 PJOBID EVENTTYPE EVENTDATA TIME }

Where: - PJOBID: Process Job ID (A) - EVENTTYPE: Event Type (U1) - EVENTDATA: Event Data (various) - TIME: Timestamp (A)

#### **S16F26 - Process Event Acknowledge**

Format: {L:2 PJOBID ACKC16 }

Where: - PJOBID: Process Job ID (A) - ACKC16: Acknowledge Code (B[1])

#### **S16F27 - Process Log Request**

Format: {L:3 PJOBID STARTTIME ENDTIME }

Where: - PJOBID: Process Job ID (A) - STARTTIME: Start Time (A) - ENDTIME: End Time (A)

#### **S16F28 - Process Log Response**

Format: {L:2 PJOBID {L:n {L:4 TIME LOGTYPE LOGDATA SEVERITY } } }

Where: - PJOBID: Process Job ID (A) - TIME: Timestamp (A) - LOGTYPE: Log Type (U1) - LOGDATA: Log Data (A) - SEVERITY: Severity Level (U1)

#### **S16F29 - Process Control Request**

Format: {L:3 PJOBID CONTROLTYPE CONTROLDATA }

Where: - PJOBID: Process Job ID (A) - CONTROLTYPE: Control Type (U1) - CONTROLDATA: Control Data (various)

#### **S16F30 - Process Control Response**

Format: {L:2 PJOBID ACKC16 }

Where: - PJOBID: Process Job ID (A) - ACKC16: Acknowledge Code (B[1])

### Stream 17: Clock Management
**Purpose**: Time synchronization and clock control

| Message | Direction | Description |
|---------|-----------|-------------|
| [S17F1](#s17f1---clock-set-request)   | → Equipment | Clock Set Request |
| [S17F2](#s17f2---clock-set-response)   | ← Equipment | Clock Set Response |
| [S17F3](#s17f3---clock-read-request)   | → Equipment | Clock Read Request |
| [S17F4](#s17f4---clock-read-response)   | ← Equipment | Clock Read Response |
| [S17F5](#s17f5---time-zone-set-request)   | → Equipment | Time Zone Set Request |
| [S17F6](#s17f6---time-zone-set-response)   | ← Equipment | Time Zone Set Response |

#### **S17F1 - Clock Set Request** {#s17f1---clock-set-request}

Format: {L:2 CLOCK TIMEZONE }

Where: - CLOCK: Clock Time (A[19]) format: "YYYY-MM-DD HH:MM:SS" - TIMEZONE: Time Zone (A)

#### **S17F2 - Clock Set Response**

Format: ACKC17

Where: - ACKC17: Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error - 2: Invalid time format

### Stream 18: Data Collection Management
**Purpose**: Advanced data collection configuration

| Message | Direction | Description |
|---------|-----------|-------------|
| S18F1   | → Equipment | Data Collection Setup |
| S18F2   | ← Equipment | Data Collection Setup Response |
| S18F3   | → Equipment | Data Collection Start |
| S18F4   | ← Equipment | Data Collection Start Response |
| S18F5   | → Equipment | Data Collection Stop |
| S18F6   | ← Equipment | Data Collection Stop Response |

#### **S18F1 - Data Collection Setup**

Format: {L:3 DCID DCPLAN {L:n VID_1 VID_2 ... VID_n } }

Where: - DCID: Data Collection ID (A) - DCPLAN: Data Collection Plan (A) - VID: Variable ID (U1, U2, U4, or A)

#### **S18F2 - Data Collection Setup Response**

Format: {L:2 DCID ACKC18 }

Where: - DCID: Data Collection ID (A) - ACKC18: Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error - 2: Invalid plan

### Stream 19: Inventory Management
**Purpose**: Equipment and material inventory tracking

| Message | Direction | Description |
|---------|-----------|-------------|
| S19F1   | → Equipment | Inventory Request |
| S19F2   | ← Equipment | Inventory Response |
| S19F3   | → Equipment | Inventory Update |
| S19F4   | ← Equipment | Inventory Update Response |
| S19F5   | → Equipment | Inventory Add Request |
| S19F6   | ← Equipment | Inventory Add Response |
| S19F7   | → Equipment | Inventory Remove Request |
| S19F8   | ← Equipment | Inventory Remove Response |
| S19F9   | → Equipment | Inventory Status Request |
| S19F10  | ← Equipment | Inventory Status Response |
| S19F11  | → Equipment | Inventory Move Request |
| S19F12  | ← Equipment | Inventory Move Response |
| S19F13  | → Equipment | Inventory Search Request |
| S19F14  | ← Equipment | Inventory Search Response |
| S19F15  | → Equipment | Inventory Lock Request |
| S19F16  | ← Equipment | Inventory Lock Response |
| S19F17  | → Equipment | Inventory History Request |
| S19F18  | ← Equipment | Inventory History Response |
| S19F19  | → Equipment | Inventory Audit Request |
| S19F20  | ← Equipment | Inventory Audit Response |

#### **S19F1 - Inventory Request**

Format: {L:n INVTYPE_1 INVTYPE_2 ... INVTYPE_n }

Where: - INVTYPE: Inventory Type (A) - "SUBSTRATE": Substrate inventory - "CARRIER": Carrier inventory - "TOOL": Tool inventory

#### **S19F2 - Inventory Response**

Format: {L:n {L:3 INVTYPE INVID INVDATA } }

Where: - INVTYPE: Inventory Type (A) - INVID: Inventory ID (A) - INVDATA: Inventory Data (any format)

#### **S19F3 - Inventory Update**

Format: {L:3 INVTYPE INVID INVDATA }

Where: - INVTYPE: Inventory Type (A) - INVID: Inventory ID (A) - INVDATA: Inventory Data (any format)

#### **S19F4 - Inventory Update Response**

Format: {L:2 INVID ACKC19 }

Where: - INVID: Inventory ID (A) - ACKC19: Acknowledge Code (B[1])

#### **S19F5 - Inventory Add Request**

Format: {L:4 INVTYPE INVID INVDATA LOCATION }

Where: - INVTYPE: Inventory Type (A) - INVID: Inventory ID (A) - INVDATA: Inventory Data (any format) - LOCATION: Location (A)

#### **S19F6 - Inventory Add Response**

Format: {L:2 INVID ACKC19 }

Where: - INVID: Inventory ID (A) - ACKC19: Acknowledge Code (B[1])

#### **S19F7 - Inventory Remove Request**

Format: {L:2 INVTYPE INVID }

Where: - INVTYPE: Inventory Type (A) - INVID: Inventory ID (A)

#### **S19F8 - Inventory Remove Response**

Format: {L:2 INVID ACKC19 }

Where: - INVID: Inventory ID (A) - ACKC19: Acknowledge Code (B[1])

#### **S19F9 - Inventory Status Request**

Format: INVID

Where: - INVID: Inventory ID (A)

#### **S19F10 - Inventory Status Response**

Format: {L:4 INVID INVSTATUS LOCATION INVDATA }

Where: - INVID: Inventory ID (A) - INVSTATUS: Inventory Status (U1) - LOCATION: Location (A) - INVDATA: Inventory Data (any format)

#### **S19F11 - Inventory Move Request**

Format: {L:3 INVID SRCLOCATION DESTLOCATION }

Where: - INVID: Inventory ID (A) - SRCLOCATION: Source Location (A) - DESTLOCATION: Destination Location (A)

#### **S19F12 - Inventory Move Response**

Format: {L:2 INVID ACKC19 }

Where: - INVID: Inventory ID (A) - ACKC19: Acknowledge Code (B[1])

#### **S19F13 - Inventory Search Request**

Format: {L:3 INVTYPE SEARCHCRITERIA SEARCHOPTIONS }

Where: - INVTYPE: Inventory Type (A) - SEARCHCRITERIA: Search Criteria (any format) - SEARCHOPTIONS: Search Options (any format)

#### **S19F14 - Inventory Search Response**

Format: {L:n {L:4 INVID INVTYPE LOCATION INVDATA } }

Where: - INVID: Inventory ID (A) - INVTYPE: Inventory Type (A) - LOCATION: Location (A) - INVDATA: Inventory Data (any format)

#### **S19F15 - Inventory Lock Request**

Format: {L:3 INVID LOCKTYPE LOCKDURATION }

Where: - INVID: Inventory ID (A) - LOCKTYPE: Lock Type (U1) - LOCKDURATION: Lock Duration (U4)

#### **S19F16 - Inventory Lock Response**

Format: {L:2 INVID ACKC19 }

Where: - INVID: Inventory ID (A) - ACKC19: Acknowledge Code (B[1])

#### **S19F17 - Inventory History Request**

Format: {L:3 INVID STARTTIME ENDTIME }

Where: - INVID: Inventory ID (A) - STARTTIME: Start Time (A) - ENDTIME: End Time (A)

#### **S19F18 - Inventory History Response**

Format: {L:2 INVID {L:n {L:4 TIME ACTION LOCATION INVDATA } } }

Where: - INVID: Inventory ID (A) - TIME: Timestamp (A) - ACTION: Action Type (A) - LOCATION: Location (A) - INVDATA: Inventory Data (any format)

#### **S19F19 - Inventory Audit Request**

Format: {L:2 INVTYPE AUDITTYPE }

Where: - INVTYPE: Inventory Type (A) - AUDITTYPE: Audit Type (U1)

#### **S19F20 - Inventory Audit Response**

Format: {L:3 INVTYPE AUDITRESULTS ACKC19 }

Where: - INVTYPE: Inventory Type (A) - AUDITRESULTS: Audit Results (any format) - ACKC19: Acknowledge Code (B[1])

### Stream 20: Substrate Transfer (SEMI-E157)
**Purpose**: Advanced substrate transfer operations

| Message | Direction | Description |
|---------|-----------|-------------|
| [S20F1](#s20f1---transfer-request)   | → Equipment | Transfer Request |
| [S20F2](#s20f2---transfer-response)   | ← Equipment | Transfer Response |
| [S20F3](#s20f3---transfer-status-request)   | → Equipment | Transfer Status Request |
| [S20F4](#s20f4---transfer-status-response)   | ← Equipment | Transfer Status Response |
| [S20F5](#s20f5---transfer-abort-request)   | → Equipment | Transfer Abort Request |
| [S20F6](#s20f6---transfer-abort-response)   | ← Equipment | Transfer Abort Response |
| [S20F7](#s20f7---transfer-pause-request)   | → Equipment | Transfer Pause Request |
| [S20F8](#s20f8---transfer-pause-response)   | ← Equipment | Transfer Pause Response |
| [S20F9](#s20f9---transfer-resume-request)   | → Equipment | Transfer Resume Request |
| [S20F10](#s20f10---transfer-resume-response)  | ← Equipment | Transfer Resume Response |
| [S20F11](#s20f11---transfer-queue-request)  | → Equipment | Transfer Queue Request |
| [S20F12](#s20f12---transfer-queue-response)  | ← Equipment | Transfer Queue Response |
| [S20F13](#s20f13---transfer-priority-request)  | → Equipment | Transfer Priority Request |
| [S20F14](#s20f14---transfer-priority-response)  | ← Equipment | Transfer Priority Response |
| [S20F15](#s20f15---transfer-route-request)  | → Equipment | Transfer Route Request |
| [S20F16](#s20f16---transfer-route-response)  | ← Equipment | Transfer Route Response |
| [S20F17](#s20f17---transfer-schedule-request)  | → Equipment | Transfer Schedule Request |
| [S20F18](#s20f18---transfer-schedule-response)  | ← Equipment | Transfer Schedule Response |
| [S20F19](#s20f19---transfer-log-request)  | → Equipment | Transfer Log Request |
| [S20F20](#s20f20---transfer-log-response)  | ← Equipment | Transfer Log Response |
| [S20F21](#s20f21---transfer-config-request)  | → Equipment | Transfer Config Request |
| [S20F22](#s20f22---transfer-config-response)  | ← Equipment | Transfer Config Response |
| [S20F23](#s20f23---transfer-monitor-request)  | → Equipment | Transfer Monitor Request |
| [S20F24](#s20f24---transfer-monitor-response)  | ← Equipment | Transfer Monitor Response |
| [S20F25](#s20f25---transfer-resource-request)  | → Equipment | Transfer Resource Request |
| [S20F26](#s20f26---transfer-resource-response)  | ← Equipment | Transfer Resource Response |
| [S20F27](#s20f27---transfer-event-report)  | → Equipment | Transfer Event Report |
| [S20F28](#s20f28---transfer-event-acknowledge)  | ← Equipment | Transfer Event Acknowledge |
| [S20F29](#s20f29---transfer-optimization-request)  | → Equipment | Transfer Optimization Request |
| [S20F30](#s20f30---transfer-optimization-response)  | ← Equipment | Transfer Optimization Response |
| [S20F31](#s20f31---transfer-history-request)  | → Equipment | Transfer History Request |
| [S20F32](#s20f32---transfer-history-response)  | ← Equipment | Transfer History Response |
| [S20F33](#s20f33---transfer-performance-request)  | → Equipment | Transfer Performance Request |
| [S20F34](#s20f34---transfer-performance-response)  | ← Equipment | Transfer Performance Response |

#### **S20F1 - Transfer Request** {#s20f1---transfer-request}

Format: {L:4 TRANSFERID SOURCEID DESTID TRANSFERTYPE }

Where: - TRANSFERID: Transfer ID (A) - SOURCEID: Source Location ID (A) - DESTID: Destination Location ID (A) - TRANSFERTYPE: Transfer Type (U1) - 0: Move - 1: Copy - 2: Exchange

#### **S20F2 - Transfer Response** {#s20f2---transfer-response}

Format: {L:2 TRANSFERID ACKC20 }

Where: - TRANSFERID: Transfer ID (A) - ACKC20: Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error - 2: Invalid location - 3: Transfer not possible

### Stream 21: Material Transfer Management
**Purpose**: High-level material transfer coordination

| Message | Direction | Description |
|---------|-----------|-------------|
| S21F1   | → Equipment | Material Transfer Plan |
| S21F2   | ← Equipment | Material Transfer Plan Response |
| S21F3   | → Equipment | Material Transfer Execute |
| S21F4   | ← Equipment | Material Transfer Execute Response |
| S21F5   | → Equipment | Material Tracking Request |
| S21F6   | ← Equipment | Material Tracking Response |
| S21F7   | → Equipment | Material Location Request |
| S21F8   | ← Equipment | Material Location Response |
| S21F9   | → Equipment | Material History Request |
| S21F10  | ← Equipment | Material History Response |
| S21F11  | → Equipment | Material Routing Request |
| S21F12  | ← Equipment | Material Routing Response |
| S21F13  | → Equipment | Material Processing Request |
| S21F14  | ← Equipment | Material Processing Response |
| S21F15  | → Equipment | Material Quality Request |
| S21F16  | ← Equipment | Material Quality Response |
| S21F17  | → Equipment | Material Recipe Request |
| S21F18  | ← Equipment | Material Recipe Response |
| S21F19  | → Equipment | Material Event Report |
| S21F20  | ← Equipment | Material Event Acknowledge |

#### **S21F1 - Material Transfer Plan**

Format: {L:3 PLANID {L:n {L:3 MATERIALID SOURCEID DESTID } } PRIORITY }

Where: - PLANID: Plan ID (A) - MATERIALID: Material ID (A) - SOURCEID: Source Location ID (A) - DESTID: Destination Location ID (A) - PRIORITY: Priority Level (U1) - 0: Low - 1: Normal - 2: High - 3: Critical

#### **S21F2 - Material Transfer Plan Response**

Format: {L:2 PLANID ACKC21 }

Where: - PLANID: Plan ID (A) - ACKC21: Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error - 2: Invalid plan - 3: Resource conflict

## Message Categories

### Equipment Status (Stream 1)
- Basic communication establishment
- Equipment state monitoring
- Online/Offline control

### Equipment Control (Stream 2)
- Configuration management
- Time synchronization
- Event reporting setup

### Material Management (Streams 3-4)
- Carrier and substrate tracking
- Transfer job management
- Material handling control

### Exception Handling (Stream 5)
- Alarm management
- Exception reporting
- Error notification

### Data Collection (Stream 6)
- Process data gathering
- Event monitoring
- Trace data collection

### Program Management (Stream 7)
- Recipe management
- Process program control
- EPPD handling

### System Services (Streams 9-10)
- Error reporting
- Terminal communication
- System diagnostics

### Advanced Features (Streams 12+)
- Wafer mapping
- Object services
- Recipe management
- Processing control

## Common Message Examples

### S1F13 - Establish Communications Request

Hex Format: Length: 00 00 00 0C (12 bytes) Header: 00 00 81 0D 00 00 xx xx xx xx Data: 01 00 (empty list)

SECS-II Format: {L:0} // Empty list

### S1F14 - Establish Communications Response

Hex Format: Length: 00 00 00 0D (13 bytes)
Header: 00 00 01 0E 00 00 xx xx xx xx Data: 21 01 00 (COMMACK = 0, accepted)

SECS-II Format: COMMACK = B[1] = 0 // Communication accepted

Or with model info: {L:2 COMMACK = B[1] = 0 {L:2 MDLN = A[20] = "EQUIPMENT_MODEL_NAME" SOFTREV = A[20] = "SOFTWARE_VERSION_1.0" } }

### S1F1 - Are You There Request

Hex Format: Length: 00 00 00 0A (10 bytes) Header: 00 00 81 01 00 00 xx xx xx xx Data: (empty)

SECS-II Format: (no data)

### S1F2 - Are You There Response

Hex Format: Length: 00 00 00 0A (10 bytes) Header: 00 00 01 02 00 00 xx xx xx xx Data: (empty)

SECS-II Format: (no data) or {L:0} (empty list)

### S5F1 - Alarm Report Example

Hex Format: Length: 00 00 00 1F (31 bytes) Header: 00 00 05 01 00 00 xx xx xx xx Data: 01 03 81 01 81 A1 01 01 41 0F Temperature Alarm

SECS-II Format: {L:3 ALCD = B[1] = 129 (0x81) // Alarm Set + Alarm Type ALID = U1[1] = 1 ALTX = A[15] = "Temperature Alarm" }

### S6F11 - Event Report Example

SECS-II Format: {L:3 DATAID = U4[1] = 12345 CEID = U2[1] = 1001 {L:1 {L:3 RPTID = U2[1] = 2001 {L:2 Temperature = F4[1] = 25.5 Pressure = F4[1] = 760.0 } } } }

### Data Type Format Examples

ASCII Text: A[10] = "TEST_VALUE" Hex: 41 0A 54 45 53 54 5F 56 41 4C 55 45

Binary Data: B[4] = 0x12345678 Hex: 21 04 12 34 56 78

Unsigned Int: U1[1] = 255 Hex: F1 01 FF

           U2[1] = 65535
            Hex: E1 02 FF FF

           U4[1] = 4294967295

SECS Data Item Definitions¶

This section provides definitions for all standard SECS data items used in message formats.

A¶

ABS - Absolute Position (F4, F8) - Absolute position coordinate

ACCESSMODE - Access Mode (U1) - 0: Read only - 1: Read/Write - 2: Write only

ACDS - Alarm Collection Definition Send (various) - Alarm collection definition data

ACKA - Acknowledge (B[1]) - General acknowledge code

ACKC10 - Terminal Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error

ACKC13 - Data Set Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error - 2: Data set already exists - 3: No space available

ACKC15 - Recipe Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error - 2: Recipe already exists - 3: No space available

ACKC3 - Carrier Acknowledge Code (B[1]) - 0: Completed successfully - 1: Command does not exist - 2: Cannot perform now - 3: At least one parameter invalid - 4: Acknowledge after completion - 5: Rejected, already in desired condition - 6: No such object exists

ACKC5 - Alarm Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error

ACKC6 - Data Collection Acknowledge Code (B[1]) - 0: Acknowledged - 1: Error

ACKC7 - Process Program Acknowledge Code (B[1]) - 0: Accepted - 1: Permission not granted - 2: Length error - 3: Matrix overflow - 4: PPID not found - 5: Mode unsupported - 6: Communication not available - 7: Busy

ACKC7A - Alternative Process Program Acknowledge Code (B[1]) - Same as ACKC7 with additional codes

AGENT - Agent Identifier (A) - Software agent identification

ALCD - Alarm Code (B[1]) - Bit 0: Alarm Set (1) or Clear (0) - Bit 7: Alarm (1) or Warning (0)

ALED - Alarm Enable/Disable (B[1]) - 128 (0x80): Enable - 0: Disable

ALID - Alarm ID (U1, U2, U4, or A) - Unique identifier for alarm

ALIDVECTOR - Alarm ID Vector (List of ALID) - Collection of alarm identifiers

ALTX - Alarm Text (A[120]) - Descriptive text for alarm

B-C¶

ASSGNID - Assignment ID (A) - Unique assignment identifier

ATTRDATA - Attribute Data (various) - Data value for object attribute

ATTRID - Attribute ID (U1, U2, U4, or A) - Identifier for object attribute

ATTRRELN - Attribute Relation (U1) - Relationship type between attributes

AUTOCLEAR_DISABLE - Auto Clear Disable (BOOLEAN) - Disable automatic clearing

AUTOCLOSE - Auto Close (BOOLEAN) - Automatic closing flag

AUTOPOST_DISABLE - Auto Post Disable (BOOLEAN) - Disable automatic posting

BCDS - Binary Collection Definition Send (B) - Binary collection definition data

BCEQU - Binary Collection Equipment (B) - Equipment binary collection data

BINLT - Binary Data (B) - Binary data content

BLKDEF - Block Definition (various) - Definition of data block structure

BPD - Bytes Per Die (U2) - Number of bytes per die

BYTMAX - Maximum Bytes (U4) - Maximum byte count

CAACK - Carrier Action Acknowledge (B[1]) - 0: Completed successfully - 1: Command does not exist - 2: Cannot perform now - 3: At least one parameter invalid

CARRIERACTION - Carrier Action (U1) - 1: Load - 2: Unload - 3: Transfer - 4: Map - 5: Clamp - 6: Unclamp

CARRIERID - Carrier ID (A) - Unique identifier for carrier

CARRIERSPEC - Carrier Specification (various) - Carrier specification data

CATTRDATA - Carrier Attribute Data (various) - Data for carrier attribute

CATTRID - Carrier Attribute ID (U1, U2, U4, or A) - Identifier for carrier attribute

CCEACK - Collection Event Change Acknowledge (B[1]) - Collection event change response

CCODE - Command Code (A) - Command identifier string

CEED - Collection Event Enable/Disable (BOOLEAN) - Enable or disable collection event

CEID - Collection Event ID (U1, U2, U4, or A) - Unique identifier for collection event

CEIDSTART - Collection Event ID Start (CEID) - Starting collection event ID

CEIDSTOP - Collection Event ID Stop (CEID) - Stopping collection event ID

CENAME - Collection Event Name (A) - Name of collection event

CEPACK - Collection Event Parameter Acknowledge (B[1]) - Collection event parameter response

CEPVAL - Collection Event Parameter Value (various) - Value of collection event parameter

CHKINFO - Check Information (A) - Information for checking/validation

CKPNT - Checkpoint (A) - Process checkpoint identifier

CMDA - Command Acknowledge (B[1]) - Command acknowledgment

CMDMAX - Command Maximum (U2) - Maximum command value

CNAME - Collection Name (A) - Name of data collection

COACK - Control Job Command Acknowledge (B[1]) - Control job command response

COLCT - Collection Count (U2) - Number of items in collection

COLHDR - Collection Header (various) - Header information for collection

COMMACK - Communication Acknowledge (B[1]) - 0: Accepted - 1: Denied, Try Again - 2: Denied, Permission Not Granted

COMPARISONOPERATOR - Comparison Operator (U1) - 0: Equal - 1: Not equal - 2: Less than - 3: Less than or equal - 4: Greater than - 5: Greater than or equal

CONDITION - Condition (A) - Condition specification

COPYID - Copy ID (A) - Identifier for copy operation

CPACK - Command Parameter Acknowledge (various) - Command parameter acknowledgment

CPNAME - Command Parameter Name (A) - Name of command parameter

CPVAL - Command Parameter Value (various) - Value of command parameter

D-E¶

CSAACK - Carrier Slot Assignment Acknowledge (B[1]) - Carrier slot assignment response

CTLJOBCMD - Control Job Command (A) - Control job command string

CTLJOBID - Control Job ID (A) - Unique identifier for control job

DATA - Data (various) - Generic data field

DATAACK - Data Acknowledge (B[1]) - Data acknowledgment

DATAID - Data ID (U1, U2, U4, or A) - Unique identifier for data

DATALENGTH - Data Length (U1, U2, U4) - Length of data in bytes

DATASEG - Data Segment (B) - Segment of larger data

DATASRC - Data Source (A) - Source of data

DATLC - Data Location (A) - Location of data

DELRSPSTAT - Delete Response Status (B[1]) - Status of delete operation

DIRRSPSTAT - Directory Response Status (B[1]) - Status of directory operation

DRACK - Define Report Acknowledge (B[1]) - 0: Acknowledged - 1: Denied, Insufficient space - 2: Denied, Invalid format - 3: Denied, At least one RPTID already defined - 4: Denied, At least one VID does not exist

DRRACK - Define Report Request Acknowledge (B[1]) - Define report request response

DSID - Data Set ID (U1, U2, U4, or A) - Unique identifier for data set

DSNAME - Data Set Name (A) - Name of data set

DSPER - Data Sample Period (U1, U2, U4) - Sampling period for data collection

DUTMS - Device Under Test Milliseconds (U4) - Time in milliseconds for device test

DVNAME - Discrete Variable Name (A) - Name of discrete variable

DVVAL - Discrete Variable Value (various) - Value of discrete variable

DVVALNAME - Discrete Variable Value Name (A) - Name for discrete variable value

EAC - Equipment Acknowledge Code (B[1]) - 0: Accepted - 1: Denied, At least one constant does not exist - 2: Denied, Busy - 3: Denied, At least one constant out of range

ECDEF - Equipment Constant Default (various) - Default value for equipment constant

ECID - Equipment Constant ID (U1, U2, U4, or A) - Unique identifier for equipment constant

ECMAX - Equipment Constant Maximum (various) - Maximum value for equipment constant

ECMIN - Equipment Constant Minimum (various) - Minimum value for equipment constant

ECNAME - Equipment Constant Name (A) - Name of equipment constant

ECV - Equipment Constant Value (various) - Value of equipment constant

EDID - Equipment ID (U1, U2, U4, or A) - Unique identifier for equipment

EMID - Equipment Module ID (A) - Identifier for equipment module

EPD - Equipment Parameter Data (various) - Equipment parameter information

EQID - Equipment ID (A) - Equipment identifier

EQNAME - Equipment Name (A) - Name of equipment

EQUSERID - Equipment User ID (A) - User identifier for equipment access

ERACK - Enable/Disable Event Report Acknowledge (B[1]) - 0: Acknowledged - 1: Denied, At least one CEID does not exist - 2: Denied, Busy

ERRCODE - Error Code (U2) - Numeric error code

ERRTEXT - Error Text (A) - Descriptive error text

ERRW7 - Error W7 (B[1]) - W7-specific error code

EVNTSRC - Event Source (A) - Source of event

EVNTSRC2 - Event Source 2 (A) - Secondary event source

EXID - Exception ID (U4) - Exception identifier

EXMESSAGE - Exception Message (A) - Exception message text

EXRECVRA - Exception Recovery Action (A) - Recovery action for exception

EXTYPE - Exception Type (U1) - Type of exception

F-L¶

FCNID - Function ID (B[1]) - SECS function identifier

FFROT - Flat Finder Rotation (F4) - Rotation angle for flat finder

FILDAT - File Data (B) - File content data

FNLOC - Final Location (A) - Final destination location

FRMLEN - Frame Length (U2) - Length of data frame

GETRSPSTAT - Get Response Status (B[1]) - Status of get operation

GOILACK - Go Online Acknowledge (B[1]) - Go online response

GRANT - Grant Code (B[1]) - 0: Granted - 1: Busy, try again - 2: No space

GRANT6 - Grant Code 6 (B[1]) - Stream 6 specific grant code

GRNT1 - Grant 1 (B[1]) - First grant code

GRXLACK - Get Recipe Acknowledge (B[1]) - Recipe get acknowledgment

HANDLE - Handle (A) - Object handle identifier

HCACK - Host Command Acknowledge (B[1]) - 0: Acknowledged - 1: Invalid command - 2: Cannot perform now - 3: At least one parameter invalid - 4: Acknowledge after completion - 5: Rejected, already in desired condition - 6: No such object exists

HOACK - Host Online Acknowledge (B[1]) - Host online acknowledgment

HOCANCELACK - Host Online Cancel Acknowledge (B[1]) - Host online cancel response

HOCMDNAME - Host Online Command Name (A) - Name of host online command

HOHALTACK - Host Online Halt Acknowledge (B[1]) - Host online halt response

IACDS - Input Alarm Collection Definition Send (various) - Input alarm collection definition

IBCDS - Input Binary Collection Definition Send (B) - Input binary collection definition

IDTYP - ID Type (B[1]) - 0: Data ID - 1: Equipment ID

INPTN - Input Pattern (A) - Input pattern specification

ITEMACK - Item Acknowledge (B[1]) - Item operation acknowledgment

ITEMERROR - Item Error (A) - Error information for item

ITEMID - Item ID (A) - Unique identifier for item

ITEMINDEX - Item Index (U4) - Index position of item

ITEMLENGTH - Item Length (U4) - Length of item data

ITEMPART - Item Part (various) - Part of larger item

ITEMPARTCOUNT - Item Part Count (U4) - Number of parts in item

ITEMPARTLENGTH - Item Part Length (U4) - Length of item part

ITEMTYPE - Item Type (U1) - Type classification of item

ITEMTYPESUPPORT - Item Type Support (B[1]) - Support indicator for item type

ITEMVERSION - Item Version (A) - Version of item

JOBACTION - Job Action (U1) - Action to perform on job

LENGTH - Length (U1, U2, U4) - Generic length value

LIMITACK - Limit Acknowledge (B[1]) - Limit operation acknowledgment

LIMITID - Limit ID (A) - Identifier for limit

LIMITMAX - Limit Maximum (various) - Maximum limit value

LIMITMIN - Limit Minimum (various) - Minimum limit value

LINKID - Link ID (A) - Identifier for link

LOC - Location (A) - General location identifier

LOCID - Location ID (A) - Specific location identifier

LOWERDB - Lower Deadband (various) - Lower deadband value

LRACK - Link Report Acknowledge (B[1]) - 0: Acknowledged - 1: Denied, Insufficient space - 2: Denied, Invalid format - 3: Denied, At least one CEID already defined - 4: Denied, At least one CEID does not exist - 5: Denied, At least one RPTID does not exist

LVACK - Limit Value Acknowledge (B[1]) - Limit value acknowledgment

M-P¶

MAPER - Map Error (U1) - Map operation error code

MAPFT - Map Format (U1) - Format of map data

MAXNUMBER - Maximum Number (U4) - Maximum numeric value

MAXTIME - Maximum Time (U4) - Maximum time value

MCINDEX - Multi-Collection Index (U2) - Index for multi-collection

MDACK - Mode Data Acknowledge (B[1]) - Mode data acknowledgment

MDLN - Model Number (A[20]) - Equipment model designation

MEXP - Message Expected (B[1]) - Expected message indicator

MF - Message Format (U1) - Format of message

MHEAD - Message Header (B[10]) - Complete 10-byte SECS message header

MID - Message ID (U1, U2, U4, or A) - Message identifier

MIDAC - Message ID Acknowledge (B[1]) - Message ID acknowledgment

MIDRA - Message ID Response Acknowledge (B[1]) - Message ID response acknowledgment

MLCL - Multi-Level Collection List (various) - Multi-level collection data

MMODE - Machine Mode (U1) - Current machine operating mode

NACDS - New Alarm Collection Definition Send (various) - New alarm collection definition

NBCDS - New Binary Collection Definition Send (B) - New binary collection definition

NULBC - Null Byte Count (U1) - Count of null bytes

OBJACK - Object Acknowledge (B[1]) - Object operation acknowledgment

OBJCMD - Object Command (A) - Command for object

OBJID - Object ID (A) - Unique identifier for object

OBJSPEC - Object Specification (A) - Object specification string

OBJTOKEN - Object Token (A) - Token for object access

OBJTYPE - Object Type (A) - Type classification of object

OCEACK - Object Collection Event Acknowledge (B[1]) - Object collection event response

OFLACK - Offline Acknowledge (B[1]) - 0: Offline Accepted - 1: Offline Not Allowed

ONLACK - Online Acknowledge (B[1]) - 0: Online Accepted - 1: Online Not Allowed

OPEID - Operation Event ID (A) - Identifier for operation event

OPETYPE - Operation Event Type (U1) - Type of operation event

OPID - Operation ID (A) - Unique operation identifier

ORLOC - Origin Location (A) - Origin location identifier

OUTPTN - Output Pattern (A) - Output pattern specification

PARAMNAME - Parameter Name (A) - Name of parameter

PARAMVAL - Parameter Value (various) - Value of parameter

PDEATTRIBUTE - Process Data Element Attribute (various) - Process data element attribute

PDEATTRIBUTENAME - Process Data Element Attribute Name (A) - Name of process data element attribute

PDEATTRIBUTEVALUE - Process Data Element Attribute Value (various) - Value of process data element attribute

PDEREF - Process Data Element Reference (A) - Reference to process data element

PECEACK - Process Event Collection Enable Acknowledge (B[1]) - Process event collection enable response

PECRSLT - Process Event Collection Result (various) - Result of process event collection

PFCD - Process Function Code (U1) - Function code for process

PGRPACTION - Port Group Action (U1) - Action for port group

PODID - Point of Delivery ID (A) - Identifier for delivery point

PORTACTION - Port Action (U1) - Action for port

PORTGRPNAME - Port Group Name (A) - Name of port group

PPARM - Process Parameter (various) - Process parameter value

PPBODY - Process Program Body (A or B) - Content of process program

PPGNT - Process Program Grant (B[1]) - Process program grant response

PPID - Process Program ID (A) - Unique identifier for process program

PRAXI - Process Axis (A) - Process axis identifier

PRCMDNAME - Process Command Name (A) - Name of process command

PRCPREEXECHK - Process Pre-Execution Check (B[1]) - Pre-execution check flag

PRDCT - Product (A) - Product identifier

PREACK - Process Recipe Acknowledge (B[1]) - Process recipe acknowledgment

PREVENTID - Process Event ID (A) - Process event identifier

PRJOBID - Process Job ID (A) - Process job identifier

PRJOBMILESTONE - Process Job Milestone (A) - Process job milestone

PRJOBSPACE - Process Job Space (A) - Process job space allocation

PRMTRLORDER - Process Material Order (U2) - Order of process material

PRPAUSEEVENTID - Process Pause Event ID (A) - Event ID for process pause

PRPROCESSSTART - Process Process Start (A) - Process start identifier

PRRECIPEMETHOD - Process Recipe Method (A) - Process recipe method

PRSTATE - Process State (U1) - Current state of process

PSRACK - Process Start Request Acknowledge (B[1]) - Process start request response

PSREACK - Process State Request Acknowledge (B[1]) - Process state request response

PTN - Port Number (U1) - Port identification number

Q-Z¶

QPRKEACK - Query Process Recipe Key Acknowledge (B[1]) - Query process recipe key response

QREACK - Query Recipe Acknowledge (B[1]) - Query recipe response

QRXLEACK - Query Recipe Exclude Acknowledge (B[1]) - Query recipe exclude response

QUA - Quality (U1) - Quality indicator

RAC - Report Acknowledge (B[1]) - Report acknowledgment

RCMD - Remote Command (A) - Remote command string

RCPATTRDATA - Recipe Attribute Data (various) - Recipe attribute data

RCPATTRID - Recipe Attribute ID (A) - Recipe attribute identifier

RCPBODY - Recipe Body (A or B) - Recipe content

RCPBODYA - Recipe Body A (A) - Recipe body in ASCII format

RCPCLASS - Recipe Class (A) - Classification of recipe

RCPCMD - Recipe Command (A) - Recipe command

RCPDEL - Recipe Delete (A) - Recipe deletion identifier

RCPDESCLTH - Recipe Description Length (U2) - Length of recipe description

RCPDESCNM - Recipe Description Name (A) - Recipe description name

RCPDESCTIME - Recipe Description Time (A) - Recipe description timestamp

RCPID - Recipe ID (A) - Unique recipe identifier

RCPNAME - Recipe Name (A) - Name of recipe

RCPNEWID - Recipe New ID (A) - New recipe identifier

RCPOWCODE - Recipe Owner Code (A) - Recipe ownership code

RCPPARNM - Recipe Parameter Name (A) - Name of recipe parameter

RCPPARRULE - Recipe Parameter Rule (A) - Rule for recipe parameter

RCPPARVAL - Recipe Parameter Value (various) - Value of recipe parameter

RCPRENAME - Recipe Rename (A) - New name for recipe

RCPSECCODE - Recipe Security Code (A) - Security code for recipe

RCPSECNM - Recipe Section Name (A) - Name of recipe section

RCPSPEC - Recipe Specification (A) - Recipe specification

RCPSTAT - Recipe Status (U1) - Status of recipe

RCPUPDT - Recipe Update (A) - Recipe update identifier

RCPVERS - Recipe Version (A) - Version of recipe

READLN - Read Length (U4) - Length to read

REAPER - Report Error (U1) - Report error code

RECLEN - Record Length (U2) - Length of record

REFP - Reference Point (F4, F8) - Reference coordinate point

REPGSZ - Report Group Size (U2) - Size of report group

RESOLUTION - Resolution (F4) - Measurement resolution

RESPDESTAT - Response Delete Status (B[1]) - Status of response deletion

RESPEC - Request Specification (A) - Request specification string

RETAINRECIPE_DISABLE - Retain Recipe Disable (BOOLEAN) - Disable recipe retention

RETICLEID - Reticle ID (A) - Reticle identifier

RETICLEID2 - Reticle ID 2 (A) - Secondary reticle identifier

RETPLACEINSTR - Reticle Place Instruction (A) - Instruction for reticle placement

RETREMOVEINSTR - Reticle Remove Instruction (A) - Instruction for reticle removal

REVID - Revision ID (A) - Revision identifier

RIC - Report Item Count (U2) - Count of items in report

RMACK - Resource Manager Acknowledge (B[1]) - Resource manager acknowledgment

RMCHGSTAT - Resource Manager Change Status (B[1]) - Resource manager change status

RMCHGTYPE - Resource Manager Change Type (U1) - Type of resource manager change

RMDATASIZE - Resource Manager Data Size (U4) - Size of resource manager data

RMGRNT - Resource Manager Grant (B[1]) - Resource manager grant

RMNEWNS - Resource Manager New Namespace (A) - New namespace for resource manager

RMNSCMD - Resource Manager Namespace Command (A) - Resource manager namespace command

RMNSSPEC - Resource Manager Namespace Specification (A) - Resource manager namespace specification

RMRECSPEC - Resource Manager Record Specification (A) - Resource manager record specification

RMREQUESTOR - Resource Manager Requestor (A) - Resource manager requestor identifier

RMSEGSPEC - Resource Manager Segment Specification (A) - Resource manager segment specification

RMSPACE - Resource Manager Space (A) - Resource manager space identifier

RMSPWD - Resource Manager Space Password (A) - Password for resource manager space

RMSUSERID - Resource Manager Space User ID (A) - User ID for resource manager space

ROWCT - Row Count (U2) - Number of rows

RPMACK - Report Parameter Acknowledge (B[1]) - Report parameter acknowledgment

RPSEL - Report Selection (U1) - Report selection criteria

RPTID - Report ID (U1, U2, U4, or A) - Unique identifier for report

RPTOC - Report Occurrence (U2) - Report occurrence count

RQCMD - Request Command (A) - Request command string

RRACK - Recipe Request Acknowledge (B[1]) - Recipe request acknowledgment

RRACK_S20 - Recipe Request Acknowledge S20 (B[1]) - S20 specific recipe request acknowledgment

RSACK - Recipe Send Acknowledge (B[1]) - Recipe send acknowledgment

RSDA - Recipe Send Data A (A) - Recipe send data in ASCII

RSDC - Recipe Send Data C (various) - Recipe send data compressed

RSINF - Recipe Send Information (A) - Recipe send information

RSPACK - Reset Spool Acknowledge (B[1]) - Reset spool acknowledgment

RTSRSPSTAT - Real Time Status Response Status (B[1]) - Real time status response

RTYPE - Report Type (U1) - Type of report

RecID - Record ID (A) - Record identifier

SDACK - Send Data Acknowledge (B[1]) - Send data acknowledgment

SDBIN - Send Data Binary (B) - Binary data to send

SENDRSPSTAT - Send Response Status (B[1]) - Status of send response

SEQNUM - Sequence Number (U4) - Sequence number

SFCD - Stream Function Code (U2) - SECS stream and function code

SHEAD - Stream Header (B[4]) - Stream header information

SLOTID - Slot ID (U1, U2) - Slot identifier

SMPLN - Sample Number (U1, U2, U4) - Sample identification number

SOFTREV - Software Revision (A[20]) - Software revision string

SPAACK - Substrate Position Acknowledge (B[1]) - Substrate position acknowledgment

SPD - Substrate Position Data (various) - Substrate position information

SPID - Substrate Position ID (A) - Substrate position identifier

SPNAME - Substrate Position Name (A) - Name of substrate position

SPR - Substrate Position Reference (A) - Reference for substrate position

SPVAL - Substrate Position Value (various) - Value of substrate position

SSAACK - Substrate Status Acknowledge (B[1]) - Substrate status acknowledgment

SSACK - Substrate Send Acknowledge (B[1]) - Substrate send acknowledgment

SSCMD - Substrate Send Command (A) - Substrate send command

STATUS - Status (U1) - General status indicator

STATUSTXT - Status Text (A) - Status description text

STIME - Start Time (A) - Start time stamp

STRACK - Substrate Track (A) - Substrate tracking identifier

STRID - Stream ID (B[1]) - SECS stream identifier

STRP - Map Strip Data (various) - Wafer map strip data

SV - Status Variable (various) - Status variable value

SV0 - Status Variable 0 (various) - First status variable

SVCACK - Service Acknowledge (B[1]) - Service acknowledgment

SVCNAME - Service Name (A) - Name of service

SVID - Status Variable ID (U1, U2, U4, or A) - Status variable identifier

SVNAME - Status Variable Name (A) - Name of status variable

TARGETID - Target ID (A) - Target identifier

TARGETPDE - Target Process Data Element (A) - Target process data element

TARGETSPEC - Target Specification (A) - Target specification

TBLACK - Table Acknowledge (B[1]) - Table operation acknowledgment

TBLCMD - Table Command (A) - Table command

TBLELT - Table Element (various) - Table element data

TBLID - Table ID (A) - Table identifier

TBLTYP - Table Type (U1) - Type of table

TCID - Transaction Control ID (A) - Transaction control identifier

TEXT - Text (A) - Text data

TIAACK - Trace Initialize Acknowledge (B[1]) - 0: Acknowledged - 1: Denied, Insufficient space - 2: Denied, Invalid format - 3: Denied, At least one SVID does not exist - 4: Denied, Busy

TIACK - Time Acknowledge (B[1]) - 0: Acknowledged - 1: Error

TID - Terminal ID (B[1]) - Terminal identifier

TIME - Time (A[16]) - Time stamp in format "YYMMDDhhmmss[cc]"

TIMESTAMP - Time Stamp (A) - General timestamp

TOTSMP - Total Samples (U1, U2, U4) - Total number of samples

TRACK - Track (A) - Track identifier

TRANSFERSIZE - Transfer Size (U4) - Size of data transfer

TRATOMCID - Transaction Atomic ID (A) - Atomic transaction identifier

TRAUTOD - Transaction Auto Delete (BOOLEAN) - Auto delete transaction flag

TRAUTOSTART - Transaction Auto Start (BOOLEAN) - Auto start transaction flag

TRCMDNAME - Transaction Command Name (A) - Name of transaction command

TRDIR - Transfer Direction (U1) - Direction of transfer

TRID - Trace Request ID (U1, U2, U4, or A) - Trace request identifier

TRJOBID - Transaction Job ID (A) - Transaction job identifier

TRJOBMS - Transaction Job Milestone (A) - Transaction job milestone

TRJOBNAME - Transaction Job Name (A) - Name of transaction job

TRLINK - Transaction Link (A) - Transaction link identifier

TRLOCATION - Transaction Location (A) - Transaction location

TROBJNAME - Transaction Object Name (A) - Name of transaction object

TROBJTYPE - Transaction Object Type (A) - Type of transaction object

TRPORT - Transfer Port (U1) - Transfer port number

TRPTNR - Transfer Partner (A) - Transfer partner identifier

TRPTPORT - Transfer Point Port (U1) - Transfer point port

TRRCP - Transaction Recipe (A) - Transaction recipe

TRROLE - Transaction Role (A) - Role in transaction

TRTYPE - Transfer Type (U1) - Type of transfer

TSIP - Time Stamp Input (A) - Input timestamp

TSOP - Time Stamp Output (A) - Output timestamp

TTC - Total Transfer Count (U4) - Total count of transfers

TYPEID - Type ID (A) - Type identifier

UID - User ID (A) - User identifier

UNFLEN - Unformatted Length (U4) - Length of unformatted data

UNITS - Units (A) - Measurement units

UPPERDB - Upper Deadband (various) - Upper deadband value

V - Variable Value (various) - Generic variable value

VERID - Version ID (A) - Version identifier

VERIFYDEPTH - Verify Depth (U1) - Depth of verification

VERIFYRSPSTAT - Verify Response Status (B[1]) - Verification response status

VERIFYSUCCESS - Verify Success (BOOLEAN) - Verification success flag

VERIFYTYPE - Verify Type (U1) - Type of verification

VID - Variable ID (U1, U2, U4, or A) - Variable identifier

VLAACK - Variable Limit Attribute Acknowledge (B[1]) - Variable limit attribute acknowledgment

WRACK - Write Acknowledge (B[1]) - Write operation acknowledgment

XDIES - X Dies (U2) - Number of dies in X direction

XYPOS - XY Position (F4, F8) - X,Y coordinate position

YDIES - Y Dies (U2) - Number of dies in Y direction Hex: D1 04 FF FF FF FF

Signed Int: I1[1] = -128 Hex: 81 01 80

           I2[1] = -32768
            Hex: 71 01 80 00

Float: F4[1] = 3.14159 Hex: B1 04 40 49 0F D0

List: {L:2 item1 item2} Hex: 01 02 ... ...

Empty List: {L:0} Hex: 01 00 ```

Implementation Guidelines¶

1. Message Validation¶

Verify message length consistency
Validate stream/function combinations
Check wait bit appropriateness
Ensure proper system bytes uniqueness

2. Response Handling¶

Always respond to messages with wait bit set
Use same system bytes in response
Implement proper timeout handling
Handle transaction aborts gracefully

3. State Management¶

Track connection state (Not Connected, Selected, Online)
Implement proper state transitions
Handle communication establishment sequence
Manage heartbeat and linktest mechanisms

4. Error Handling¶

Implement S9 error messages for invalid requests
Use proper reject codes
Log communication errors appropriately
Provide meaningful error descriptions

5. Data Encoding¶

Use appropriate SECS-II data types
Handle endianness correctly
Validate data item structure
Support multi-byte length fields when needed

References¶

SEMI E5 Specification
SEMI E37 HSMS Generic Services
SEMI E30 GEM (Generic Equipment Model)